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Development of Ultra-high-precision Micromachining System using Dry EDM

Research Project

Project/Area Number 09555038
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field 機械工作・生産工学
Research InstitutionTokyo University of Agriculture & Technology

Principal Investigator

KUNIEDA Masanori  Tokyo University of Agriculture & Technology Department of Mechanical Systems Engineering Associate Professor, 工学部, 助教授 (90178012)

Co-Investigator(Kenkyū-buntansha) KANEKO Yuhji  Sodick Co., Ltd.Research and Devepolment Division Chief Director, 研究開発本部, 部長
YOSHIDA Masahiro  Tokyo University of Agriculture & Technology Department of Mechanical Systems En, 工学部, 教務職員 (80220680)
Project Period (FY) 1997 – 1998
Project Status Completed (Fiscal Year 1998)
Budget Amount *help
¥5,300,000 (Direct Cost: ¥5,300,000)
Fiscal Year 1998: ¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 1997: ¥4,300,000 (Direct Cost: ¥4,300,000)
Keywordselectrical discharge machining / micromachining / dry EDM / material removal rate / tool electrode wear / oxygen gas / piezoelectric actuator / residual stress / 中実電極 / 気中WEDG / 高精度 / 短絡 / 短絡率 / 加工ギャップ / 高電圧重畳 / 高速サーボ機構
Research Abstract

This research aims to develop an ultra-high-precision micromachining system using dry electrical discharge machining (dry EDM). In dry EDM, with the help of a high-pressure gas flow supplied through a thin-walled pipe electrode, the molten workpiece material can be removed and flushed out of the working gap without being reattached to the electrode surfaces. One of the greatest advantages of this technique is that the tool electrode wear ratio is almost zero for any pulse duration. Furthermore, the process reaction force is negligibly small and the residual stress generated on the surface machined is quite low compared with the conventional EDM using oil as the dielectric liquid. As a result, the dry EDM is expected to be one of the most promising techniques for micromachining.
However, the material removal rate is considerably lower than that of the conventional EDM, because the probability of short circuiting during successive pulse discharge ranges up to ninety five percent due to th … More e extremely narrow working gap. Hence, to lower the probability of short circuiting, first a high frequency response piezoelectric actuator was installed on the working table and driven by a servo control which operates together with the original servo-feed mechanism of the Z-axis of the EDM machine. Secondly, the open voltage was raised to obtain a longer gap distance to prevent short circuiting. Experimental results show that both measures are effective to obtain a dramatic increase in the material removal rate.
To scale down the size which can be achieved using the dry EDM, usage of the pipe electrode should be eliminated, because there is a limitation in the minimum diameter of the pipe electrode. Hence, the dry EDM using solid electrode was tried by means of supplying oxygen gas jet to the discharge gap from a nozzle which is positioned outside the gap. The minimum diameter of rods machined by WEDG in oxygen gas was 5 mu m, and the distortion of the obtained rod 15 mu m in diameter and 200 mu m in length was much smaller than that obtained in a dielectric liquid. Furthermore, the ratio of tool electrode wear in the dry-micro-EDM was found to be significantly low compared with that obtained with the conventional micro-EDM in liquid. Less

Report

(3 results)
  • 1998 Annual Research Report   Final Research Report Summary
  • 1997 Annual Research Report
  • Research Products

    (27 results)

All Other

All Publications (27 results)

  • [Publications] M.Kunieda: "Electrical Discharge Machining in Gas" Annals of the CIRP. 46. 143-146 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Yoshida: "Study on the Distribution of Scattered Debris Generated by a Single Pulse Discharge in EDM Process" International Journal of Electrical Machining. 3. 39-46 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Yoshida: "Improvement of Material Removal Rate of Dry EDM Using Piezoelectric Actuator Coupled with Servo-Feed Mechanism" Proc.14^<th> Int.Conf.on Computer-Aided Production Engineering. 283-288 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 国枝正典: "気中放電加工" 精密工学会誌. 64. 1735-1738 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 吉田政弘: "気中放電加工における加工ギャップの測定" 電気加工学会全国大会(1997)講演論文集. 75-78 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 藤原 剛: "気中放電加工の微細加工領域への適用限界" 1998年度精密工学会秋季大会講演論文集. 446-446 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Kunieda, M.Yoshida: "Electrical Discharge Machining in Gas" Annals of the CIRP. Vol.46. 143-146 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Yoshida, M.Kunieda: "Study on the Distribution of Scattered Debris Generated by a Single Pulse Discharge in EDM Process" International Journal of Electrical Machining. No.3. 39-46 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Yoshida, M.Kunieda and Y.Kaneko: "Improvement of Material Removal Rate of Dry DEM Using Piezoelectric Actuator Coupled with Servo-Feed Mechanism" Proc.14^<th> Int.Conf.on Computer-Aided Production Engineering. 283-288 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Kunieda, M.Yoshida: "Dry EDM" J.JSPE. Vol.64, No.12. 1735-1738 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Yoshida, M.Kunieda: "Micro-machining by EDM in Gas" Conf.on Die and Mold Technology '97. 160-161 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Yoshida, M.Kunieda: "Measurement of Machining Gap Distance on Dry EDM" Proc.Annual Meeting of JSEME. 75-78 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Yoshida, M.Kunieda and Y.Kaneko: "Improvement of Machining Rate of EDM in Gas Using PZT Actuator as Supplementary Servomechanism" Proc.of Spring Meeting of JSPE. 338 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Kunieda, M.Yoshida and Y.Kaneko: "Study on Characteristics of Dry EDM" Denki Kako Gijutsu. Vol.22, No.72. 12-17 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Fujiyama, M.Kunieda and M.Yoshida: "Application of Dry EDM to Micro Machining" Proc.of Autumn Meeting of JSPE. 446 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Kunieda: "Electrical Discharge Machining in Gas" Annals of the CIRP. 46. 143-146 (1997)

    • Related Report
      1998 Annual Research Report
  • [Publications] M.Toshida: "Study on the Distribution of Scattered Debris Generated by a Single Pulse Discharge in EDM Process" International Journal of Electrical Machining. 3. 39-46 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] M.Yoshida: "Improvement of Material Removal Rate of Dry EDM Using Piezoelectric Actuator Coupled with Servo-Feed Mechanism" Proc.14^<th>Int.Conf.on Computer-Aided Production Engineering. 283-288 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 国枝正典: "気中放電加工" 精密工学会誌. 64・12. 1735-1738 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 吉田政弘: "気中放電加工における加工ギャップの測定" 電気加工学会全国大会(1997)講演論文集. 75-78 (1997)

    • Related Report
      1998 Annual Research Report
  • [Publications] 藤原 剛: "気中放電加工の微細加工領域への適用限界" 1998年度精密工学会秋季大会講演論文集. 446-446 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] M.Kunieda: "Electrical Discharge Machining in Gas" CIRP Annals. 46・1. 143-146 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 安達芳朗: "単発放電における気泡の挙動と加工反力" 電気加工学会誌. 31・67. 23-30 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] M.Yoshida: "Study on the Distribution of Scattered Debris Gemerated by a Single Pulse Discharge in EDM Process" Intermatinal Journal of Electrical Machining. No.3. 39-46 (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] 吉田政弘: "気中放電加工による微細加工" 型技術者会議'97. 160-161 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 吉田政弘: "気中放電加工における加工ギャップの測定" 電気加工学会(1997)講演論文集. 75-78 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 吉田政弘: "電極送り制御の高速化による気中放電加工の加工速度向上の試み" 1998年度精密工学会春季大会講演論文集. 338- (1998)

    • Related Report
      1997 Annual Research Report

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Published: 1997-04-01   Modified: 2016-04-21  

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