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Development of Micro Handling Mini Robot

Research Project

Project/Area Number 09555079
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionTokyo University of Agriculture & Technology

Principal Investigator

TOYAMA Shigeki  Tokyo A&T University, Department of Technology, Professor, 工学部, 教授 (20143381)

Co-Investigator(Kenkyū-buntansha) 和田 博  ダブル技研(株), 代表取締役研究職
HASHIMOTO Takayoshi  Y. T. system, President, 取締役社長研究職
NAGAI Masao  Tokyo A&T University, Department of Technology, Professor, 工学部, 教授 (10111634)
Project Period (FY) 1997 – 1999
Project Status Completed (Fiscal Year 1999)
Budget Amount *help
¥2,500,000 (Direct Cost: ¥2,500,000)
Fiscal Year 1999: ¥1,400,000 (Direct Cost: ¥1,400,000)
Fiscal Year 1998: ¥1,100,000 (Direct Cost: ¥1,100,000)
Keywordsspherical ultrasonic motor / positioning stage / laser light / micro actuator / マイクロモータ / 超音波 / 球面モータ
Research Abstract

We have developed a micro handling robot in this research. This has a spherical ultrasonic motor with rotational three degree of freedom and a sandwich type of ultrasonic motor. The spherical ultrasonic motor consists of a semispherical rotor made of glass and three ring type stators. We set mirrors in the center of the semispherical rotor and measure the posture, detecting the reflected laser light from them by a PSD devices. The stator has two phases piezoelectric ceramics laminated at the back of it. We can rotate the rotor about arbitrary axis by applying alternating voltages to each ceramics and changing the phase difference and the frequency. In the case of precise positioning, we control the number of elastic wave generated on the surface of the stator. The motor has capability of positioning in the accuracy of 1/1000 degrees and settling in three milli seconds in the movable range of three degrees. Furthermore, we added the sandwich type ultrasonic motor to the link attached to the semi-spherical rotor. Since this motor has two stators holding rotor disk between them, the output torque is twice as high as in the case of one stator.
This micro robot has excellent features of positioning accuracy and settling time for biotechnological and medical applications.

Report

(4 results)
  • 1999 Annual Research Report   Final Research Report Summary
  • 1998 Annual Research Report
  • 1997 Annual Research Report
  • Research Products

    (12 results)

All Other

All Publications (12 results)

  • [Publications] 瀬川裕之 遠山茂樹: "超音波モータを用いた3自由度位置決めステージの開発"1998年度 精密工学会秋季大会学術講演会講演論文集. 476 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 小坂貴之 遠山茂樹: "小型超音波モータにおける櫛歯の挙動解析"998年度 精密工学会秋季大会学術講演会講演論文集. 574 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] E. Purwanto and S. TOYAMA: "Sub-micron level fine alignment system by using the ultrasonic spherical motor"Proc. of Tenth World Congress on TMM. 5. 1997-2002 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Hiroyuki SEGAWA and Shigeki YOYAMA: "Development of high accurate positioning stage by ultrasonic motor"Proc. Of the Japan Society for Precision Engineering, Autumn meeting. 476 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Takayuki KOSAKA and Shigeki TOYAMA: "Analysis of teeth of ultrasonic motor"Proc. Of the Japan Society for Precision Engineering, Autumn meeting. 574 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] E. Purwanto and S. YOYAMA: "Sub-micron level fine alignment system by using the ultrasonic spherical motor"Proc. Of Tenth World Congress on TMM. Vol. 5. 1997-2002 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 瀬川裕之 遠山茂樹: "超音波モータを用いた3自由度位置決めステージの開発"1998年度 精密工学会秋季大会学術講演会講演論文集. 476 (1998)

    • Related Report
      1999 Annual Research Report
  • [Publications] 小坂貴之 遠山茂樹: "小型超音波モータにおける櫛歯の挙動解析"1998年度 精密工学会秋季大会学術講演会講演論文集. 574 (1998)

    • Related Report
      1999 Annual Research Report
  • [Publications] E.Purwanto and S.TOYAMA: "Sub-micron level fine alignment system by using the ultrasonic spherical motor"Proc.of Tenth World Congress on TMM. vol.5. 1997-2002 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 瀬川裕之 遠山茂樹: "超音波モータを用いた3自由度位置決めステージの開発" 1998年度精密工学会秋季大会学術講演会講演論文集. 574 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 小坂貴之 遠山茂樹: "小型超音波モータにこける櫛歯の挙動解析" 1998年度精密工学会秋季大会学術講演会講演論文集. 467 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 遠山 茂樹: "Development of Advanced Multi degree of freedom Spherical Ultrasonic Motor" Proc.of MECATRONICS'96-Besancon. 2. 878-882 (1996)

    • Related Report
      1997 Annual Research Report

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Published: 1998-04-01   Modified: 2016-04-21  

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