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Development of nanometric photochemical vapor deposition by optical near field

Research Project

Project/Area Number 09555096
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Electronic materials/Electric materials
Research InstitutionTokyo Institute of Technology

Principal Investigator

OHTSU Motoichi  Tokyo Institute of Technology, Interdisciplinary Graduate School of Science and Engineering, Professor, 大学院・総合理工学研究科, 教授 (70114858)

Co-Investigator(Kenkyū-buntansha) YOKOMORI Kiyoshi  RICOH Corp., R&D Center, Department Head, 研究開発本部RD企画室, 室長
KOUROGI Motonobu  Institute of Technology, Interdisciplinary Graduate School of Science and Engine, 大学院・総合理工学研究科, 助手 (10251662)
TSUTSUI Kazuo  Tokyo Institute of Technology, Interdisciplinary Graduate School of Science and, 大学院・総合理工学研究科, 助教授 (60188589)
Project Period (FY) 1997 – 1998
Project Status Completed (Fiscal Year 1998)
Budget Amount *help
¥14,200,000 (Direct Cost: ¥14,200,000)
Fiscal Year 1998: ¥5,500,000 (Direct Cost: ¥5,500,000)
Fiscal Year 1997: ¥8,700,000 (Direct Cost: ¥8,700,000)
Keywordsphotochemical vapor deposition / near-field / fiber / probe / photomask / 近接場 / 気相化学堆積
Research Abstract

Method of nanometric photochemical vapor deposition (PCVD) was proposed by using optical near field(ONF). Plenucleation technique was also proposed in order to preventing deposition on the fiber probe. Direct deposition was also proposed and tried. First, using a low loss optical fiber in the ultraviolet region, reproducible technique of selective chemical etching was developed to fabricate a fiber probe for ONE generation. For this etching, bufferdHF solution was used. As a result, the transmission loss was reduced to 0.1dB/m. By this fiber probe, the efficiency of generating ONE and the ONF power density were increased to 1 x 10^<-2>, and 1kW/cm^2, respectively, which are sufficiently high for inducing photochemical reaction for PCVD.Installing this probeinto a vacuum chamber filled with Zn(CH_3)_2 molecular gas, experiments were carried out to deposit metallic Zn atoms on a flat glass plate after dissociating Zn(CH_3)_2 molecules by ONE on the top of the fiber probe. The second harm … More onics of an argon laser and excimer laser were used as a light source. Computer softw are for scanning the probe and shear-force detection/control system were developed. As aresult of experimentusing the abovementioned experimental system, deposition of Zn pattern with the width as narrow as 20 nm was confirmed. The number of atomic layers was estimated to be eight. Real width should be narrower than 20 nm because this observed value is limited by the resolution of shear-force microscope. Advantage of thie deposition is that an arbitrary pattem can be deposited by scanning the probe, which can be conveniently used for repairing the photomask of IC.The width of the pattern depend on the probe size, not on the deposition time. The height was proportional to the deposition time. For further development, nano-sizeddots of ZnO was depositedby introducing oxigen gas into the Zn(CH_3)_2 gas. Since ZnO can emit a blue light, kind of deposition of semiconductor dots can open a new field of nanometric photonic integration. Less

Report

(3 results)
  • 1998 Annual Research Report   Final Research Report Summary
  • 1997 Annual Research Report

Research Products

(33 results)

All Other

All Publications (33 results)

  • [Publications] T.Saiki, N.Saito, M.Ohtsu: "Near-field optical study of semiconductor photonic devices" Materials Science & Engineering. B48・1. 162-168 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Yatsui, M.Kourogi, M.Ohtsu: "Highly efficient excitation of optical near-field on an apertured fiber probe with an asymmetric structure" Appl.Phys.Lett.71・13. 1756-1758 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] A.V.Zvyagin, J.D.White, M.Kourogi M.Kozuma, M.Ohtsu: "Solution to the bistability problem in shear force distance regulation encountered in scanning force and near-field optical microscope" Appl.Phys.Lett.71・17. 2541-2543 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Mononobe, R.Uma Maheswari, M.Ohtsu: "Fabrication of a pencil-shaped fiber probe with a nanometric protrusion from a metal film for near-field optical microscopy" Opt.Express. 1・8. 229-233 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Ito, K.Sakaki, W.Jhe, M.Ohtsu: "EVanescent-light induced atom-guidance using a hollow optical fiber with light coupled sideways" Opt.Commun.141. 43-47 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Y.Narita, T.Tadokoro, T.Ikeda, T.Saiki, S.Mononobe, M.Ohtsu: "Near-Field Raman Sectral Measurement of Polydiacetylene" Applied Spectroscopy. 52・9. 1141-1144 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Yatsui, M.Kourogi, M.Ohtsu: "Increasing throughput of a near-field otical fiber probe over 1000 times by the use of a triple-tapered structure" Applied Physics Letters. 73・15. 2090-2092 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Matsumoto, T.Ichimura, T.Yatsui M.Kourogi, T.Saiki, M.Ohtsu: "Fabrication of a Near-Field Optical Fiber Probe with a Nanometric Metallized Protrusion" Optical Review. 5・6. 369-373 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] V.V.Polonski, Y.Yamamoto, M.Kourogi, H.Fukuda, M.Ohtsu: "Nanometric patterning of zinc by optical near-field photochemical vapour deposition" J.Microscopy. 194・2印刷中. (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 大津元一: "入門レーザー" 裳華房, 200 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 大津元一, 河田 聡: "近接場ナノフォトニクスハンドブック" オプトロニクス社, 270 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Ohtsu: "Near-Field Nano/Atom Optics and Technology" Springer-Verlag, 302 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Saiki, N.Saito, and M.Ohtsu: "Near-field optical study of semiconductor photonic devices" Material Sceince&Engineering. B48-1. 162-168 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Yatsui, M.Kourogi, and M.Ohtsu: "Highly efficient excitation of optical near-field on an apertured fiber probe with an asymmetric structure" Appl.Phys.Lett.71-13. 1756-1758 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] A.V.Zvyiagin, J.D.White, M.Kourogi, M.Kozuma, and M.Ohtsu: "Solution to the bistability problem in shear forcedistanceregulation encountered in scanning force and near-field optical microscope" Appl.Phys.Lett.71-17. 2541-2543 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Mononobe, R.Uma Maheswari, and M.Ohtsu: "Fabrication of a pencil-shaped fiber probe with a nanometric protrusion from a metal film for near-field optical microscopy" Opt.Express. 1-8. 229-233 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Ito, K.Sakaki, W.Jhe, and M.Ohtsu: "Evanescent-light induced atom-guidance using a hollow optical fiber with light coupled sideways" Opt.Commun. 141. 43-47 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Y.Narita, T.Tadokoro, T.Ikeda, T.Saiki, S.Mononobe, and M.Ohtsu: "Near-Field Raman Spectral Measurement of Polydiacetylene" Applied Spectroscopy. 52-9. 1141-1144 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Yatsui, M.Kourogi, and M.Ohtsu: "Increasing throughput of a near-field optical fiber probe over 1000times by the use of a triple-tapered structure" Applied Physics Letters. 73-15. 2090-2092 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Matsumoto, T.Ichimura, T.Yatsui, M.Kourogi, T.Saiki, and M.Ohtsu: "Fabrication of a Near-Field Optical Fiber Probe with a Nanometric Metallized Protrusion" Optical Review. 5-6. 369-373 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] V.V.Polonski, Y.Yamamoto, M.Kourogi, H.Fukuda, and M.Ohtsu: "Nanometric patterning of zinc by optical near-field photochemical vapor deposition" J.Microscopy. vol.194, pt.2.(in press). (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Ohtsu: Near-Field Nano/Atom Optics and Technolog. Springer-Verlag, Berlin, New York, Tokyo, 302 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Y.Narita,T.Tadokoro,T.Ikeda,T.Saiki,S.Mononobe,M.Ohtsu: "Near-Field Raman Spectral Measurement of Polydiacetylene" Applied Spectroscopy. 52・9. 1141-1144 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] T.Yatsui,M.Kourogi,M.Ohtsu: "Increasing throughput of a near-field optical fiber probe over 1000 times by the use of a triple-tapered structure" Applied Physics Letters. 73・15. 2090-2092 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] T.Matsumoto,T.Ichimura, T.Yatsui M.Kourogi,T.Saiki,M.Ohtsu: "Fabrication of a Near-Field Optical Fiber Probe with a Nanometric Metallized Protrusion" Optical Review. 5・6. 369-373 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] M.Ohtsu: "Near-Field Nona/Atom Optics and Technology" Springer-Verlag, 302 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] T.Saiki, N.Saito, and M.Ohtsu: "Near-field optical study of semiconductor photonic devices" Materials Science & Engineering. vo1.B48,no.1. 162-168 (19987)

    • Related Report
      1997 Annual Research Report
  • [Publications] A.V.Zvyagin, J.D.White, M.Kourogi, M.Kozuma, and M.Ohtsu: "Solution to the bistability problem in shear force distance regulation encountered in scanning force and near-field optical microscope" Appl.Phys.Lett.Vo1.71,no.17. 2541-2543 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] T.Yatsui, M.Kourogi, and M.Ohtsu: "Highly efficient excitation of optical near-field on an apertured fiber probe with an apertured fiber probe with an asymmetric structure" Appl.Phys.Lett.vo1.71,no.13. 1756-1758 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] S.Mononobe, R.UmaMaheswari, and M.Ohtsu: "Fabrication of a pencil-shaped fiber probe with a nanometric protrusion from a metal film for near-field optical microscopy" Opt.Express. vo1.1,no.8. 1-5 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] H.Ito, K.Sakaki, W.Jhe, and M.Ohtsu: "Evanescent-light induced atom-guidance using a hollow optical fiber with light coupled sideways" Opt.Commun.vo1.141. 43-47 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 大津元一: "入門レーザー" 裳華房, 200 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 大津元一, 河田 聡: "近接場ナイフォトニクスハンドブック" オプトロニクス社, 270 (1997)

    • Related Report
      1997 Annual Research Report

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Published: 1997-03-31   Modified: 2016-04-21  

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