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Metallization of polymer surfaces for downsizing of electronic devices

Research Project

Project/Area Number 09555201
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Composite materials/Physical properties
Research InstitutionShizuoka University

Principal Investigator

INAGAKI Norihiro  Shizuoka University Fac. Eng. Professor, 工学部, 教授 (30022015)

Co-Investigator(Kenkyū-buntansha) SUZUKI Takanori  Tomoegawa Paper Co. Senior Researcher, 技術研究所, 首席研究員
YAMASHITA Mitsuji  Shizuoka University Fac. Eng. Professor, 工学部, 教授 (60110748)
TASAKA Shigeru  Shizuoka University Fac. Eng. Professor, 工学部, 教授 (10134793)
Project Period (FY) 1997 – 1999
Project Status Completed (Fiscal Year 1999)
Budget Amount *help
¥12,700,000 (Direct Cost: ¥12,700,000)
Fiscal Year 1999: ¥4,200,000 (Direct Cost: ¥4,200,000)
Fiscal Year 1998: ¥2,200,000 (Direct Cost: ¥2,200,000)
Fiscal Year 1997: ¥6,300,000 (Direct Cost: ¥6,300,000)
KeywordsCopper metallization / Teflon / Polyimide / Plasma treatment / Silane coupling / Electroless plating / Electro plating / Imidazole / 表面金属化 / メタライジング / フッ素ポリマー / 同軸ケーブル / プリント配線基板 / シランカップリング反応 / ポリテトラフルオロエチレン / リモートプラズマ
Research Abstract

The concept of this project is based on the preliminary results, which have been published by the head investigator in the Journal (Macromolecules). These are (1) Improved Adhesion between Kapton Film and Copper Metal by Plasma Graftpolymerization of Vinylimidazole (Macromolecules, vol. 29, pp. 1642-1648 (1996)), and (2) Surface Modification of Poly(tetrafluoroethylene) by remote Hydrogen Plasma (Macromolecules, vol. 29, pp. 4331-4339 (1996)). Introduction of some residues which can strongly interact with metal surface are introduced into the polymer surfaces is an essential factor in order to metallize polymer surfaces. Following procedures were designed:
For copper metallization of polyimide which is superior to electrical resistance, mechanical and thermal properties, the imidazole group was used as a residue to interact strongly with copper metal surface. 3'(Trimethoxysilyl)propoxy-2-hydroxypropyl-1,3-diazole was coupled with Kapton film surfaces which had been treated with argon plasma (plasma treatment). For copper metallization of fluoropolymers which are excellent electrical resistance in the high frequency current, the carbonyl group which was formed by hydrogen plasma treatment was used as a residue to interact wit metal surface.
The copper metallization of these polymer surfaces succeeded. The adhesion between the copper metal and polymer surface was good for practice usage.

Report

(4 results)
  • 1999 Annual Research Report   Final Research Report Summary
  • 1998 Annual Research Report
  • 1997 Annual Research Report
  • Research Products

    (27 results)

All Other

All Publications (27 results)

  • [Publications] 稲垣訓宏: "プラズマ、エキシマレーザーを利用した高分子表面改質"表面科学. 18. 543-548 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] N.Inagaki, S.Tasaka, and Y.Goto: "Surface modification of poly(tetrafluoroethylene) film by plasma graftpolymerization of sodium vinylsulfonate"Journal of Applied Polymer Science. 66. 77-84 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 稲垣訓宏: "リモートプラズマ処理によるポリマーの表面改質"日本接着学会誌. 34. 73-77 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] N.Inagaki, S.Tasaka, and Y.W.Park: "Effects of the surface modification by remote hydrogen plasma on adhesion in the electroless copper/tetrafluoroethylene-hexafluoropropylene copolymer system"Journal of Adhesion Science & Technology. 12. 1105-1119 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] N.Inagaki, S.Tasaka, and A.Onodera: "Improved adhesion between Kapton film and copper metal by silane-coupling reactions"Journal of Applied Polymer Science. 73. 1645-1654 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] N.Inagaki, S.Tasaka, K.Narushima, and K.Mochizuki: "Surface modification of tetrafluoroethylene-perfluoroalkyl vinylether copolymer by remote H2 plasma and surface metallization with electroless plating copper metal"Macromolecules. 32. 5866-5871 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] N.Inagaki, S.Tasaka and t.Umehara: "Effects of surface modification by remote hydrogen plasma on adhesion in Poly(tetrafluoroethylene)/copper composite"Journal of Applied Polymer Science. 71. 2191-2200 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] N. Inagaki: "Surface modification of polymers by plasma and eximer laser"Hyomen Kagaku. vol. 18. 543-548 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] N. Inagaki, S. Tasaka, and Y. Goto: "Surface modification of poly(tetrafluoroethylene) film by graftpolymerization of sodium vinylsulfonate"Journal of Applied Polymer Science. vol. 66. 77-84 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] N. Inagaki: "Surface modificatio of polymers by remote plasma"Journal of the Adhesion Science Society of Japan. vol. 34. 73-77 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] N. Inagaki, S. Tasaka, and Y. W. Park: "Effects of the the surface modification by remote hydrogen plasma on adhesion in the electroless copper/tetrafluoroethylene-hexafluoropropylene copolymer system"Journal of Adhesion Science & Technology. vol. 12. 1105-1119 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] N. Inagaki, S. Tasaka, and T. Umehara: "Effects of surface modification by remote hydrogen plasma on adhesion in poly(tetrafluoroethylene)/copper composite"Journal of Applied Polymer Science. vol. 71. 2191-2200 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] N. Inagaki, S. Tasaka, and A. Onodera: "Improved adhesion between Kapton film and copper metal by silane-coupling reactions"Journal of Applied Polymer Science. vol. 73. 1645-1654 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] N. Inagaki, S. Tasaka, K. Narushima, and K. Mochizuki: "Surface modification of tetrafluoroethylene-perfluoroalkyl vinylether copolymer by remote hydrogen plasma and surface metallization with electroless plating copper metal"Macromolecules. vol. 32. 5866-5871 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] N.Inagaki,S.Tasaka,and T.Umehara: "Effects of surface modification by remote hydrogen plasma on adhesion in Poly(tetrafluoroethylene)/copper composite"Journal of Applied Polymer Science. 71. 2191-2200 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] N.Inagaki,S.Tasaka,K.Narushima,and K.Mochizuki: "Surface modification of tetrafluoroethylene-perfluoroalkl vinylether copolymer(PFA) by remote hydrogen plasma and surface metallization with electroless plating of co"Macromolecules. 32. 8566-8571 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] N.Inagaki,S.Tasaka,and A.Onodera: "Improved adhesion between Kapton film and copper metal by silane-coupling reactions"Journal of Applied Polymer Science. 73. 1645-1654 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] N.Inagaki, S.Tasaka, and Y. W .Park: "Effects of the surface modification by remote hydrogen plasma on adhesion in the electroless copper/tetrafluoroethylene-hexafluoropropylene copolymer (FEP) system" Journal of Adhesion Science and Technology. 12. 1105-1119 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] N.Inagaki, S.Tasaka, and T.Inoue: "Surface modification of aromatic polyamide film by plasma graft copolymerization of glycidylmethacrylate for epoxy and adhesion" Journal of Applied Polymer Science. 69. 1179-1185 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] N.Inagaki, S.Tasaka, T.Horiuchi, and R.Suyama: "Surface modification of poly(arylether ether ketone)film by remote oxygen plasma" Journal of Applied Polymer Science. 68. 271-279 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 稲垣訓宏: "リモートプラズマ処理によるポリマーの表面改質" 日本接着学会誌. 34. 73-77 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] N.Inagaki, S.Tasaka, H.Kawai, Y.Yamada: "Surface Modification of Aromatic Polyamide Film by Remote Oxygen Plasma" Journal of Applied Polymer Science. 64. 831-840 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] N.Inagaki, S.Tasaka, M.Makino: "Plasma Polymer Deposition from Mixture of Tetramethoxysilane and Oxygen on PET Films and thier Oxgen Barrier Properties" Journal of Applied Polymer Science. 64. 1031-1039 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] N.Inagaki, S.Tasaka, Y.Goto: "Surface Modification of Poly (tetrafluoroethylene) Film by Plasma Graft Polymerization of Sodium Vunylsulfonate" Journal of Applied Polymer Science. 66. 77-84 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] N.Inagaki: "Surface Modification by Plasma Treatment" Jpn.Journal of Tribology. 41. 1215-1224 (1996)

    • Related Report
      1997 Annual Research Report
  • [Publications] 稲垣 訓宏: "プラズマ,エキシマレーザーを利用した高分子表面の改質" 表面科学. 18. 543-548 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 稲垣 訓宏: "リモートプラズマ処理によるポリマーの表面改質" 日本接着学会誌. 34. 73-77 (1998)

    • Related Report
      1997 Annual Research Report

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Published: 1997-04-01   Modified: 2016-04-21  

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