Development of STM operational in a plasma and its application to a control of plasma materials surface processing on an atomic scale
| Project/Area Number |
09555215
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 展開研究 |
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| Research Field |
Material processing/treatments
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| Research Institution | The University of Tokyo |
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Principal Investigator |
TERASHIMA Kazuo The University of Tokyo, Faculty of Engineering, Department of Metallurgy and Materials Science, Assoc.Prof., 大学院・工学系研究科, 助教授 (30176911)
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| Project Period (FY) |
1997 – 1998
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| Project Status |
Completed (Fiscal Year 1998)
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| Budget Amount *help |
¥9,600,000 (Direct Cost: ¥9,600,000)
Fiscal Year 1998: ¥2,900,000 (Direct Cost: ¥2,900,000)
Fiscal Year 1997: ¥6,700,000 (Direct Cost: ¥6,700,000)
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| Keywords | Plasma environment / STM (scanning tunneling microscope) / plasma-solid surface interface / etching / atomic image / plasma surface processing / 格子像 / プラズマ-個体界面 / プラズマ材料表面プロセシング |
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| Research Abstract |
In this project, we performed the first attempt at the development of a scanning tunneling microscope (STM) for use under a plasma environment. The apparatus consists of an STM system and a radio-frequency (rf) (430MHz) plasma generation system housed in a vacuum chamber with a rotary pump. A special amplifier with a resolution of 10 femtoamp. up to 1kV is employed for tunneling current measurements. To prevent noise current from the plasma, the Pt-Ir probe tip is coated with epoxy grease and insulated glass using the sol-gel method except around its apex of about 3 mum. Under the conventional glow-plasma condition, the noise current from the plasma was deduced to be less than 0.1 nA during plasma exposure for 1800 sec. Using this apparatus, the step structure on a nanometer scale and atomic image of highly oriented pyrolytic graphite (HOPG) were obtained under rf, low-pressure (0.3 Tbrr) air glow plasma. We also discussed the role of the STM tip for successful, realistic "in situ" observation.
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Report
(3 results)
Research Products
(17 results)
