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Development of Simultaneous Removal System for Trace Gaseous and Particulate Contaminants by UV/Photoelectron Method

Research Project

Project/Area Number 09555229
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field 化学工学一般
Research InstitutionKanazawa University

Principal Investigator

EMI Hitoshi  Kanazawa University, Faculty of Engineering, Professor, 工学部, 教授 (90025966)

Co-Investigator(Kenkyū-buntansha) ADACHI Motoaki  Osaka Prefectural University, Institute of Advanced Sciences, Assistant Professo, 先端科学研究所, 講師 (40100177)
SHIMADA Manabu  Hiroshima University, Faculty of Engineering, Associate Professor, 工学部, 助教授 (70178953)
OTANI Yoshio  Kanazawa University, Faculty of Engineering, Professor, 工学部, 教授 (10152175)
OKUYAMA Kikuo  Hiroshima University, Faculty of Engineering, Professor, 工学部, 教授 (00101197)
Project Period (FY) 1997 – 1998
Project Status Completed (Fiscal Year 1998)
Budget Amount *help
¥12,900,000 (Direct Cost: ¥12,900,000)
Fiscal Year 1998: ¥2,200,000 (Direct Cost: ¥2,200,000)
Fiscal Year 1997: ¥10,700,000 (Direct Cost: ¥10,700,000)
KeywordsUV / photoelectron method / Ion-induced nucleation / Simultaneous removal / Volatile organic compound (VOC) / Subatmospheric pressure / Photocatalysis / 減圧場 光触媒
Research Abstract

This research aims at developing a stocker built-in simultaneous removal system for organic gaseous and particulate contaminants by UV/photoelectron method under both normal and reduced pressures. In the first year, we conducted experiments on removal of gaseous and particulate matter under atmospheric pressure, and then obtained the result that the removal device has steadily high removal efficiency for them. In the second year, we modified the setup so that it can operate under subatmospheric pressure (until 20 torr) and performed experiments similar to the normal pressure conditions. As a result, it was shown that i) particle removal efficiency increased rapidly under 100 torr, ii) the numerical calculation of convective-diffusive equation for particles accounting for their charging efficiency can estimate their removal efficiency at each pressure, iii) the emission of UV/photoelectrons can suppress increase in contact angle of droplets on wafer set in the stocker, which is an index of its organic contamination, iv) the simultaneous usage of UV/photoelectron emitter and UV-irradiated titania can achieve extremely high efficiency for gaseous contaminants at both normal and reduced pressures.

Report

(3 results)
  • 1998 Annual Research Report   Final Research Report Summary
  • 1997 Annual Research Report
  • Research Products

    (21 results)

All Other

All Publications (21 results)

  • [Publications] K.Okuyama,M.Shimada,A.Okita,Y.Otani and S.J.Cho: "Performance Evaluation of Cluster-DMA with Integrated Electrometer and Its Application to Ion Mobility Measurements" J.Aerosol Research,Japan. Vol.13(2). 83-93 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Shimada,K.Okuyama,M.Adachi and T.Fujii: "Aerosol Particle Removal at Reduced Pressure by an Electrical Precipitator Using UV/Photelectron Method" Journal of Aerosol Science. Vol.29(Sl). S1237-S1238 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Shimada,K.Okuyama,Y.Inoue,M.Adachi and T.Fujii: "Removal of Aiborne Particles by a Device Using UV/Photoelectron Method under Reduced Pressure Conditions." Journal of Aerosol Science. Vol.30(3). 341-353 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.O.Kim,T.Ishida,M.Adachi,K.Okuyama,and J.H.Seinfeld: "Nanometer-Sized Particle Formation from NH_3/SO_2H_2O/Air Mixtures by Ionizing Irradiation" Aerosol Science and Technology. Vol.29(2). 111-125 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 足立元明,須藤収,高橋武士: "減圧場におけるナノサイズ粒子の帯電量測定" エアロゾル研究. Vol.13(2). 94-102 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 並木則和,大谷吉生,江見準,吉川文恵,大東信之: "ハニカム担持酸化チタン光触媒による室内有機ガス状汚染物質の除去-正イオン添加による触媒活性の向上-" 空気清浄. Val.36(4). 267-273 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] K.Okuyama, M.Shimada, A.Okita, Y.Otani and S.J.Cho: "Performance Evaluation of Cluster-DMA with Integrated Electrometer and Its Application to Ion Mobility Measurements" Journal of Aerosol Research, Japan. Vol.13(2). 83-93 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Shimada, K.Okuyama, M.Adachi and T.Fujii: "Aerosol Particle Removal at Reduced Pressure by an Electrical Precipitator Using UV/Photoelectron Method" Journal of Aerosol Science. Vol.29(S1). S1237-S1238 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Shimada, K.Okuyama, Y.inoue, M.Adachi and T.Fujii: "Removal of Airborne Particles by a Device Using UV/Photoelectron Method under Reduced Pressure Conditions" Journal of Aerosol Science. Vol.30(3). 341-353 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.O.Kim, T.Ishida, M.Adachi, K.Okuyama, and J.H.Seinfeld: "Nanometer-Sized Particle Formation from NH_3/SO_2/H_2O/Air Mixtures by Ionizing Irradiation" Aerosol Science and Technology. Vol.29(2). 111-125 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M Adachi, O.Suto, T.Takahashi: "Charge Measurement of Nanometer-Sized Particles at Low Pressure (in Japanese)" Journal of Aerosol Science. Vol.13(2). 94-102 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] N.Namiki, Y.Otani, H.Emi, F.Yoshikawa and N.Ohigashi: "Removal of Indoor Volatile Organic Contaminants by UV-Irradiated Titania-Coated Honeycombs-Improvement of Photocatalytic Reactivity with Airborne Cations (in Japanese)" Kukiseijo. Vol.36(4). 267-273 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] K.Okuyama.M.Shimada.A.Okita,Y.Otani and S.J.Cho: "Performance Evaluation of Cluster-DMA with Integrated Electrometer and Its Application to Ion Mobility Measurements" J.Aerosol Res.Jpn.Vo.13 No.2. 83-93 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] M.Shimada,K.Okuyama,M.Adachi and T.Fujii: "Aerosol Particle Removal at Reduced Pressure by an Electrical Precipitator Using UV/Photoelectron Method" J.Aerosol Sci.Vol.29 No.S1. 1237-1238 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] M.Shimada,K.Okuyama,Y.Inoue,M.Adachi and T.Fujii: "Removal of Airbome Particles by a Device Using UV/Photoelectron Method under Reduced Pressure Conditions." J.Aerosol Sci.Vol.30 No.3. 341-353 (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] T.O.Kim,T.Ishida,M.Adachi,K.Okuyama,and J.H.Seinfeld: "Nanometer-Sized Particle Formation from NH_3/SO_2/H_2O/Air Mixtures by Ionizing Irradiation." Aerosol Sci.Technol.Vol.29 No.2. 111-125 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 足立元明,須藤収,高橋武士: "減圧場におけるナノサイズ粒子の帯電量測定" エアロゾル研究. Vol.13 No.2. 94-102 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 並木則和,大谷吉生,江見準,吉川文恵,大東信之: "ハニカム担持酸化チタン光触媒による室内有機ガス状汚染物質の除去-正イオン添加による触媒活性の向上-" 空気清浄. Vol.36 No.4. 267-273 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] K.Okuyama, T.Fujimoto, T.Hayashi, and M.Adachi: "Gas-Phase Nucleation in the Tetraethylorthosilicate(TEOS)/O_3APCVD Process" AIChE Journal. Vol.43. 2688-2697

    • Related Report
      1997 Annual Research Report
  • [Publications] M.Adachi, T.Hayashi, T.Fujimoto and K.Okuyama: "Film Formation by a New CVD Process using Ionization of TEOS" Proceedings of the 14th International Conference on Chemical Vapor Deposition and EUROCVD-11 ECS Proceedings. Vol.97-25. 1160-1166 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] M.Adachi, T.Hayashi, T.Fujimoto and K. Okuyama: "A New CVD Film Formation Process using Ionization of TEOS" 1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings. 103-105 (1997)

    • Related Report
      1997 Annual Research Report

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Published: 1997-04-01   Modified: 2016-04-21  

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