Project/Area Number |
09558054
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Research Category |
Grant-in-Aid for Scientific Research (B)
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Allocation Type | Single-year Grants |
Section | 展開研究 |
Research Field |
プラズマ理工学
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Research Institution | University of Tsukuba |
Principal Investigator |
CHO Teruji Univ.Tsukuba, Institute of Physics, Professor, 物理学系, 教授 (80171958)
|
Co-Investigator(Kenkyū-buntansha) |
TANAKA Shigetoshi Kyoto University, Professor Emeritus, 名誉教授 (20025240)
KOHAGURA Junko Univ.Tsukuba, Plasma Research Centre/Insti.Physics, Research Associate, プラズマ研究センター・物理学系, 助手 (60302345)
SATO Kenji SII,Development of Semiconductor Processes, Researcher, 技術本部・開発課, 研究員
NAKASHIMA Yousuke Univ.Tsukuba, Plasma Research Centre/Insti.Physics, Assistant Prof., プラズマ研究センター・物理学系, 講師 (00188939)
KONDOH Mafumi (HIRATA Maf) Univ.Tsukuba, Plasma Research Centre/Insti.Physics, Assistant Prof., プラズマ研究センター・物理学系, 講師 (70222247)
坂本 宜照 日本学術振興会, 特別研究員
斎藤 豊 セイコー電子工業(株)技術本部, 開発課, 課長
|
Project Period (FY) |
1997 – 1998
|
Project Status |
Completed (Fiscal Year 1998)
|
Budget Amount *help |
¥7,900,000 (Direct Cost: ¥7,900,000)
Fiscal Year 1998: ¥2,300,000 (Direct Cost: ¥2,300,000)
Fiscal Year 1997: ¥5,600,000 (Direct Cost: ¥5,600,000)
|
Keywords | Neutral Particle Diagnostics / Electron Diagnostics / X-ray Diagnostics / Semiconductor Detectors / Electron Temperatere Diagnostics / Ion Temperature Diagnosdics / Wide Energy Range Detectors / Plasma Diagnostics |
Research Abstract |
Our newly proposed theory on the x-ray-energy response of semiconductor detectors is applied for the design and fabrication of new semiconductor plasma detectors for simultaneously measurable x rays, electrons, neutral particles, and ions with their species resolution. This new detector is applied as a new collector using the application and combination with our developed differential-spectrum ion-energy analyzer with electrostatic slanted grids [see Rev. Sci. Instrum. 66 (1995) 4928]. This special detection structure is applied for distinguishing ions with positive charges and electrons with negative charges curved under the detector fields, as well as x rays and neutral particles with straight trajectories in the detector fields because of no charges. In addition, a semiconductor detector collector is used for distinguishing the x rays and neutral particles on the basis of the difference of the mean free path in the semiconductor detector (i.e., shorter struggling distance for neutral particles and longer penetration length for x rays. These differences are newly utilized by this research program for constructing new formula and computer simulation. These results for the new calculation method are based on the nuclear and electron interaction with the incident particles ; these details will be published in journals. Several papers have already been published in journals ; the references are listed in this report sheet (see the rear side of this short summary report). As shown in the papers, these methods have already been verified in plasma experiments and routinely applied in actual plasma diagnostics.
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