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Chracterization of strain and composition in InGaN films by photoreflection and Raman scattering

Research Project

Project/Area Number 09650014
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionOsaka University

Principal Investigator

HARIMA Hiroshi  Department of Applied Physics, Osaka University Associate Professor, 工学研究科, 助教授 (00107351)

Co-Investigator(Kenkyū-buntansha) KISODA Kenji  Department of Applied Physics, Research Associate, 工学研究科, 助手 (90243188)
Project Period (FY) 1997 – 1998
Project Status Completed (Fiscal Year 1998)
Budget Amount *help
¥3,100,000 (Direct Cost: ¥3,100,000)
Fiscal Year 1998: ¥200,000 (Direct Cost: ¥200,000)
Fiscal Year 1997: ¥2,900,000 (Direct Cost: ¥2,900,000)
KeywordsGaN / InGaN / AlGaN / Raman scattering / photo-reflection / mixed crystal / strain / phonon
Research Abstract

1. Strain and electric transport parameters in GaN :
We have evaluated in-plane strains in GaN films from a measurement of the E2-phonon mode frequency by Raman scattering.We have also evaluated carrier concentration and mobility in n-type GaN films together with the spatial distribution by Raman scattering.Carrier concentration in p-type materials can be obtained from the intensity of inter-valence band transition of holes observed in Raman spectra.
2. Spatial distribution of hexagona1- to cubic-components in GaN films :
We have evaluated the ration and their spatial distribution by focusing on a characteristic feature in GaN Raman spectra.
3. Composition in AIGaN and InGaN films :
We have observed Raman spectra of cubic-AIGaN films for the first time for the whole range of Al composition (0-100%).We have observed various dependences of phonon frequencies on the Al content, and showed a good agreement with a theoretical model.We have also observed for the first time Raman spectra of hexagonal-InGaN films without thick GaN buffer layers in the growth process.We have observed a linear relation of the E2-phonon mode frequency on the In content of 0-7%.These results will be usable for composition characterizations.We have evaluated the bandgap energy by absorption and photoreflection measurements.The In contents were evaluated from the results and compared with Raman data on phonon frequencies.
4. UV-excitation system for Raman microprobing and photo-reflection measurements :
We have developed a UV-excitation system for Raman microprobing and photo-reflection measurements.We have tested the system performance by measuring Raman spectra of Si and GaN in the resonant Raman condition.

Report

(3 results)
  • 1998 Annual Research Report   Final Research Report Summary
  • 1997 Annual Research Report
  • Research Products

    (29 results)

All Other

All Publications (29 results)

  • [Publications] H.Harima et al.: "“Electronic properties in p-type GaN studied by Raman scattering"," Appl.Phys.Lett.73. 2000-2002. (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Harima et al.: "“Raman Scattering Characterizatいon of Group III-Nitride Epitaxial Layers including Cubic Phase"" J.Cryst.Growth. 189/190. 435-437. (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Harima et al.: "“Electronic Properties in Doped GaN Studied by Raman Scattering"" J.Cryst.Growth. 189/190. 672-674. (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Harima et al.: "“Temperature measurement in light emitting diode of SiC by Raman scattering"" J.Electr.Mat.28(in press). (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Koizumi et al.: "“Growth and characterization of cubic AlGaN and AlN epilayers by RF-plasma assisted MBE"" J.Cryst.Growth. (in press). (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Harima et al.: "“Raman studies on phonon modes in cubic AlGaN alloy"" Appl.Phys.Lett.74. 191-193 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 播磨弘: "「実用分光法シルーズII,ラマン分光法,第4章ラマンイメージング」" IPC出版, 30 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Harima: "Optoelectronic Properties of Semiconductors and Superlattices Edited by O.Manasreh" Gordon & Breach Publishing, 60. (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Harima et al.: ""Electronic properties in p-type GaN studied by Raman scattering"" Appl.Phys.Lett.73. 2000 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Harima et al.: ""Raman Scattering Characterization of Group III-Nitride Epitaxial Layars including Cubic Phase"" J.Cryst.Growth. 189/190. 435 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Harima et al.: ""Electronic Properties in Doped GaN Studied by Raman Scattering"" J.Cryst.Growth. 189/190. 672 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Harima et al.: ""Temperature measurement in light emitting diode of SiC by Raman scattering"" J.Electr.Mat.28(in press). (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Koizumi et al.: ""Growth and characterization of cubic AlGaN and AlN epilayrs by RF-plasma assisted MBE"" J.Cryst.Growth. (in press). (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Harima et al.: ""Raman studies on phonon modes in cubic AlGaN alloy"" Appl.Phys.Lett.74. 191 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Harima et al.: ""Characterization of GaN and Related Alloys by Raman Scattering"" Gordon & Breach Publishing, Optoelectronic Properties of Semiconductors and Superlattices, Edited by O.Manasreh. (in press). 60 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H. Harima et al.: "“Electronic properties in p-type GaN studied by Raman scattering"," Appl.Phys.Lett.73. 2000-2002 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] H. Harima et al.: "“Raman Scattering Characterization of Group III-Nitride Epitaxial Layers including Cubic Phase"" J.Cryst.Growth. 189/190. 435-437 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] H. Harima et al.: "“Electronic properties in Doped GaN Studied by Raman Scattering"" J.Cryst.Growth. 189/190. 672-674 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] H. Harima et al.: "“Temperature measurement in light emitting diode of SiC by Raman scattering"" J.Electr.Mat.28in press. (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] T.Koizumi et al.: "“Growth and characterization of cubic AlGaN and AIN epilayers by RF-plasma assisted MBE"" J.Cryst.Growth. in press. (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] H. Harima et al.: "“Raman studies on phonon modes in cubic AlGaN alloy"" Appl.Phys.Lett.74. 191-193 (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] 播磨弘: "「実用分光法シリーズII、ラマン分光法、第4章ラマンイメージング」" IPC出版, 30 (1988)

    • Related Report
      1998 Annual Research Report
  • [Publications] H.Harima: "Optoelectronic Properties of Semiconductors and Superlattices Edited by O Manasreh" Gordon & Breach Publishing, 60 (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] 播磨弘: "Raman Microprobe Measurement of Under-Damped LO-Phonon Plasmon Coupled Mode in n-type GaN" Proc.ICSC and III-Nitrides '97. (in press). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] 播磨弘: "Electronic Properties of Dopend SiC at Elevated Temperatures Studied by Raman Scattering" Proc.ICSC and III-Nitrides '97. (in press). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] 播磨弘: "Electronic Properties in Doped GaN Studied by Raman Scattering" J.Cryst.Growth. (in press). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] 播磨弘: "Raman Scattering Characterization of Group III-Nitride Epitaxial Layers including Cubic Phase" J.Cryst.Growth. (in press). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] 播磨弘: "Characterization of 3C-SiC epitaxial layers on TiC (111) by Raman scattering" Jpn.J.Appl.Phys.36. 5525-5531 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 中島信一: "Raman Investigation of SiC Polytypes" Phys.Stat.Sol. (a). 162. 39-64 (1997)

    • Related Report
      1997 Annual Research Report

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Published: 1997-04-01   Modified: 2016-04-21  

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