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In-situ observation of the crystal growth process by X-ray scattering at small glancing angle incidence

Research Project

Project/Area Number 09650016
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionKobe University

Principal Investigator

FUJII Yoshikazu  Kobe University, Faculty of Engineering, Associate Professor, 工学部, 助教授 (80238534)

Co-Investigator(Kenkyū-buntansha) YOSHIDA Kentaroh  Kobe University, Faculty of Engineering, Professor, 工学部, 教授 (60031085)
Project Period (FY) 1997 – 1998
Project Status Completed (Fiscal Year 1998)
Budget Amount *help
¥3,000,000 (Direct Cost: ¥3,000,000)
Fiscal Year 1998: ¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 1997: ¥2,300,000 (Direct Cost: ¥2,300,000)
KeywordsX-ray scattering at small glancing angle / crystal growth incidence / X-ray CCD camera / surface roughness / in-situ observation / ultrahigh vacuum / pure iron surface under high temperature / PbSe (111) crystal surface / 表面 / X線 / 結晶 / 表面ステップ
Research Abstract

We have constructed a compact ultrahigh-vacuum (UHV) x-ray diffractometer for surface glancing x-ray scattering. By this instrument, in situ observation of the epitaxial growth of PbSe(III) surfaces performed, and the oscillation of the specularly reflected x-ray intensity showing the layer-by-layer growth of the surface was successfully observed even using a rotating-anode source. But the amplitudes of the oscillation were very small to utilize the monitor of crystal growth. Then we constructed new measurement system of two dimensional angular distribution of scattered x-ray intensity. By this system we tried to perform in situ observation of the two dimensional angular distribution of scattered x-ray intensity from the surfaces during crystal growth.
The experiment was estimation of the growing surface of PbSe(III) by means of glancing angle x-ray scattering method. At the first we success to perform in situ observation of layer-by-layer growth of PbSe(III) by the detection of the specularly reflected x-ray from the surface. Next we observed the two dimensional angular distribution of scattered x-ray intensity from the surfaces during crystal growth, and we estimated the intensity ratios of the specularly reflected x-rays and the scattered x-rays at another angle. We could not find obvious oscillation in the ratios.
The other experimants were performed on some industrial materials surfaces by this apparatus ; (1) mechanically polished pure iron polycrystal surfaces (ferrite, 3 nines purity) before and after the baking at 500。C for 20 hr in a vacuum of 1 0^<-8> Torr, which shows a sudden broadening of the scattered profiles due to surface roughening, and (2) High Speed Steel (SKH steel) surfaces which are ion-plated by TiN at different stages in their manufacturing processes.

Report

(3 results)
  • 1998 Annual Research Report   Final Research Report Summary
  • 1997 Annual Research Report
  • Research Products

    (32 results)

All Other

All Publications (32 results)

  • [Publications] Y.Fujii: "In situ Observation of Layer-by-layer Growth by Surface X-ray Scattering using a Rotating-anode Source" Surface Science. 405. L.549-L.553 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Y.Fujii: "Small Angle Glancing X-ray Scattering for Surface Characterization of Ion-Implanted Industrial Materials" Proc.of 12th Int'l. Conf.on Ion Implantation Technology,IIT/98. in press. (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 藤居義和: "X線微小角散乱による多結晶金属表面粗さの新しい評価法" 神戸大学ベンチャー・ビジネス・ラボラトリー年報. 3in press. (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] K.Nakajima: "Oscillation of the intensity of scattered energetic ions from growing surface" Advances in the Understanding of Crystal Growth Mechanisms. 309-321 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] K.Yoshida: "Formation of New Bi-Mn Alloy Phases in Vacuum Deposited Films and Their Structure Determinations by Electron Microscopy" “The ELECTRON"Proc.of the International Centennial Symposium on the Eelectron. 645-651 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Yoshikazu Fujii: "A compact UHV X-ray diffractometer for studying surfaces and interfaces" Journal of Synchrotron Radiation. 5. 887-889 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Mannami: "Energy loss of scattered ions at glancing-angle incidence on the crystal surface" Radiat.Phys.Chem.49. 623-629 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Yoshikazu Fujii: "A compact UHV X-ray diffractometer for surface glacing scatterings using a rotating-anode source" Review of Scientific Instruments. 68. 1975-1979 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Y.Fujii: "Structural Investigation of Long-Period Tetragonal Bi-Mn Alloy Phase" Proceedings of the 6th International Conference on Quasicrystals. 227-230 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 藤居義和: "超高真空表面X線回折装置と結晶表面の新しい評価法" 神戸大学ベンチャー・ビジネス・ラボラトリー年報. 2. 68-73 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Y.Fujii, T.Nakamura, M.Kai and Kentaroh Yoshida: "In situ Observation of Layer-by-layer Growth by Surface X-ray Scattering using a Rotating-anode Source" Surface Science Letter. Vol.405. 549-553 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Y.Fujii, T.Kashihara, K.Yokoyama, S.Nakagawa, J.Nagaya, T.Nakayama and K.Yoshida: "Small Angle Glancing X-ray Scattering for Surface Characterization of Ion-Implanted Industrial Materials" Proc.of 12th Int'l.Conf.on Ion Implantation Technology. IIT/98, (in press). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Y.Fujii and K.Yoshida: "New estimation methods of polycrystalline metal surface roughness by small angle x-ray scattering" Annual Report of Venture Business Laboratory, Kobe University. Vol.3, (in press). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] K.Yoshida and Y.Fujii: "Formation of New Bi-Mn Alloy Phases in Vacuum Deposited Films and Their Structure Determinations by Electron Microscopy" "The ELECTRON" Proceedings of the International Centennial Symposium on the Electron. 645-651 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Yoshikazu Fujii, Takeshi Nakamura, Mutsumi Kai and Kentaroh Yoshida: "A compact UHV X-ray diffractometer for studying surfaces and interfaces" Journal of Synchrotron Radiation. Vol.5. 887-889 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Y.Fujii, K.Amino and K.Yoshida: "Structural Investigation of Long-Period Tetragonal Bi-Mn Alloy Phase" Proceedings of the 6th International Conference on Quasicrystals. 227-230 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Mannami, K.Narumi, F.Kato, Y.Fujii and K.Kimura: "Energy loss of scattered ions at glancing-angle incidence on the crystal surface" Radiat.Phys.Chem.Vol.49. 623-629 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Yoshikazu Fujii, Kenji Yoshida, Takeshi Nakamura and Kentaroh Yoshida: "A compact UHV X-ray diffractometer for surface glancing scatterings using a rotating-anode source" Review of Scientific Instruments. Vol.68. 1975-1979 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Y.Fujii, K.Amino and K.Yoshida: "A compact UHV X-ray diffractometer for surface glancing scattering and new estimation methods of crystal surfaces" Annual Report of Venture Business Laboratory Kobe University. Vol.2. 68-73 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] K.Nakajima, Y.Fujii, K.Narumi, K.Kimura and M.Mannami: "Oscillation of the intensity of scattered energetic ions from growing surface" Advances in the Understanding of Crystal Growth Mechanisms. 309-321 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] K.Yoshida: "Formation of New Bi-Mn Alloy Phases in Vacuum Deposited Films and Their Structure Determinations by Electron Microscopy" "The ELECTRON"Proc.of the International Centennial Symposium on the Eelectron. 645-651 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Yoshikazu Fujii: "A compact UHV X-ray diffractometer for studying surfaces and interfaces" Journal of Synchrotron Radiation. 5. 887-889 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Y.Fujii: "In situ Observation of Layer-by-layer Growth by Surface X-ray Scattering using a Rotating-anobe Source" Surface Science. 405. L.549-L.553 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Y.Fujii: "Small Angle Glancing X-ray Scattering for SurfaceCharacterization of Ion-Implanted Industrial Materials" Proc.of 12th Int'1.Conf.on Ion Implantation Technology,IIT/98. (in press). (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 藤居義和: "X線微小角散乱による多結晶金属表面粗さの新しい評価法" 神戸大学ベンチャー・ビジネス・ラボラトリー年報. 3(in press). (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Y.Fujii: "In situ Observation of Layer-by-layer Growth by Surface X-ray Scattering using a Rotating-anode Source" Surface Sciense Letter. (in press) (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] Yoshikazu Fujii: "A compact UHV X-ray diffractometer for studying surfaces and interfaces" Journal of Synchrotron Radiation. 5. (in press) (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] M.Mannami: "Energy loss of scattered ions at glancing-angle incidence on the crystal surface" Radiat.phys.Chem.49. 623-629 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Yoshikazu Fujii: "A compact UHV X-ray diffractometer for surface glancing scatterings using a rotating-anode source" Review of Scientific Instruments. 68. 1975-1979 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Y.Fujii: "Structural Investigation of Long-Period Tetragonal Bi-Mn Alloy Phase" Proceedings of the 6th International Conferense on Quasicrystals. 26-30 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 藤居義和: "超高真空表面X線回析装置と結晶表面の新しい評価法" 神戸大学ベンチャー・ビジネス・ラボラトリ-年報. 2. 68-73 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] K.Makajima: "Advances in the Understanding of Crystal Growth Mechanisms" Oscillation of the intensity of scattered energetic ions from growing surfase, 309-321 (1997)

    • Related Report
      1997 Annual Research Report

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Published: 1997-04-01   Modified: 2016-04-21  

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