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Fundamental Research on Observation and Control of Hydrogen Related Reaction in Semiconductor Surfaces

Research Project

Project/Area Number 09650031
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 表面界面物性
Research InstitutionKOBE UNIVERSITY

Principal Investigator

HONGO Shozo  Kobe University Faculty of Engineering Associate Professor, 工学部, 助教授 (00029232)

Co-Investigator(Kenkyū-buntansha) URANO Toshio  Kobe University Faculty of Engineering Associate Professor, 工学部, 助教授 (40107983)
Project Period (FY) 1997 – 1998
Project Status Completed (Fiscal Year 1998)
Budget Amount *help
¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 1998: ¥700,000 (Direct Cost: ¥700,000)
KeywordsMDS / TDS / TPD / Thermal Desorption Spectroscopy / Silicon / hydrogen / Alkaline Metal / Barium
Research Abstract

The coadsorption structure and electronic state of Cs and H on Si(100)2x1 were investigated by means of MDS and TDS.The both systems of Cs/H/Si and H/Cs/Si have the same TDS profiles, which indicates that Si dangling bonds are partly terminated with H atoms in both systems and CsH formed at the Cs coverages above about 0.4 ML is dissociated into H and Cs, resulting in H_2 desorption at about 20。C.On the other hand, MDS spectra for the H / Cs / Si system differs from those for Cs / H / Si one, i.e., Cs-H bonds can be clearly seen in case of the H / Cs / Si systems, while not in case of the Cs / H / Si systems. The difference for MDS spectra between both systems can be explained as follows : in case of the Cs / H / Si systems, all hydrogen atoms including Cs-H bonds are located between Cs layer and Si substrate, while in case of the H / Cs / Si systems, some of the hydrogen atoms forming Cs-H bonds are on the outermost surface.
The mechanism of hydrogen chemisorption on Ba precovered Si(100) surface was investigated by means of MDS, TDS and work function measurement. For 1ML Ba/Si(100), incident hydrogen atoms adsorb on top of Ba atoms from the initial stage of hydrogen exposure. On the other hand, for 4ML Ba/Si(100), hydrogen atoms diffuse into the Ba overlayers in the early stage of hydrogen exposure. Finally, all Ba atoms for both systems turn into BaH_2. The bond of Ba-H formed on 4ML Ba/Si(100) is stronger than that formed on 1ML Ba/Si(100).

Report

(3 results)
  • 1998 Annual Research Report   Final Research Report Summary
  • 1997 Annual Research Report
  • Research Products

    (25 results)

All Other

All Publications (25 results)

  • [Publications] S.Hongo: "Coadsorption of lithium and hydrogen on Si(100)2×1 surfaces studied by metastable de-excitation spectros copy and thermal desorption spectroscopy" Surface science. 402-404. 192-196 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] K.Ojima: "Low temperature decomposition mechanism of BaH_2 formed on Si(100)surfaces" Surface science. 402-404. 150-154 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Y.Takeda: "Adsorption Structure and Silicile formation of Ba on Si(100)surfaces" Surface science. 402-404. 192-196 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Shimizu: "Study of the electronic and adsorption structure of Cs and H coadsorption on Si(100)2×1" Applied surface sciene. 130-132. 271-275 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Y.Takeda: "UPS Study of electronic states of Ba on Si(100)surfaces" Journal of electron spectroscopy and related phemumena. 88-91. 625-629 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Hongo: "Multilayer adsorption or Li on Si(100)2×1 surfaces studied with melastable de-excitation spectroscopy and thermal desorption spectroscopy" Surface science. (印刷中).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Hongo: "Coadsorption of lithium and hydrogen on Si (100) 2*1 surfaces studied by metastable de-excitaion spectroscopy and thermal desorption spectroscopy" Surf.Sci.402-404. 192-196 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] K.Ojima: "Low temperature decomposition mechanism of BaH_2 formed on Si (100) surfaces" Surf.Sci.402-404. 150-154 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Y.Takeda: "Adsorption Structure and silicide formation of Ba on Si (100) surfaces" Surf.Sci.402-404. 692-196 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Shimizu: "Study of the electronic and adsorption structure of Cs and H coadsorption on Si (100) 2*1" Appl.Surf.Sci.130-132. 271-275 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Y.Takeda: "UPS Study of Electronic States of Ba on Si (100) Surface" Journal of Electron Spectroscopy and Related Phenomena. 88-91. 625-629 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Hongo: "Multilayer Adsorption of Li on Si (100) 2x1 Surfaces Studied with metastable De-excitaion Spectroscopy and Thermal Desorption Spectroscopy" Surf.Sci.(in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Kazuto Mochizuki: "Molecular Arrangement of Organic Crystal N,N'-dimethylperylene-3,4,9,10-bis (dicarboximide) Studied with Metastable De-excitation Spectroscopy and Atomi Force Microscope" Thin Film. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Hongo: "Coadsorption of lithium and hydrogen on Si(100)2Xl Surfaces studied by metastable to-exatation spectroscopy and thermal desorption spectroscopy" surface science. 402-404. 192-196 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] K.Ojima: "Low temperature deconposition mechanism of BaH_2 formed on Si(100)surfaces" surface science. 402-404. 150-154 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Y.Takeda: "A deciption structure and silicids formation of Ba on Si(100)surfaces" surface science. 402-404. 192-196 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] M.Shimizu: "Study of the electronic and adoerption structure of Cs and H coadsorption on Si(100)2Xl" Applied Surfao science. 130-132. 271-275 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Y.Takeda: "UPS study of electronic states of Ba on Si(100)surfaces" Journal of electron spectroscopy and related phomomena. 88-91. 625-629 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] S.Hongo: "Multi layer adsorption on Li on Si(100)2Xl surfaces studied with metastable do excitation spectroscopy and thermal dosorption spectroscopy" surface science. (印刷中).

    • Related Report
      1998 Annual Research Report
  • [Publications] S.Hongo: "Thermal Desorption Study of Potassium from K/Deuternted Si(100)2×1" Applied Surface Science. 113/114. 551-555 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] S.Hengo: "A Study of the Surfacc Electrenic Propertios of Na/D/Si(100)by Metastable Deexcitation Spectroscopy" Applied Surface Science. 112. 92-97 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] K.Ojima: "Chemisorption of Ba on Deuterium-termvnated Si(100)Sarfacc" Applied Surface Science. 117/118. 82-87 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] S.Hongo: "Coadsorption of lithium and bydrogen on Si(100)2×1 surfacco Stadicl by motastable de-excitation Spectroscopy and thermal deeorption spectrosopy" Surface Science. (印刷中). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] K.Ojima: "Lew tornperature decomposition mechanism of BaH_2 formcd on St(100)surfaces" Surface Science. (印刷中). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] H.Shimizu: "Study of the electronic and adsorption structuse of Cs and H coadsorption on Si(100)2×1" Applied Surface Science. (印刷中). (1998)

    • Related Report
      1997 Annual Research Report

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Published: 1998-04-01   Modified: 2016-04-21  

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