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Transparent Conductive Multicomponent Oxide Thin Films with High Stability for High Temperature Use

Research Project

Project/Area Number 09650035
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 表面界面物性
Research InstitutionKanazawa Institute of Technology

Principal Investigator

MINAMI Tadatsugu  Kanazawa Institute of Technology, Engineering, Professor, 工学部, 教授 (70113032)

Co-Investigator(Kenkyū-buntansha) MIYATA Toshihiro  Kanazawa Institute of Technology, Engineering, Lecturer, 工学部, 講師 (30257448)
TAKATA Shinzo  Kanazawa Institute of Technology, Engineering, Professor, 工学部, 教授 (70064467)
Project Period (FY) 1997 – 1998
Project Status Completed (Fiscal Year 1998)
Budget Amount *help
¥3,400,000 (Direct Cost: ¥3,400,000)
Fiscal Year 1998: ¥1,100,000 (Direct Cost: ¥1,100,000)
Fiscal Year 1997: ¥2,300,000 (Direct Cost: ¥2,300,000)
KeywordsThin film / Sputtering / Transparent conductive film / Multicomponent oxide / Zinc oxide / Indium oxide / Tin oxide / ITO
Research Abstract

A number of transparent conductive oxide (TCO) films consisting of binary compounds such as ZnO, In_20_3 and SnO_2 ternary compounds such as Zn_2In_2O_5, In_4Sn_30_<12>, GaIn0_3, ZnSn0_3, and MgIn_2O_4 and multicomponent oxides composed of combinations of binary compounds or ternary compounds were tested for stability in various atmospheres at high temperatures. The TCO films were prepared by magnetron sputtering on quartz substrates at room temperature or 350゚C and tested in air, argon gas or a vacuum at temperatures up to 1000゚C.Concerning the stability of their electrical properties, SnO_2, SnO_2 : Sb and In_4Sn_30_<12> films prepared at 350゚C were stable in air at temperatures up to 900゚C.TCO films such as In_20_3, ITO, SnO_2, SnO_2 : Sb and In_4Sn_30_<12> were stable in an Ar gas atmosphere at temperatures up to 900゚C.The stability of multicomponent oxide films was controlled by changing the composition of films. In partictular, the stability was improved as the Sn content in TCO films was increased, but it was decreased as the Zn, Mg and/or Ga contents were increased. The resistivity increase found in TCO films that contained Zn was attributed to grain boundary scattering resulting from oxygen adsorption. As a result, the chemical stability at high temperatures was mainly determined by the metal elements contained in the TCO film ; high stability was exhibited in TCO films rich in Sn.

Report

(3 results)
  • 1998 Annual Research Report   Final Research Report Summary
  • 1997 Annual Research Report
  • Research Products

    (13 results)

All Other

All Publications (13 results)

  • [Publications] T.Minami, K.Shimokawa and T.Miyata: "P-type transparent conducting In_2O_3-Ag_2O thin films prepared by rf magnetron sputtering" J.Vac.Sci.Technol.A16, 3. 1218-1221 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Minami, T.Miyata and T.Yamamoto: "Work function of transparent conducting multicomponent oxide thin films prepared by magnetron sputtering." Surface and Coatings Techol.108-109. 583-587 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Minami, T.Miyata and T.Yamamoto: "Stability of transparent conducting oxide films for use at high temperatures" J.Vac.Sci.Technol.A17(in press). (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Minami: "Transparent conducting multicomponent oxide thin films prepared by magnetron sputtering" J.Vac.Sci.Technol.A17(in press). (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Minami, K.Shimokawa and T.Miyata: "P-type transparent conducting In_2O_3-Ag_2O thin films prepared by rf magnetron sputtering" J.Vac.Sci.Technol.A16. 1218-1221 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Minami, T.Miyata and T.Yamamoto: "Work function of transparent conducting multicomponent oxide thin films prepared by magnetron sputtering" Surface and Coatings Techol.108-109. 583-587 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Minami: "Transparent conducting multicomponent oxide thin films prepared by magnetron sputtering" J.Vac.Sci.Technol.A17(in press). (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Minami, T.Miyata and T.Yamamoto: "Stability of transparent conducting oxide films for use at high temperatures" J.Vac.Sci.Technol.A17(in press). (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Minami,K.Shimokawa and T.Miyata: "P-type transparent conducting In_2O_3-Ag_2O thin films prepared by rf magnetron sputtering" J.Vac.Sci.Technol.1218-1221 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] T.Minami,T.Miyata and T.Yamamoto: "Work function of transparent conducting multicomponent oxide thin films prepared by magnetron sputtering" Surface and Coatings Techol.583-587 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] T.Minami,T.Miyata and T.Yamamoto: "Stability of transparent conducting oxide films for use at high temperatures" J.Vac.Sci.Technol.(in press). (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] T.Minami: "Transparent conducting multicomponent oxide thin films prepared by magnetron sputtering" J.Vac.Sci.Technol.(in press). (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] T.Minami, K.Shimokawa, T.Miyata: "P-type transparent conducting In_2O_3-Ag_2O thin films prepared by rf magnetron sputtering" J.Vac.Sci.Technol.A. 16(3)(in press). (1998)

    • Related Report
      1997 Annual Research Report

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Published: 1997-04-01   Modified: 2016-04-21  

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