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Study on GaN-based blue vertical cavity surface emitting laser on Si

Research Project

Project/Area Number 09650049
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied optics/Quantum optical engineering
Research InstitutionNagoya Institute of Technology

Principal Investigator

EGAWA Takashi  Nagoya Institute of Technology, Research Center for Micro-Structure Devices, Professor, 極微構造デバイス研究センター, 教授 (00232934)

Co-Investigator(Kenkyū-buntansha) JIMBO Takashi  Nagoya Institute of Technology, Graduates Schoolof Engineering, Professor, 都市循環システム工学専攻, 教授 (80093087)
UMENO Masayoshi  Nagoya Institute of Technology, Department of Electrical and Computer engineering, Professor, 電気情報工学科, 教授 (90023077)
Project Period (FY) 1997 – 1999
Project Status Completed (Fiscal Year 1999)
Budget Amount *help
¥3,400,000 (Direct Cost: ¥3,400,000)
Fiscal Year 1999: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 1998: ¥800,000 (Direct Cost: ¥800,000)
Fiscal Year 1997: ¥1,700,000 (Direct Cost: ¥1,700,000)
KeywordsVertical cavity surface emitting laser / distributed Bragg reflector / MOCVD / an / Multi quantum well / LED / Si / Cavity / 歪超格子 / クラック / 反射率 / AlGaN / InGaNダブルヘテロ構造 / 自由励起子 / 束縛励起子 / 面発光レーザー / n型窒化ガリウム / P型窒化ガリウム
Research Abstract

GaN, AlN and their alloys have direct transition type band gap structure and have attracted much attention for optical devices in the blue-ultraviolet region. GaN-based edge emitting lasers have been extensively studies and have achieved room temperature continuous wave operation. Recently, GaN-based vertical cavity surface emitting lasers (VCSELs) with a distributed Bragg reflector (DBR) have attracted much interest for various optical applications due to the fabrication of a smooth mirror without a cleavage technique. The DBR is also effective in improving the output power of LED. Thus, the DBR plays an important rule to fabricate high performance optical devices such as LED and VCSEL. In this study, the use of the GaN/AlィイD20.27ィエD2GィイD20.73ィエD2 DBR as a bottom mirror has improved the characteristics of InGaN MQW LED sapphire. Moreover, the reflectivity as high as 98% has been obtained by the use of the strained layer superlattice (SLS) beneath the DBR structure. The InGaN MQW LED grown on the 15 pairs of DBR with a reflectivity of 75% was fabricated for the first time to the best of our knowledge. The output power of 120μW at 435 nm was about 1.5 times as large as that of the conventional LED. The DBR is very promising for the fabrication of high performance GaN-based LED and VCSEL.

Report

(4 results)
  • 1999 Annual Research Report   Final Research Report Summary
  • 1998 Annual Research Report
  • 1997 Annual Research Report
  • Research Products

    (24 results)

All Other

All Publications (24 results)

  • [Publications] H. Ishikawa: "GaN on Si Substrate with AlGaN/AlN Intermediate Layer"Jpn. J. Appl. Phys.. 38,2. L492-L494 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] G. Y. Zhao: "Optical Absorption and Photoluminescence Studies of n-type GaN"Jpn. J. Appl. Phys.. 38,9A/B. L993-L995 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] T. Egawa: "Characteristics of a GaN Metal Semiconductor Field-Effect Transistor Grown on a Sapphire Substrate by Metalorganic Chemical Vapor Deposition"Jpn. J. Appl. Phys.. 38,4B. 2630-2633 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] T. Egawa: "Recessed gate AlGaN/GaN modulation -doped field-effect transistors on Sapphire"Appl. Phys. Lett.. 76,1. 121-123 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H. Ishikawa et al.: "GaN on Si Substrate with AlGaN/AlN Intermediate Layer"Jpn. J. Appl. Phys.. Vol. 38 No. 2. L492-L494 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] G. Y. Zhao et al.: "Optical Absorption and Photoluminescence Studies of n-type GaN"Jpn. J. Appl. Phys.. Vol. 38, No. 9A/B. L993-L995 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] T. Egawa et al.: "Characteristics of a GaN Metal Semiconductor Fiel-Effect Transistor Grown on a Sapphire Substrate by Metalorganic Chemical Vapor Deposition"Jpn. J. Appl. Phys.. Vol. 38, No. 4B. 2630-2633 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Takashi Egawa et al.: "Recessed gate AlGaN/GaN modulation-doped field-effect transistors on sapphire"Appl. Phys. Lett.. Vol. 76, No 1. 121-123 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H.Ishikawa: "GaN on Si Substrate with AlGaN/AlN Intermediate Layer"Jpn.J.Appl.Phys.. 38,2. L492-L494 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] G.Y.Zhao: "Optical Absorption and Phetoluminescence Studies of n-type GaN"Jpn.J.Appl.Phys.. 38,9A/B. L993-L995 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] T.Egawa: "Characteristics of a GaN Metal Semiconductor Field-Effect Transistor Grown on a Sapphire Substrate by Metalorganic Chemical Vapor Deposition"Jpn.J.Appl.Phys.. 38,4B. 2630-2633 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] T.Egawa: "Recessed gate AlGaN/GaN modulation-doped field-effect transistors on sapphire"Appl,Phys,Lett.. 76,1. 121-123 (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] G.Y.Zhao et al.: "Electrical Transport Properties of GaSb Grown by Melecuter Beam Epitaxy" Jpn.J.Appl.Phys.37・4A. 1704-1708 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] G.Yu et al.: "Optical properties of Al_xGa_<1-x>N/GaN Natorortructers on sapphia by spectroscopic alliprometry" Appl.Phys.Lett.72・18. 2202-2204 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] G.Y.Zhao et al.: "Thermo-optical nonlinearity of GaN grown by metalorganic crenical-vaper deposition" Appl.Phys.Lett.73・1. 22-24 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] T.Egawa et al.: "Investigations of SiO_2/n-GaN and SiN_4/n-GaN insulator-semiconductor interfaces with low interface state density" Appl.Phys.Lett.73・6. 809-811 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] H.Ishikawa et al.: "Thermal stability of GaN on (II)Si substrate" J.Crystal Growth. 189/190. 178-182 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] K.Yamamoto et al.: "EBIC observation of n-GaN grown on sapphire substrates by MOCVD" J.Crystal Growth. 189/190. 575-579 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] H.Ishikawa et al.: "Pd/GaN Schottky diode with a barrier height of 1.5 eV and a reasonably effective Richardson coefficient" Jpn. J. Appl. Phys.37・1AB. L7-L9 (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] T.Egawa et al.: "Characteristics of InGaN/AlGaN light-emitting diodes on sapphire substrates" J. Appl. Phys.82・11. 5816-5821 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] G.Yu et al.: "Optical properties of wurtzite structure GaN on sapphire around fundamental absorption edge (0.78-4.77eV) by spectroscopic ellipsometry and the optical transmission method" Appl. Phys. Lett.70・24. 3209-3211 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] G.Yu et al.: "Polarized reflectance spectroscopy and spectroscopic ellipsometry determination of the optical anisotropy of gallium nitride on sapphire" Jpn. J. Appl. Phys.36・8A. L1029-L1031 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] G.Y.Zhao et al.: "Energy-gap narrowing in a current injected InGaN/AlGaN surface light emitting diode" Appl. Phys. Lett.71・17. 2424-2426 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] T.Ito et al.: "Fabrication of flat end mirror etched by focused ion beam for GaN-based blue-green laser diode" Jpn. J. Appl. Phys.36・12B. 7710-7711 (1997)

    • Related Report
      1997 Annual Research Report

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Published: 1997-04-01   Modified: 2016-04-21  

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