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Laser Opto-microengines using Opto-selective Absorber Thin Films

Research Project

Project/Area Number 09650202
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Fluid engineering
Research InstitutionTOKYO METROPOLITAN UNIVERSITY

Principal Investigator

OTA Masahiro  Tokyo Metropolitan University, Graduate School of Engineering, Department of Mechanical Engineering, Associate Professor, 工学研究科, 助教授 (80094259)

Project Period (FY) 1997 – 1998
Project Status Completed (Fiscal Year 1998)
Budget Amount *help
¥3,900,000 (Direct Cost: ¥3,900,000)
Fiscal Year 1998: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 1997: ¥3,000,000 (Direct Cost: ¥3,000,000)
KeywordsFluid Engineering / Molecular Gas Dynamics / Rarefied Gas Dynamics / Micro Fluid Mechanics / Micro Machine / Micro Actuator / Thermal Force / Radiometric Force / 分子気体力学 / 熱懐力 / ラジオメトリックカ / マイクロエンジン / 光学的選択吸収膜 / クヌッセン数
Research Abstract

In this research project a selective optical absorber-plate is proposed for the rotor of the opto microengine as the actuator of a micromachine. The thin films of the selective optical absorber-plate are fabricated by a vacuum deposition machine. The deposited plates are at first stage pyrex glasses and then at the second stage aluminum ones. The deposition on the pyrex glasses is for estimating the deposition rate and revealing the characteristics of the deposited films. Germanium and silicon oxide are selected as the materials for making selective optical absorber-thin films. Germanium is used as an absorbent for absorbing a visible beam from a laser generator. On the other hand, silicon oxide is selected as the materials for making a thin film with a small reflectance of the visible beam.
The selective optical absorber-plates for the rotor of the opto microengines are made of aluminum plates deposited a germanium thin film and a silicon oxide thin film. The germanium film is at first deposited on aluminum flat plates and then the silicon film is deposited on the germanium film. Therefore, the rotor surface has the characteristics of small reflectance in visible rays and large reflectance in infrared rays. The surface deposited the films is named as a forward surface and on the other hand the opposite surface is a backward surface, respectively. The backward surface is an aluminum one.

Report

(3 results)
  • 1998 Annual Research Report   Final Research Report Summary
  • 1997 Annual Research Report
  • Research Products

    (15 results)

All Other

All Publications (15 results)

  • [Publications] Masahiro OTA, et al.: "Laser Opto-microactuators Rotated by Molecular Dynamics Effects" Proc. of IEEE/LEOS Summor Topical Muting, Optical MEMS. 98H8369. 81-82 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 太田正廣,他: "気体環境がレーザ光マイクロエンジン特性に与える影響" 日本機械学会第75期通常総会講演論文集. 98-1. 263-264 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 太田正廣,他: "ナノスケール断熱構造を有するレーザ光マイクロエンジンの研究" 日本機械学会第76期全国大会講演論文集. 98-3. 941-942 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 太田正廣 他: "分子気体効果を用いたレーザ光マイクロエンジンの作動特性に関する研究" 日本機械学会論文集B編. (掲載可). (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Masahiro OTA, Tomohiko NAKAO, and Moriyoshi SAKAMOTO: "Manipulation for fine solid particles by gradient radiation pressure of a laser beam, Fluids Engineering Division Summer Meeting" ASME, FEDSM98-51. 1-5

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Masahiro OTA, Tomohiko NAKAO, and Moriyoshi SAKAMOTO: "Effects of Environment Gas Conditions on Laser Opto-microengine Performance" Applied Surface Science. (To be printted). (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Masahiro OTA, Tomohiko NAKAO, and Moriyoshi SAKAMOTO: "Characteristics of Laser Opto-Microengine Rotated By Effects of Molecular Gas Dynamics" Transaction of JSME. B, (To be Printted). (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Masahiro OTA, Tomohiko NAKAO, and Moriyoshi SAKAMOTO: "Laser Opto-microactuators Rotated by Molecular Gas Dynamics Effects" TuE3, Optical MEMS, IEEE/LEOS Summer Topical Meeting, Monterey, CA, USA.(1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Masahiro OTA, T.HAYASHI, and Moriyoshi SAKAMOTO: "Characteristics of Laser Microengine rotor with Low Reflectance Surface by Electrostatic Flocking" Proc.of The 21^<st> International Symposium on Rarefied Gas Dynamics Marseille, France. (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Masahiro OTA, Tomohiko NAKAO, and Moriyoshi SAKAMOTO: "Effects of Environment Gas Conditions on Performance of Laser Opto-microengines" Proc. of the 75^<th> General Meeting, JSME. No.98-1. (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Masahiro OTA, and Tomohiko NAKAO: "Measurements of Laser Trapping Force for Fine Solid Particles in Liquid" Proc. of Fluid Eng Conf., JSME. No.98-5. (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Masahiro OTA, et al.,: "Loser Opto-microactuaters Rotated by Molecular Dynamic Effects" Proc.of IEEE/LEOS Summer Topical Meeting, Optical MEMS,. 98H8369. 81-82 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 中尾智彦,太田正廣,他: "気体環境がレーザ光マイクロエンジン特性に与える影響" 日本機械学会第75期通常総会講演論文集. 98-1. 263-264 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 渡辺祐一,太田正廣,他: "ナノスケール断熱構造を有するレーザ光マイクロエンジンの研究" 日本機械学会第76期全国大会講演論文集. 98-3. 941-942 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] M.OTA,et al.,: "Characteristic of daser Microengine Rotor with〜" Proceeding of the 21th Rarefied Gas Dyranrus. (予定). (1998)

    • Related Report
      1997 Annual Research Report

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Published: 1997-04-01   Modified: 2016-04-21  

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