• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Processins Technology of High Density Interconnection Bumps

Research Project

Project/Area Number 09650773
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Material processing/treatments
Research InstitutionOkayama University

Principal Investigator

KONDO Kazuo  University of Okayama, Engineering, Associate Professor, 工学部, 助教授 (50250478)

Co-Investigator(Kenkyū-buntansha) FUKUI Keisuke  Himeji Institute of Technology, Engineering, Associate Professor, 工学部, 助教授 (50047635)
Project Period (FY) 1997 – 1998
Project Status Completed (Fiscal Year 1998)
Budget Amount *help
¥3,400,000 (Direct Cost: ¥3,400,000)
Fiscal Year 1998: ¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 1997: ¥2,700,000 (Direct Cost: ¥2,700,000)
KeywordsPackaging / Electronics / High density interconnection / Current distribution / Electrodeposition / Bumpping
Research Abstract

Packaging is the main technology to miniaturize the electronics devices such as personal computer and celler phone. Bump is indispensable interconnection method. The shape evolution mechanism of these bumps has been discussed based on the current distribution.
1 Bump shapes with photo resist angle The mass transfer is controlled by diffusion for the Peclet number of 1.31. The mass transfer is concentrated at the cathode corner. The negative photo resist angle, 0, prevents this mass transfer and decrease current density at the cathode corner. The mass transfer is controlled by convection for the Peclet number of 1407. The vortices form both at upper and lower edge of the cathode corners. The negative 0 enlarges the vortices and decreases the current at the cathode corners.
2 Bump shapes at high Peclet numbers The two vortices start to merge into one for Pe=73 11. A large single vortex form for P=44500. This large single vortex increases the current at the cathode center.
3 Bump shapes with high aspect ratio The current distribution at diffusion control is analyzed with high aspect ratio cavity. The current distribution becomes symmetric with a sharp peak for larger aspect ratio. The convection outside of the cavity does not stir their inside.
4 High aspect ratio bumps for CSP The lower edge of bump enlarges with increase of cathode placement angle for the cavity of 1.0 aspect ratio. A large vortex forms outside of the cavity because of the natural convection at the cathode. The vortex again flows into the cavity and collides with the bump lower edge.
5 Bump shapes with additive and the application -The bumps with hump on the surroundings traps more number of conductive particles and increase the electric properties. An additive of selenic acid is effective and this additive can be explained by the Wagner number and secondary current distribution.

Report

(3 results)
  • 1998 Annual Research Report   Final Research Report Summary
  • 1997 Annual Research Report
  • Research Products

    (36 results)

All Other

All Publications (36 results)

  • [Publications] Kazuo Kondo Keisuke Fukui: "Shape Evolution of Electorodeposited Copper bumps with High Peclet Numbers" Journal of the Electrochemical Society. 144. 466-450 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 近藤和夫, 横山光紀 福井啓介: "半導体高密度接続バンプの形状制御" 化学工学論文集. 23. 780-785 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Kazuo Kondo Keisuke Fukui: "Shape Evolution of Electrodeposited Bumps-Optimum Resist Angle to Prevent Side Bumping" IMC Proceedings. 209-214 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Kondo Kazuo Zennosuke Tanaka 外1名: "Shape Evolution of Electrodeposited Copper Bumps with Photo Resist Angle" Proc, ECS. PV-97-27. 346-351 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 近藤和夫 田中善之助 福井啓介: "バンプめっきの形状制御-レジスト角度の影響" 電子情報通信学会. CPM 97-145 ICD 97-182. 49-53 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 近藤和夫, 田中善之助 福井啓介: "半導体高密度接続バンプとその形状制御-レジスト角度の影響" 溶融塩および高温化学. 40. 187-191 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Kazuo Kondo Keisuke Fukui: "Current Evolution of Electrodeposited Copper Bumps with Photoresist Angle" Journal of the Electrochemical Society. 145. 840-845 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 近藤和夫: "表面実装と微細電気化学工学" ケミカルエンジニアリング. 1. 30-35 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Kazuo Kondo Keisuke Fukui: "Shape Evolution of Electrodeposited Bumps with Deep Cavity" Journal of the Electrochemical Society. 145. 3007-3011 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 近藤和夫, 田中善之助 外4名: "CSP実装に用いる高アスペクトバンプめっき" エレクトロニクス実装学会誌. Vol.2, No1. 35-41 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Kazuo Kondo and Keisuke Fukui: "Shape Evolution of Electrodeposited Copper Bumps with High Peclet Number" Journal of the Electrochemical Society. 144. 446-450 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Kazuo Kondo, Mitunori Yokoyama and Keisuke Fukui: "Shape Evolution of Electrodeposited Bumps" Kagaku Kougaku Ronbunshilyu. 23. 780-785 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Kazuo Kondo and Keisuke Fukui: "Shape Evolution of Electrodeposited Bumps-Optimum Resist Angle to Prevent Side Bumping" IMC Proceedings. 209-214 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Kazuo Kondo: "Shape Evolution of Electrodeposited Bumps with Photo Resist Angle" Proc.ECS. PV-97-27. 346-351 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Kazuo Kondo: "Shape Evolution of Electrodeposited Bumps-Optimum Resist Angle to Prevent Side Bumping-2" Denshijilyoho Tushin Gatukai. CMP97-145 ICP-97-182. 49-53 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Kazuo Kondo: "Shape Evolution of Electrodeposited Bumps-Optimum Resist Angle to Prevent Side Bumping-3" Yoyuen Oyobi Kouonkagaku. 40. 187-191 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Kazuo Kondo and Keisuke Fukui: "Current Evolution of Electrodeposited Copper Bumps with Photo resist Angle" Journal of the Electrochemical Society. 145. 840-845 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Kazuo Kondo: "Fine Electrochemical Engineering and Packaging" Chemical Engineering. 30-35 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Kazuo Kondo and Keisuke Fukui: "Shape Evolution of Electrodeposited Bumps with Deep Cavity" Journal of the Electrochemical Society. 145. 3007-3011 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Kazuo Kondo: "High Aspect Ratio Bump Electrodeposition used for CSP" Journal of Electronics Packaging. Vol.2, No.1. 35-41 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Kazuo Kondo Keisuke Fukui: "Shape Evolution of Electorodeposited Copper bumps with High Peclet Numbers" Journal of the Electrochemical Society. 144. 466-450 (1997)

    • Related Report
      1998 Annual Research Report
  • [Publications] 近藤和夫、横山光紀、福井啓介: "半導体高密度接続バンプの形状制御" 化学工学論文集. 23. 780-785 (1997)

    • Related Report
      1998 Annual Research Report
  • [Publications] Kazuo Kondo Keisuke Fukai: "Shape Evolution of Electrodeposited Bumps-Optimum Resist Angle to Prevent Side Bumping" IMC Proceedings. 209-214 (1997)

    • Related Report
      1998 Annual Research Report
  • [Publications] Kondo Kazuo 外1名 Zennosuke Tanaka: "Shape Evolution of Electrodeposited Copper Bumps with Photo Resist Angle" Proc,ECS. PV-97-27. 346-351 (1997)

    • Related Report
      1998 Annual Research Report
  • [Publications] 近藤和夫 田中善之助 福井啓介: "バンプめっきの形状制御-レジスト角度の影響" 電子情報通信学会. CPM97-145 ICD97-182. 49-53 (1997)

    • Related Report
      1998 Annual Research Report
  • [Publications] 近藤和夫 田中善之助 福井啓介: "半導体高密度接続バンプとその形状制御-レジスト角度の影響" 溶融塩および高温化学. 40. 187-191 (1997)

    • Related Report
      1998 Annual Research Report
  • [Publications] Kazuo Kondo Keisuke Fukui: "Current Evolution of Electrodeposited Copper Bumps with Photoresist Angle" Journal of the Electrochemical Society. 145. 840-845 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 近藤和夫: "表面実装と微細電気化学工学" ケミカルエンジニアリング. 1. 30-35 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Kazuo Kondo Keisuke Fukui: "Shape Evolution of Electrodeposited Bumps with Deep Cavity" Journal of the Electrochemical Society. 145. 3007-3011 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 近藤和夫 田中善之助 外4名: "CSP実装に用いる高アスペクトバンプめっき" エレクトロニクス実装学会誌. Vol.2,NO1. 35-41 (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] K.Kondo and K.Fukui: "Current Evolution of Electrodeposited Copper Bumps with Photoresist Angle" J.of Electrochem.Soc.145. 840-847 (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] 近藤和夫: "表面実装と微細電気化学工学" ケミカルエンジニヤリング. 1. 30-35 (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] 近藤和夫, 田中善之助, 福井啓介: "バンプめっきの形状制御レジスト角度の影響" 電子情報通信学会. 97-145. 49-55 (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] 近藤和夫, 田中善之助, 福井啓介: "半導体高密度接続バンプとその形状制御レジスト角度の影響" 溶融塩および高温化学. 40. 187-195 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 近藤和夫: "表面実装化学工学への展開" 化学工学会誌. 383. 6-12 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] K.Kondo, K.Fukui, M.Yokoyama and K.Shinohara: "shape Evolution of Electrodeposited Copper Bumps with High Peclet Numbers" J.of Electrochem,Soc.144. 466-470 (1997)

    • Related Report
      1997 Annual Research Report

URL: 

Published: 1997-04-01   Modified: 2016-04-21  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi