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Structural analysis of interface reactions in thin films by photoelectron diffraction

Research Project

Project/Area Number 09650886
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 工業分析化学
Research InstitutionThe University of Tokyo

Principal Investigator

ISHII Hideshi  Inst.of Industrial Science, Research Associate, 生産技術研究所, 助手 (30251466)

Project Period (FY) 1997 – 1998
Project Status Completed (Fiscal Year 1998)
Budget Amount *help
¥3,400,000 (Direct Cost: ¥3,400,000)
Fiscal Year 1998: ¥1,100,000 (Direct Cost: ¥1,100,000)
Fiscal Year 1997: ¥2,300,000 (Direct Cost: ¥2,300,000)
KeywordsPjotoelectron Diffraction / Interface of Thin Films / Chemical State / Oxide Thin Films / Structure Analysis / Sychrotorn Radiation / Epitaxial Films / Growth of Films / 光電子回析 / 金属 / 絶縁体 界面 / 酸化物
Research Abstract

To investigate the chemical reactions and structures at interfaces of epitaxial films, structure analysis using photoelectron diffraction has been carried out.
1.Study on the Interface reactions of thin films
Because it had been turned out that Al/SiO_2 system, which is the first aim of this study, grows without order structure in its interface reaction, the interface reactions and structures of the following interface systems were studied.
a.Interface structure of Cu/Ge(lll) systems (Interface structure and alloy formation of discommensurate system)
The structure of discommensurate domain Cu Layer on Ge(lll)-c(2*8) surface was studied by X-ray Photoelectron Diffraction (XPED). It turned out that Cu forms the double layer structure in the discommensurate domain at the initial stage of epitaxy and 0.6 * relaxation of outermost Cu layer occurs. Alloy formation in the interface between Cu an Ge layers was also investigate.
b.Interface structure of CaF_2/Ge(lll) systems (Interface structure and … More alloy formation of defected system)
The structure of CaF_2 Layer on Ge(lll)-c(2*8) surface was studied by scanned angle and/or energy photoelectron diffraction. Using a synchrotron radiation, structural analysis of defected layers, metal Ca layers and/or oxide CaO layer, was also carried out
2.Instrumentation of MBE system for multi elemental thin films
The MBE system for multi elemental thin films was constructed by equipping our XPED-MBE system with a new Knudsen cell. This also leads to the preparation of well defined substrate surface by MBE and better controlled epitaxial growth.Using this system, structures and growth mode of various thin films, SrF_2/Ge(lll) and CaF_2/Ge(lll) and so on, were investigated.
3.Design and Instrumentation of real time XPED system for measurements of interface reaction
To investigate interface reactions precisely and real time, conventional plot-by-plot XPED measurements is not adequate. Thus, theoretical and experimental study on 2 dimensional simultaneous detection of the polar angle and energy distributions was performed. Theoretical design of new type input lens system with a high through put was also carried out. Less

Report

(3 results)
  • 1998 Annual Research Report   Final Research Report Summary
  • 1997 Annual Research Report
  • Research Products

    (19 results)

All Other

All Publications (19 results)

  • [Publications] Hideshi ISHII: "Surface Structure of Thin CaO Layers Formed on CaF_2(III)studied by Photoelectron Diffraction" J.Electron Spectrosc.Relat.Phenom.88-91. 545-549 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Shinji Omori: "“Disappearance of Element-Specific Kikuchi Bands from Fluoride Surfaces"" Journal of Vacuum Science and Technology. (in press). (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Shinji OMORI: "Reconstruction of the crystal structure by Kikuchi-band analysis in X-ray p〓 and Auger electron diffraction" J.Electron Spectrosc.Relat.Phenom.88-91. 517-〓2 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Susumu SHIRAKI: "Design of Input Lens System for a 180° Deflection Toroidal Analyzer using Trajectory Simulation" J.Electron Spectrosc.Relat.Phenom.88-91. 1021-1026 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 白木将: "エネルギー・角度同時検出の新型アナライザーを用いたオージェ電子回折" 表面科学会誌. (in press). (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Hideshi Ishii et al.: "Surface Structure of Thin CaO Layers Formed on CaF_2 (111) studied by Photoelectron Diffraction" J.Electron Spectrosc.Relat.Phenom.88-91. 545-549 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Shinji Omori et al.: "Reconstruction of the crystal structure by Kikuchi-band analysis in X-ray photo-and Auger electron diffraction" J.Electron Spectrosc.Relat.Phenom.88-91. 517-522 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Susumu SHIRAKI et al.: "Design of Input Lens System for a 180゚ Deflection Toroidal Analyzer using Trajectory Simulation" J.Electron Spectrosc.Relat.Phenom.88-91. 1021-1026 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Shinji OMORI et al.: "Disapperance of Element-Specific Kikuchi Bands from Fluoride Surfaces" J.Vac.Sci.Technol. (in press). (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Susumu SHIRAKI et al.: "Measurements of Auger electron diffraction by using a novel electrostatic analyzer with the simultaneous detetection of energy and angular distribution (in Japanese)" Hyomen-Kagakaishi. (in press, ). (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Hideshi ISHII: "Surface Structure of Thin CaO Layers Formed on CaF_2(111)studied by Photoelectron Diffraction" J.Electron Spectrosc.Relat.Phenom.88-91. 545-549 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Shinji Omori: "“Disappearance of Element-Specific Kikuchi Bands from Fluoride Surfaces"" Journal of Vacuum Science and Technology. in press. (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] Shinji OMORI: "Reconstruction of the crystal structure by Kikuchi-band analysis in X-ray photo- and Auger electron diffraction" J.Electron Spectrosc.Relat.Phenom.88-91. 517-522 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Susumu SHIRAKI: "Design of Input Lens System for a 180° Deflection Toroidal Analyzer using Trajectory Simulation" J.Electron Spectrosc.Relat.Phenom.88-91. 1021-1026 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 白木将: 表面科学会誌. in press. (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] Hideshi ISHII: "Surface Structure of Thin CaO Layers Formed on CaF_2(111)studied by Photoelectron Difraction" J.Electron Spectrosc.Relat.Phenom.(in press). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] Hideshi ISHII: "Surface Structures of Thin Films studied by Photoelectron Diffraction" Proceeding of the International Symposium on Atomic Level Characterizations for New Material and Devices ‘97. 407-410 (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] Susumu SHIRAKI: "Design of Input Lens System for a 180° Deflection Toroidal Analyzer using Trajectory Simulation" J.Electron Spectrosc.Relat.Phenom.(in press). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] Shinji OMORI: "Reconstruction of the crystal structure by Kikuchi-band analysis in X-ray photo-and Auger electron diffraction" J.Electron Spectrosc.Relat.Phenom.(in press). (1998)

    • Related Report
      1997 Annual Research Report

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Published: 1997-04-01   Modified: 2016-04-21  

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