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Synthesis of Network Polysilanes as Electron Beam Resist Materials

Research Project

Project/Area Number 09650981
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 高分子合成
Research InstitutionOsaka Prefecture University

Principal Investigator

IRIE Setsuko  Osaka Prefecture University, Research Institute for Advanced Science and Technology, Assistant Professor, 先端科学研究所, 講師 (90100180)

Project Period (FY) 1997 – 1998
Project Status Completed (Fiscal Year 1998)
Budget Amount *help
¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 1998: ¥500,000 (Direct Cost: ¥500,000)
KeywordsElectron Beam Resist / Polysilanes / 電子線 / 電子線レジスト
Research Abstract

Wurtz coupling reactions of alkyltrichlorosilanes in the presence of sodium and crown ether yielded polysilane polymers. The polymers were analyzed with NMR and IR spectroscopy. Both NMR and IR spectra agreed to those of network polysilanes. Absorption spectra of radical ions of the silicon network polymers, which were produced in specific rigid matrices by gamma-irradiation, were measured at 77K.Both the radical anion and cation showed very broad absorption bands in visible and near-infrared wavelength regions. The radical anion spectrum and its band shape were changed by selective photo-bleaching. The radical anion was also detected by ESR measurement The good correlation between ESR and electronic absorption spectra confirmed that the broad absorption bands are due to the network polysilane radical anions. The absorption spectrum of the radical cation showed blue shift by thermal annealing. The broad band shape of the radical anion and cation spectra and the selective band bleaching of the radical anion spectra indicated the coexistence of various cyclic structures in the silicon network polymers.

Report

(3 results)
  • 1998 Annual Research Report   Final Research Report Summary
  • 1997 Annual Research Report
  • Research Products

    (10 results)

All Other

All Publications (10 results)

  • [Publications] S.Irie,M.Irie: "Absorption Spectra of Radical Ions of Low Molecular Weight Poly(methyl-n-propylsilane)s-Chain Length Dependence" Macromolecules. 30.25. 7906-7909 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Irie,Y.Shono,M.Irie,T.Okutani: "Electronic Absorption Spectra of Radical Ions of Alkyl Silicon Network Polymers" J. Organomet. Chem.588.1. 35-39 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Irie,T.Yamaguchi,S.Kobatake,M.Irie: "Radiation-Induced Coloration of Photochromic Dithienylethene Derivatives" Bull. Chem. Soc. Jpn.72.5 in press. (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Irie, M.Irie: "Absorption Spectra of Radical Ions of Low Molecular Weight Poly (methyl-n-propylsilane)s-Chein length Dependence" Macromolecules. 30. 7906-7909 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Irie, Y.Shono, M.Irie, M.Suzuki, T.Okutani: "Electronic Absorption Spectra of Radical Ions of Alkyl Silicon Network Polymers" J.Organomet.Chem.558. 35-39 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Irie, T,Yamaguchi, S.Kobatake, M.Irie: "Radiation-Induced Coloration of Photochromic Dithienylethene Derivatives" Bull.Chem.Soc.Jpn.72,5 (in press). (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Irie, M.Irie: "Photodegradation of Poly (methyl-n-propylsilane) in Solution Chain Length and Temperature Dependence" J.Photochem.Photobio.(submitted).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Irie, Y.Shono M.Irie, T.Okutani: "Electronic Absorption Spectra of Radical Ions of Alkylbsilicon Network Polymers" J.Organomet.Chem.558.1. 35-39 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] S.Irie, T.Yamaguchi S.Kobatake, M.Irie: "Radiation-Induced Coloration of Photochromic Dithienylethene Derivatives" Bull.Chem.Soc.Jpn.72.5. (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] S.Irie, M.Irie: "Absorption Spectra of Radical Ions of Low Molecular Weight Poly(methyl-n-propylsilane)s - Chain Length Dependence" Macromolecules. 30・25. 7906-7909 (1997)

    • Related Report
      1997 Annual Research Report

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Published: 1998-04-01   Modified: 2016-04-21  

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