ヘリコンプラズマスパッタ法によるチタン酸ビスマス薄膜の作製と誘電特性評価

• Project/Area Number: 09750737
• Research Category: Grant-in-Aid for Encouragement of Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: Inorganic materials/Physical properties
• Research Institution: Tohoku University
• Principal Investigator: 増本 博 東北大, 金属材料研究所, 助手 (50209459)
• Project Period (FY): 1997
• Project Status: Completed (Fiscal Year 1997)
• Budget Amount: ¥1,300,000 (Direct Cost: ¥1,300,000); Fiscal Year 1997: ¥1,300,000 (Direct Cost: ¥1,300,000)