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GROWTH OF HIGH QUALITY SEMICONDUCTORS BY CONTAINER LESS METHOD UNDER MICROGRAVITY

Research Project

Project/Area Number 10044131
Research Category

Grant-in-Aid for Scientific Research (B).

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionUNIVERSITY OF TOKYO

Principal Investigator

NISHINAGA Tatau  GRADUATE SCHOOL OF ENGINEERING, UNIVERSITY OF TOKYO, PROFESSOR, 大学院・工学系研究科, 教授 (10023128)

Co-Investigator(Kenkyū-buntansha) NARITSUKA Shigeya  GRADUATE SCHOOL OF ENGINEERING, UNIVERSITY OF TOKYO, LECTURER, 大学院・工学系研究科, 講師 (80282680)
TANAKA Masaaki  GRADUATE SCHOOL OF ENGINEERING, UNIVERSITY OF TOKYO, ASSOCIATED PROFESSOR, 大学院・工学系研究科, 助教授 (30192636)
BENZ K.W.  フライブルグ大学, 結晶学研究所, 教授
REGEL L.L.  クラークソン大学, 重力材料科学と応用国際センター, 教授
WILCOX W.R.  クラークソン大学, 重力材料科学と応用国際センター, 教授
Project Period (FY) 1998 – 1999
Project Status Completed (Fiscal Year 1999)
Budget Amount *help
¥5,600,000 (Direct Cost: ¥5,600,000)
Fiscal Year 1999: ¥2,500,000 (Direct Cost: ¥2,500,000)
Fiscal Year 1998: ¥3,100,000 (Direct Cost: ¥3,100,000)
Keywordsmicrogravity / GaSb / Bridgman growth / strain free growth / X-ray topograph / dislocation density / Mrangoni flow / impurity distribution
Research Abstract

The present studies were carried out as an international joint research among Japan, U.S.A., China and Germany. At first, undoped GaSb, Te doped GaSb and (Ga, Al) Sb were grown on ground by vertical Bridgman method. It was found that a great reduction of dislocation density in undoped GaSb was achieved by pre-growth annealing of GaSb melt. Then, Te doped GaSb which has been grown by Czochralski method was melted in the vertical Bridgman furnace from one end and regrowth was conducted employing un-melted part as a seed. It turned out on ground there was strong convection which introduces impurity Striations and makes the melt completely mix. (Ga, Al) Sb was successfully grown by vertical Bridgman method. (Ga, Al) Sb is suitable to study the elementary process of impurity doping taking Al as an impurity the thermodynamical properties of which has been well known.
Te doped GaSb grown in space by Chinese recoverable satellite has been investigated by X-ray topograph and X-ray 3-crystal diffractometry (TCD). It was found that dislocation density is greatly reduced where the growth was conducted contact free. In the part of the contact free growth, the presence of precipitates was observed. It was suggested that the precipitates were probably composed of Te which was relatively highly doped. TCD also showed the quality of the crystal grown under contact free condition was very high. In US side, Detached solidification with model materials were conducted and the detached growth under microgravity was reviewed.

Report

(3 results)
  • 1999 Annual Research Report   Final Research Report Summary
  • 1998 Annual Research Report
  • Research Products

    (22 results)

All Other

All Publications (22 results)

  • [Publications] T. Nishinaga, P. W. Ge: "Strain free Bridgman growth of GaSb under microgravity"ITIT International Symposium on Materials Synthesis under Microgravity Circumstances for Industrial Application. 10-15 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] L.L.Regel and W. R. Wilcox: "Detached sodidification in microgravity - a review"Microgravity science and technology. 11. 152-166 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] L.L.Regel and W. R. Wilcox: "Detached solidification"J.Jpn. Soc, Microgravity Appl. 15. S460-465 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] A.E.Voloshin, T. Nishinaga, AA.Lomov, P.Ge and C.Huo: "The perfection of space grown GaSb studied by X-ray topgraphy and diffractometry"J. Jpn. Soc .Microgravity Appl. vol. 16. S32-33 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] W. D. Huang, S. Naritsuka and T. Nishinaga: "Distriution of Te in GaSb grown by vertical gradient freeze technique Comparative study to the spac eexperiment"J. Jpn. Soc .Microgravity Appl. vol. 16. S34-35 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] W. D. Huang, S. Naritsuka and T. Nishinaga: "Vertical Bridgman growth of A1,Ga, Sb single crystals"Ann. Rep. Eng. Res. Inst. Univ. Tokyo. vol, 58. 113-118 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] T. Nakamura, T. Nishinaga, P, Ge and C. Huo: "Distribution of Te in GaSb grown by Bridgman technique under microgravity"J. Crystal Growth. 211. 441-445 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] W. D. Huang, S. Naritsuka and T. Nishinaga: "Vertical Bridgman growth of A1,Ga, Sb single crystals"J. Crystal Growth. (in press).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] T. Nishinaga: "P. W. Ge, Strain free Bridgman growth of GaSb under microgravity"ITIT International Symposium on Materials Synthesis under Microgravity Circumstances for Industrial Application. 10-15 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] L. L. Regel and W. R. Wilcox: "Detached solidification in microgravity - a review -"Microgravity science and technology. 11. 152-166 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] L. L. Regel and W. R. Wilcox: "Detached solidification"J. Jpn. Soc. Microgravity Appl.. 15. S460-S465 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] A. E. Voloshin, T. Nishinaga, AA. Lomov, P. Ge and C. Huo: "The perfection of space grown GaSb studied by X-ray topography and diffractometry"J. Jpn. Soc. Microgravity Appl.. 16. S32-S33 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] W. D. Huang, S. Naritsuka and T. Nishinaga: "Distribution of Te in GaSb grown by vertical gradient freeze technique - Comparative study to the space experiment -"J. Jpn. Soc. Microgravity Appl.. 16. S34-S35 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] W. D. Huang, S. Naritsuka and T. Nishinaga: "Vertical Bridgman growth of Al GaィイD21-xィエD2Sb single crystals"Ann. Rep. Eng. Res. Inst. Univ. Tokyo. 58. 113-118 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] T. Nakamura, T. Nishinaga, P. Ge and C. Huo: "Distribution of Te in GaSb grown by Bridgman technique under microgravity"Journal of Crystal Growth. 211. 441-445 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] W. D. Huang, S. Naritsuka and T. Nishinaga: "Vertical Bridgman growth of AlィイD2xィエD2GaィイD21-xィエD2Sb single crystals"Journal of Crystal Growth. (in print).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] W.D.Huang,S.Naritsuka and T.Nishinaga: "Distribution of Te in GaSb grown by vertical gradient freeze technique -Comparative study to the space experiment-"J.Jpn.Soc.Microgravity Appl.. Vol.16,Supp.. 34-35 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] A.E.Voloshin,T.Nishinaga,AA.Lomov,P.Ge and C.Huo: "The perfection of space grown GaSb studied by X-ray topography and diffractometry"J.Jpn.Soc.Microgravity Appl.. Vol.16,Supp.. 32-33 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] W.D.Huang,S.Naritsuka and T.Nishinaga: "Vertical Bridgman growth of Al_x,Ga_<1-x>Sb single crystals"Ann.Rep.Eng.Res.Inst.Univ.Tokyo. Vol.58. 113-118 (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] T.Nakamura,T.Nishinaga,P.Ge and C.Huo: "Distribution of Te in GaSb grown by Bridgman technique under microgravity"J.Crystal Growth. 211. 441-445 (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] W.D.Huang,S.Naritsuka and T.Nishinaga: "Vertical Bridgman growth of Al_x,Ga_<1-x>Sb single crystals"J.Crystal Growth. (印刷中).

    • Related Report
      1999 Annual Research Report
  • [Publications] 西永 頌: "微小重力下での半導体の非接触ブリッジマン成長" AISTワークショップ. 23-28 (1998)

    • Related Report
      1998 Annual Research Report

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Published: 1998-04-01   Modified: 2016-04-21  

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