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機能性酸化物高度プロセス研究

Research Project

Project/Area Number 10142103
Research Category

Grant-in-Aid for Scientific Research on Priority Areas (A)

Allocation TypeSingle-year Grants
Research InstitutionTokyo Institute of Technology

Principal Investigator

小田 俊理  東京工業大学, 量子効果エレクトロニクス研究センター, 教授 (50126314)

Co-Investigator(Kenkyū-buntansha) 後藤 俊成  電気通信大学, 電気通信学部, 教授 (70017333)
寺島 孝仁  京都大学, 化学研究所, 助教授 (40252506)
小林 猛  大阪大学, 大学院・基礎工学研究科, 教授 (80153617)
道上 修  岩手大学, 工学部, 教授 (90261461)
Project Period (FY) 2000
Project Status Completed (Fiscal Year 2000)
Budget Amount *help
¥116,000,000 (Direct Cost: ¥116,000,000)
Fiscal Year 2000: ¥33,300,000 (Direct Cost: ¥33,300,000)
Fiscal Year 1999: ¥37,800,000 (Direct Cost: ¥37,800,000)
Fiscal Year 1998: ¥44,900,000 (Direct Cost: ¥44,900,000)
Keywords酸化物超伝導体 / MOCVD法 / 分光エリプソメトリ / オーロラパルスレーザ法 / 磁性体 / 超伝導接合 / サファイアバイクリスタル / 大型サファイア基板 / 平面型固有ジョセフソン素子 / その場結晶成長観察 / エクリプスオーロラPLD
Research Abstract

本研究班のミッションは、ボルテックス薄膜プロセスの高度化である。MOCVD、レーザーアブレーション(PLD)、スパッタなど多角的な方法で高品質酸化膜薄膜結晶成長に取り組んだ。MOCVD法は高い生産性が期待できる方法であるが、原料供給の再現性や表面析出物の形成などの問題点が多かった。超音波セルによる原料濃度モニターと分光エリプソメトリによる結晶成長その場観察を導入することにより、特性や組成の再現性は飛躍的に向上した。酸素拡散により表面・界面の超伝導特性が劣化する問題に対しては、Ga添加が有望であることが提案された。PLD成長酸化物薄膜中にトラップが10^<19>/cm^3を越える密度で発生していることが判明した。良質の高温超伝導積層薄膜を得るためにプルームを制御できる新しいPLD法(オーロラ法)を開発し、その機構解明と応用について検討した。オーロラ効果は磁界によるミラー現象に基づくことが判明した。エピの低温化に成果が得られた。レーザーアブレーション法を用いてBi-Sr-Ca-Cu-O系およびSr(Ca)-Cu-O系について薄膜として成長可能な相関係について検討し、Bi-2212、Bi-2201、無限層構造、梯子型構造を持つ単相かつ結晶性に優れたエピタキシャル薄膜を作製することに成功した。スパッタ法によれば、LSGO基板上にc軸が面内で一方向に揃ったa軸配向YBCO膜の成長が可能になり、その薄膜を加工した素子の特性から平面型固有ジョセフソン素子の可能性が示された。集積化や外部回路への結合が容易であり、高出力高周波デバイスやジョセフソンメーザへの応用が期待できる。さらに、サファイア基板にバッファ層を設けて高品質YBCO膜を形成する技術も確立し、大面積超伝導基板への道を開いた。

Report

(3 results)
  • 2000 Annual Research Report
  • 1999 Annual Research Report
  • 1998 Annual Research Report
  • Research Products

    (63 results)

All Other

All Publications (63 results)

  • [Publications] S.Yamamoto and S.Oda: "Atomic Layer-by-Layer MOCVD of Complex Metal Oxides and Related Growth Technologies"Chemical Vapor Deposition. 7. 7-18 (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] S.Sugai,Y.Matsukawa,K.Shimosato and S.Oda: "Stabilization of Oxygen Diffusion in Ga-doped YBa2Cu3O7-σ Thin Films Observed by Spectroscopic Ellipsometry"Japanese Journal of Applied Physics. 39(10B). L1032-L1034 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Goto,S.Takekawa,M.Moriya,K.Usami and T.Kobayashi: "Growth of a-axis Oriented YBa2Cu3O7-δ Films on Ion-Beam Cleaned LaSrGaO4 Substrates"Physica C. 341-348. 2373-2374 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Y-S Jiang,T.Kobayashi and T.Goto: "Josephson Effects in A-axis Oriented YBa2Cu3O7-δ SIS Tunnel Junctions with Double Layer Barrier"Physica C. 341-348. 2741-2742 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Y.S.Jiang,M.Moriya,T.Kobayashi and T.Goto: "Properties of trilayers SIS junction with YBa2Cu3O7-y"Applied Superconductivity Conference (Virginia Beach, USA). 2EH08 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Goto,L.Zhang,S.Takekawa,M.Moriya and T.Kobayashi: "Growth conditions and superconductive properties of a-axis oriented YBa2Cu3O7-δ films on LaSrGaO4 substrates"Applied Superconductivity Conference (Virginia Beach, USA). 1MJ06 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.Moriya,T.Sudo,Y.Koike,K.Usami,T.Kobayashi and T.Goto: "Anisotropic properties of BSCCO(2212) films deposited on tilted substrates"Applied Superconductivity Conference (Virginia Beach, USA). 1MA02 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 張蘭,竹川智,守屋雅隆,小林忠行,後藤俊成: "三軸配向YBCO膜による平面型イントリンジックジョセフソン接合の形成"信学技報Technical Report of IEICE. ICE2000-29. 7-12 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] N.Ishikawa,Y.Chimi,A.Iwase,H.Wakana and O.Michikami: "Irradiation temperature dependence of swift heavy ion induced defects in oxide superconductor EuBa2Cu3Oy"Nucl.Instr.and Meth.in Phys.7.. B146-165. 287-294 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] S.Odashima,H.Matsumoto and O.Michikami: "Magnetic distortion in the two-dimensionalt-J model with nonmagnetic impurities"Physica C. 336. 287-294 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] O.Michikami,H.Wakana and T.Hashimoto: "Behavior of sputtering induced oxygen plasma toward of EuBa2Cu3Oy"Applied Superconductivity Conference (Virginia,USA). (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] H.Wakana and O.Michikami: "Preparation of CeO2/SrTiO3 buffer layers as a barrier material for SIS Josephson junctions"13th Int.Symp.on Super.(Tokyo,October 14-16). (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Hashimoto,H.Muto,H.Wakana,H.Saitou and O.Michikami: "Advances in Superconductivity (Springer-Verlag)"Preparation of high-Tc c-axis oriented EBCO thin films on Si substrates with buffer layers using DC magnetron sputtering. 909-911 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] K.Kojima,M.Someya,H.Eisaki,S.Uchida,Y.Furubayashi,T.Terashima,and M.Takano: "Advances in Superconductivity (Springer-Verlag)"Charge Dynamics of A14Cu24O41 Ladder Compounds in Two Ends : Sr14 and Ca14. 179-181 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] H.Wakana,T.Hashimoto,S.Kikuchi and O.Michikami: "Advances in Superconductivity (Springer-Verlag)"Preparation of high-Tc a-axis oriented EBCO thin films on R-sapphires with CeO2/PBCO buffer layers using DC magnetron sputtering. 906-908 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Y.Furubayashi,T.Terashima,M.Takano,K.Yagi,S.Shima and H.Terauchi: "Advances in Superconductivity (Springer-Verlag)"Epitaxial growth of single-crystalline thin film of two-legged spin ladder compound Ca14Cu24O41. 104-106 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] S. Yamamoto, K. Nagata, S. Sugai, A. Sengoku, Y. Matsukawa, T. Hattori and S. Oda: "Reproducible Growth of metalorganic Chemical Vapor Depostion Derived YBa2Cu3Ox Thinfilms Using Ultrasonic Gas Concentration Analyzer"Japanese Journal of Applied Physics. 38 (8). 4727-4732 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] S. Yamamoto, S. Sugai, Y. Matsukawa, A. Sengoku, H. Tobisaka, T. Hattori and S. Oda: "In situ growth monitoring during metalorganic chemical vapor depostion of YBa2Cu3Ox thimfilms by spectroscopic ellipsometry"Japanese Journal of Applied Physics. 38 (6AB). L632-L635 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] S. Yamamoto, S. Sugai and S. Oda: "In situ process monitoring of MOCVD of supercondcting and dielectric oxide thimfilms"Jornal de Physique IV. 9. 1013-1020 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] X. Fang, M. Tachiki and T. Kobayashi: "Preparation of SrRuO3 thin films by chemical reactive pulsee laser deposition"Thin Solid Films. (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] M. Sugiura, M. Tachiki, K. Uragou, Y. Furukawa and M. Nomura and T. Kobayashi: "Highly Smooth Surface of Perovskite-Type Oxide Thin Films Grown by Advanced Laser Ablation Method"Int. Conf. on Perfect Surface. (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] M. Tachiki and T. Kobayashi: "Manipulation of Laser Ablation Plume by Mgnetic Field Application"Jpn. J. Appl. Phys.. 38 (6A). 3642-3645 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] X. Fang, M. Tachiki and T. Kobayashi: "Preparation of SrRuO3 thin films by chemical reactive pulsed laser deposition"1999 Asian CVD Conf. (Invited Paper). (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] T. Kobayashi, M. Tachiki and C. Cai: "Proposal of new PLD "Eclopse-Aurora Method2 and Its Application to NiO/YBCO Josephson Junction Formation Suitalbe for Low-Noise SQUID"Int. Supercon. Electromics Conf.. 497-499 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] T. Kobayashi, M. Tachiki, C. Cai and M. Sugiura: "PLD Growth of Insulator/Oxide-Superconductor Heterostructures for Josephson Junction Formation"Future Electron Device HYSC Final Meeting. (1998)

    • Related Report
      1999 Annual Research Report
  • [Publications] T. Fujii, T. Kiwa, M. Tonouchi, M. Hangyo and T. Kobayashi: "Improved S/N-ratio of High Tc SQUID Magnetcardiometer due to Anisotropic Collection of Magnetic Flux by High-mu Platelet Spacer"Appl. Supercon. Conf.. (1998)

    • Related Report
      1999 Annual Research Report
  • [Publications] M. Tachiki and T. Kobayashi: "Investigation of excier laser ablation ofRuO2 by streak camera observation"J. Appl. Phys.. 85 (4). 2402-2407 (1998)

    • Related Report
      1999 Annual Research Report
  • [Publications] M. Tachiki, M. Noda, K. Yamada and T. Kobayashi: "SrTiO3 films epitaxially grown by eclipse pulsed laser deposition and their electrical characterization"J. Appl. Phys.. 83. 5351-5356 (1998)

    • Related Report
      1999 Annual Research Report
  • [Publications] T. Kudo, M. Tachiki, T. Kashiwai and T. Kobayashi: "Band Diagram of Metal-Insulator-Magnetic Semiconductor (La0.85Sr0.15MnO3) Structure at Room Temperature"J. Appl. Phys.. 37. L999-L1001 (1998)

    • Related Report
      1999 Annual Research Report
  • [Publications] M. Sugiura, K. Urago, M. Noda, M. Tachiki and T. Kobayashi: "First Demonstration of Rectifying Property of P-I-N Heterojunctions Fabricated by Tri-Layered Semiconducting Oxides"J. Appl. Phys.. 38 (4B). 2675-2678 (1998)

    • Related Report
      1999 Annual Research Report
  • [Publications] T. Goto, T. Kuji, Y.S. Jiang, M. Moriya, K. Usami and T. Kobayashi: "Preparation of YBCO films on sapphire with CeO2 Deposited by ion beam sputtering"IEEE Trans. on Applied Superconductivity. 9 (2). 1653-1656 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Y.S. Jiang, T. Kobayashi and T. Goto: "Preparation of a-ais oritented YBCO film on CeO2 Buffered sapphire substrate"IEEE Trans. on Applied Superconductivity. 9 (2). 1657-1660 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] M. Moriya, T. Okamoto, K. Usami, T. Goto and T. Kobayashi: "Properties of Bi-Sr-Ca-Cu-O (2212) films deposited by sputtering on tilted substrates"IEEE Trans. on Applied Superconductivity. 9 (2). 2380-2382 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] N. Ishikawa, Y. Chimi, A. Iwase, H. Maeta, K. Tsruru, O. Michikami, T. Kambara, T. Mitamura, Y. Awaya and M. Terasawa: "Electronic excitation effects in ion-irradiated high-Tc superconductors"Nucl. Instr. and Meth. in Phys. Res.. 135. 184-189 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] A. Iwase, N. Ishikawa, Y. Chimi, K. Tsuru, H. Wakana, O. Michikami and T. Kambara: "High energy heavy ion irradation damage in oxide superconductor EuBa2Cu3Oy"Nucl. Instr. and Meth. in Phys. Res.. 146. 557-564 (1998)

    • Related Report
      1999 Annual Research Report
  • [Publications] N. Ishikawa, Y. Chimi, A. Iwase, K. Tsuru and O. Michikami: "Defect production and recovery in high-Tc superconductors irradiated with electrons and ions at low temperature"J. Nucl. Mater.. 258-263. 1924-1928 (1998)

    • Related Report
      1999 Annual Research Report
  • [Publications] K. Kawabata, S. Tsukui, Y. Shono, O. Michikami, H. Sasakura, K. Yoshiara, Y. Kakehi and T. Yotsuya: "Detection of a coherent boson curent in the normalstate of a high-tempeture siuperconductor YBa2Cu3Oy film patterned to micrometer-sized rings"Phys. Rev. B. 58 (5). 2458-2461 (1998)

    • Related Report
      1999 Annual Research Report
  • [Publications] N. Ishikawa, Y. Chimi, A. Iwase, H. Wakana and O. Michikami: "Irradiation Temperaure Dependence of Swift Heavy Ion Induced Defects in Oxide Superconductor EuBa2Cu3Oy"Int. Conf. on Atomic Collision in Solid 18 (Aug. 3-8, Odense). (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] H. Wakana, T. Hashimoto, S. Kikuchi and O. Michikami: "Preparation of high-Tc c-axis oriented EBCO thin films on R-sapphires with CeO2/PBCO buffer layers using DC magnetron sputtering"12th Int. Symp. on Super, (ISS '99) (Oct. 17-19, Morioka). (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] T. Hashimoto, H. Muto, H. Wakana, H. Saitou and O. Michikami: "Preparation of high-Tc c-axis oriented EBCO thin films on Si substrates with buffer layers using DC magnetron sputtering"12th Int. Symp. on Super. (ISS '99) (Oct. 17-19, Morioka). (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] H. Wakana, A. Yokosawa and O. Michikami: "Non-c axis oriented EuBa2Cu3Oy thin films grown on Al2O3 (1102) substrates with CeO2 buffer layers"Jpn. J. Appl. Phys.. 38 (10). (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] O. Michikami, H. Wakana and K. Atsumi: "Recovery treatment of EuBa2Cu3Oy thin films with activated oxygen plasma"Jpn. J. Appl. Phys.. in press (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] Y. Furubayashi, T. Terashima, I. Chong, M. Takano, K. Yagi, S. Shima and H. Terauchi: "Epitaxial growth of single-crystlline thin film of Ca14 Cu24 O41 : A heavily hole-doped two-legged spin ladder"Phys. Rev. B. 60. R3720-3723 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] T. Nagaoka, Y. Matsuda, H. Obara, A. Sawa, T. Terashima, I. Chong, M. Takano and M. Suzuki: "Hall Anomaly in the Superconduncting State of High-Tc Cuprates : Universality in Doping Dependence"Phys. Rev. Lett.. 80. 3594-3597 (1998)

    • Related Report
      1999 Annual Research Report
  • [Publications] S. Oda, S. Yamamoto, Z. Wang, H. Tobisaka and K. Nagata: "High-Temperature Superconductors and Novel Inorganic Materials"NATO ASI Series 3, vol. 62 (eds. by G. van Tendeloo, E.V. Antipov and S.N. Putilin, Kluwer Academic, (Dordorecht). 75-78 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] S.Suzuki,H.Tobisaka and S.Oda: "Electric Properties of Coplanar High-Tc Superconducting Field^∧Effect Devices" Japanese Journal of Applied Physics. 37. 492-495 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Z.Wang and S.Oda: "Atomic Layer-by-Layer Metal-Organic Chemical Vapor Deposition of SrTiO3 Films with a Very smooth Surface" Japanese Journal of Applied Physics. 37. 942-947 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] S.Suzuki,S.Sugai and S.Oda: "Electric Field-effect Enhancement by a Combination of Coplanar High-Tc Superconducting Devices with Step Edge Junctions" Japanese Journal of Applied Physics. 37. L784-L786 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] T.Kobayashi,M.Tachiki,C.Cai and M.Sugiura: "PLD Growth of Insulator/Oxide-Superconductor Heterostructures for Josephson Junction Formation" Future Electron Device HTSC Final Meeting. (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] T.Fujii,T.Kiwa,M.Tonouchi,M.Hangyo and T.Kobayashi: "Improved S/N-ratio of High Tc SQUID Megnetcardiometer due to Anisotropic Collection of Magnetic Flux by High-mu Plantelet Spacer" Appl.Supercon.Conf.ETF-13. (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] X.Fang,M.Tachiki and T.Kobayashi: "Investigation of excimer laser ablation of RuO2 by streak camera observation" J.Appl.Phys. 85,No.4(in press). (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] M.Tachiki,M.Noda,K.Yamada and T.Kobayashi: "SrTiO3 films epitaxially grown by eclipse pulsed laser deposition and their electrical characterization" J.Appl.Phys.83. 5351-5356 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] T.Kobayashi and M.Tachiki: "On Breakthrough for the Future Electron Devices" Trans.IEICE. 81. 247-252 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] T.Kudo,M.Tachiki,T.Kashiwai and T.Kobayashi: "Band Diagram of Metal-Insulator-Magnetic Semiconductor(La0.85 Sr0.15 MnO3)Structure at Room Temperature" Jpn.J.Appl.Phys.37. L999-L1001 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] M.Tachiki and T.Kobayashi: "Manipulation of Laser Ablation Plume by Magnetic Field Application" Jap.J.Appl.Phys.(in press). (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] T.Nagaoka et al: "Hall Anomaly in the Superconducting State of High-Tc Cuprates:Universality in Doping Dependence" Phys.Rev.Lett.80. 3594-3597 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 姜、久慈、守屋、宇佐美、小林、後藤: "イオンビームスパッタCeO2をバッファ層とするサファイア基板上に形成したYBCO薄膜の配向性制御" 信学技報SCE98. 18. (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] T.Goto T.Kuji Y.S.Jiang M.Moriya K.Usami and T.Kobayashi: "Preparation of YBCO films on sapphire with CeO2 deposited by ion beam Sputtering" Applied Superconductivity Conference. MDC-9. (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Y.S.Jiang T.Kobayashi and T.Goto: "Preparation of a-axis oriented YBCO film on CeO2 buffered sapphire substrate" Applied Superconductivity Conference. MDC-10. (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] M.Moriya et al: "BSCCO(2212)films deposited by sputtering on tilted substrates" Applied Superconductivity Conference. MOD-5. (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] K.Kawabata et al: "Detection of a coherent boson current in the normal state of a high-temperature superconductor YBa2Cu3Oy film patterned to micrometer-sized rings" Phys.Rev.B58. 2458-2461 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 若菜、横沢、菊地、道上: "CeO2バッファ層を用いたA12O3(1102)上の非c軸配向EuBa2Cu3O7-δ薄膜の作成" 信学技報SCE-98. 17. 31-36 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] S.Oda et al: "High-Temperature Superconductors and Novel Inorganic Materials,NATO ASI Series 3 vol.62(eds.by G.Van Tendeloo,E.V.Antipov and S.N.Putilin,Kluwer Academic,Dordorecht)" Atomic Layer MOCVD of Oxide Superconductors and Dielectrics, (1999)

    • Related Report
      1998 Annual Research Report

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Published: 1998-04-01   Modified: 2016-04-21  

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