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Ultra Sensing Using Highly Precise Micromachining

Research Project

Project/Area Number 10305033
Research Category

Grant-in-Aid for Scientific Research (A).

Allocation TypeSingle-year Grants
Section一般
Research Field Measurement engineering
Research InstitutionTohoku University

Principal Investigator

ESASHI Masayoshi  Tohoku University, New Industry Creation Hatchery Center, Professor, 未来科学技術共同研究センター, 教授 (20108468)

Co-Investigator(Kenkyū-buntansha) TANAKA Shuji  Tohoku University, Graduate School of Engineering, Research Associate, 大学院・工学研究科, 助手 (00312611)
ONO Takahito  Tohoku University, Graduate School of Engineering, Lecturer, 大学院・工学研究科, 講師 (90282095)
HANE Kazuhiro  Tohoku University, Graduate School of Engineering, Professor, 大学院・工学研究科, 教授 (50164893)
KURABAYASHI Toru  Semiconductor Research Institute, Researcher, 研究員 (90195537)
MINAMI Kazuyuki  Tohoku University, Graduate School of Engineering, Lecturer, 大学院・工学研究科(現 山口大学), 講師 (00229759)
Project Period (FY) 1998 – 2000
Project Status Completed (Fiscal Year 2000)
Budget Amount *help
¥37,700,000 (Direct Cost: ¥37,700,000)
Fiscal Year 2000: ¥7,800,000 (Direct Cost: ¥7,800,000)
Fiscal Year 1999: ¥10,400,000 (Direct Cost: ¥10,400,000)
Fiscal Year 1998: ¥19,500,000 (Direct Cost: ¥19,500,000)
KeywordsHighly sensitive pressure sensor / Accelerometer / Gyroscope / Precise micromachining / Capacitive AFM probe / Microprobe for NSOM / Nano pattern transfer / Nanomachining / NSOM用プローブ
Research Abstract

Micro structures, which are fabricated using micromachining based on a semiconductor micro fabrication, can move quickly. The micromachining technology makes highly sensitive and quick response sensors feasible. We can fabricate sensor array or capacitive sensors by integrating multiplexer circuits or capacitance detecting circuits respectively. Moreover highly sensitive resonating sensors, servo sensors and self-diagnostic sensors can be made by integrating actuators. Ultra sensing which has higher performancess than conventional sensing technologies has been developed by precise micromachining, integration of different components and nanomachining.
Vacuum packaged sensors as capacitive diaphragm vacuum sensors and rotating gyroscopes using electrostatically levitating micro motor have been developed. The latter gyroscope could rotate at 10000 rpm and be used as two axis angular rate sensor and three axis accelerometer.
Near field optical microscope which have a small (20 nm diameter) a … More perture at the end of a thin silicon cantilever achieved a high throughput and hence can be applied for optical data storage. Multi microprobe data storage devise which has arrayed thermal prove with small (30 nm) heater at the tip has been developed. The arrayed (32×32) prove needs interconnection to the integrated circuit and for this purpose electrical feedthrough in a Pyrex glass was developed. Thermal recording to a phase change recording media (GeSbTe) which is used for DVD RAM and electrical reading using conductance change were successfully performed.
Carbon nanotube was deposited selectively at the end of silicon probe and applied for the SPM (Scanning Probe Microscope). Resonating characteristics of extremely thin (60 nm) silicon cantilevers has been studied High quality factor (Q) up to 250000 was achieved by heating in ultra high vacuum and removing surface natural oxide. This thin high Q resonator is effective for highly sensitive resonating sensors. Micromachined polarization modulators have been developed for the purpose of highly sensitive infrared reflection spectroscopy Less

Report

(4 results)
  • 2000 Annual Research Report   Final Research Report Summary
  • 1999 Annual Research Report
  • 1998 Annual Research Report
  • Research Products

    (246 results)

All Other

All Publications (246 results)

  • [Publications] G.Lim,S.Baek and M.Esashi: "A New Bulk-Micromachining Using Deep RIE and Wet Etching for an Accelerometer"電気学会論文誌E. 118-E. 420-424 (1998)

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      2000 Final Research Report Summary
  • [Publications] J.-J.Choi,南和幸,江刺正喜: "Deep ICP RIEとXeF_2ガスエッチングによる回転振動型角速度センサ"電気学会論文誌E. 118-E-10. 437-443 (1998)

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  • [Publications] J.-J.Choi,南和幸,江刺正喜: "電磁駆動誘導起電力検出型シリコン角速度センサ"電気学会論文誌E. 118-E-12. 641-646 (1998)

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  • [Publications] Y.Shiba,T.Ono,K.Minami and M.Esashi: "Capacitive AFM Probe for High Speed Imaging"電気学会論文誌E. 118-E-12. 647-651 (1998)

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  • [Publications] T.Ono and M.Esashi: "Subwavelength Pattern Transfer by Near-Field Photolithography"Jpn.J.Appl.Phys.. 37-12B. 1644-1648 (1998)

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  • [Publications] M.Esashi,K.Minami and T.Ono: "Silicon Bulk Micromachining and Nanomachining"Condensed Matter News. 6-3/4. 31-44 (1998)

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  • [Publications] M.Esashi,S.Sugiyama,K.Ikeda,Y.Wang and H.Miyashita: "Vacuum-Sealed Silicon Micromachined Pressure Sensors"Proceedings of the IEEE. 86-8. 1627-1639 (1998)

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  • [Publications] 小野崇人,江刺正喜: "ナノメートル加工の応用(2)-ナノメカニックスへの応用-"応用物理. 67-12. 1395-1399 (1998)

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  • [Publications] A.P Hui,R.Toda and M.Esashi: "Extremely High Aspect Ratio Metal Structures for Suspension of a Optical Shatter"Proc.of SPIE Conference on Microelectronic Structures and MEMS for Optical Processing IV. 3513. 233-238 (1998)

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  • [Publications] Y.Ueda,H.Henmi,K.Minami and M.Esashi: "An Electrostatic Servo Capacitive Pressure Sensor"電気学会論文誌E. 119-E-2. 94-98 (1999)

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  • [Publications] S.Ko,D.Sim and M.Esashi: "An Electrostatic Servo-Accelerometer with mG Resolution"電気学会論文誌E. 119-E-7. 368-373 (1999)

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  • [Publications] M.Esashi,R.Toda,K.Minami and T.Ono: "Precise Micro-Nanomachining of Silicon"電気学会論文誌E. 119-E-10. 489-497 (1999)

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  • [Publications] P.N.Minh,T.Ono and M.Esashi: "Nonuniform silicon oxidation and application for the fabrication of aperture for near-field scanning optical microscopy"Applied Physics Letters. 75-20. 4076-4078 (1999)

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  • [Publications] M.Nagao,K.Minami and M.Esashi: "Silicon Angular Rate Sensor Using PZT Thin Film"Sensors and Materials. 11-1. 31-39 (1999)

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  • [Publications] 小野崇人,江刺正喜: "走査型プローブ顕微鏡とナノメートル加工への応用"計測と制御. 38-12. 763-768 (1999)

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  • [Publications] 小野崇人,江刺正喜: "ナノメカノプティクス"OPTRONICS. 7. 144-148 (1999)

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  • [Publications] Y.Wang and M.Esashi: "Novel Force-balanced Micromechanical Vacuum Sensors"Vacuum Science and Technology(China). 19. 304-311 (1999)

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  • [Publications] K.Minami,T.Matsunaga and M.Esashi: "Simple Modeling and Simulation of the Squeeze Film Effect and Transint Response of the MEMS Device"Technical Digest of the MEMS'99. 12. 338-343 (1999)

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  • [Publications] N.M.Phan,T.Ono and M.Esashi: "A Novel Fabrication Method of the Tiny Aperture on Silicon Cantilever for Near Field Scanning Optical Microscopy"Technical Digest of the MEMS'99. 12. 360-365 (1999)

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  • [Publications] T.Ono,A.Wada and M.Esashi: "Silicon Micromachined Tunable Infrared Polarizer"Technical Digest of the Transducers'99. 10. 794-797 (1999)

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  • [Publications] M.Ikeda,N.Shimizu and M.Esashi: "Surface Micromachined Driven Shielded Condenser Microphone with a Sacrificial Layer Etched from the Backside"Technical Digest of the Transducers'99. 10. 1070-1073 (1999)

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  • [Publications] J.Yang,T.Ono and M.Esashi: "Mechanical Behavior of Ultrathin Microcantilever"Technical Digest of the Transducers'99. 10. 1140-1143 (1999)

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  • [Publications] T.Abe and M.Esashi: "One-Chip Multi-Channel Quartz Crystal Microbalance(QCM) Fabricated by Deep RIE"Technical Digest of the Transducers'99. 10. 1246-1249 (1999)

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  • [Publications] J.Mizuno,N.Nottmeyer,Y.Kanai,O.Berberig,T.Kobayashi and M.Esashi: "A Silicon Bulk Micromachined Crash Detection Sensor with Simultanious Angular and Linear Sensitivity"Technical Digest of the Transducers'99. 10. 1302-1305 (1999)

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  • [Publications] D.-W.Lee,T.Ono and M.Esashi: "Resonator Integrated Cantilever for Scanning Probe Microscope"Technical Digest of the Transducers'99. 10. 1360-1363 (1999)

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  • [Publications] T.Matsunaga,K.Minami and M.Esashi: "Acceleration Switch with Extended Holding Time Using the Squeeze Film Effect"Technical Digest of the Transducers'99. 10. 1550-1553 (1999)

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  • [Publications] K.Fukatsu,T.Murakoshi and M.Esashi: "Electrostatically Levitated Micro Motor for Inertia Measurement System"Technical Digest of the Transducers'99. 10. 1558-1561 (1999)

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  • [Publications] M.N.Phan,T,Ono and M.Esashi: "Application of Silicon Micromachining Technology for the Fabrication of the Atomic Force Microscope and Near Field Optical Probe"The Third International Workshop on Materials Science. 3. 537-540 (1999)

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  • [Publications] M.Esashi: "Silicon Micromachining"The Third International Workshop on Materials Science. 3. 74-79 (1999)

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  • [Publications] 李興華,安部隆,江刺正喜: "Deep RIEによるガラスの微細加工の研究"電気学会マイクロマシン研究会. MM99-15. 11-15 (1999)

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  • [Publications] 安部隆,江刺正喜: "水晶ドライエッチング(Deep RIE)によるワンチップマルチチャンネルQCMとマイクロQCMの製作"電気学会化学センサシステム研究会予稿集. CS99-38. 57-62 (1999)

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  • [Publications] 安部隆,江刺正喜: "微量液体分析用ワンチップ水晶センサ(QCM)の製作"電気学会センサ・マイクロマシン部門総合研究会資料. CS99-47. 23-26 (1999)

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  • [Publications] N.M.Phan,T.Ono and M.Esashi: "Microfabrication of 10nm Aperture on Si Cantilever for Near Field Optical Microscopy"1999年度精密工学会秋季大会講演論文集. 348 (1999)

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  • [Publications] 李東原,小野崇人,江刺正喜: "電磁駆動型ねじれ振動子の走査型プローブ顕微鏡への応用"電気学会センサ・マイクロマシン部門総合研究会資料. PS99-9. 43-48 (1999)

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  • [Publications] 阿部宗光,篠原英司,江刺正喜: "3脚音叉型Siジャイロ"電気学会センサ・マイクロマシン部門総合研究会資料. PS99-11. 55-60 (1999)

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  • [Publications] P.N.Minh,T.Ono and M.Esashi: "Microfabrication of Miniature Aperture at the Apex of SiO_2 Tip on Silicon Cantilever for Near-field Scanning Microscopy"Sensors and Actuators. A80. 163-169 (2000)

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  • [Publications] J.Yang,T.Ono and M.Esashi: "Mechanical Behavior of Ultrathin Microcantilever"Sensors and Actuators. A82. 102-107 (2000)

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  • [Publications] T.Abe and M.Esashi: "One-chip Multichannel Quartz Crystal Microbalance(QCM) Fabricated by Deep RIE"Sensors and Actuators. 82. 139-143 (2000)

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  • [Publications] D.-W.Lee,T.Ono and M.Esashi: "Cantilever with Integrated Resonator for Application of Scanning Probe Microscope"Sensors and Actuators. A82. 11-16 (2000)

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  • [Publications] P.N.Minh,T.Ono and M.Esashi: "High Throughput Aperture Near-field Scanning Optical Microscopy"Review of Scientific Instruments. 71. 3111-3117 (2000)

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  • [Publications] T.Ono,D.Y.Sim and M.Esashi: "Micro-discharge and Electric Breakdown in a Micro-gap"J.Micromech.Microeng.. 10. 445-451 (2000)

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  • [Publications] J.Yang,T.Ono and M.Esashi: "Surface Effects and High Quality Factor in Ultra Thin Single-crystal Silicon Cantilevers"Applied Physics Letters. 77-23. 3860-3862 (2000)

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  • [Publications] H.Miyashita and M.Esashi: "Wide Dynamic Range Silicon Diaphragm Vacuum Sensor by Electrostatic Servo System"J.Vac.Sci.Technology. B18-6. 2692-2697 (2000)

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  • [Publications] S.S.Lee,T.Ono,K.Nakamura and M.Esashi: "Electrostatic Servo Controlled Uncooled Infrared Sensor with Tunneling Transducer"Sensors and Materials. 12-5. 301-314 (2000)

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  • [Publications] 小野崇人,江刺正喜: "ナノエンジニアリングを目指す超微細マイクロプローブ"溶接学会誌. 69-6. 12-14 (2000)

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  • [Publications] J.Yang,T.Ono and M.Esashi: "Dominated Energy Dissipation in Ultra Thin Single Crystal Silicon Cantilever : Surface Loss"Proc.of the Micro Electro Mechanical Systems'2000. 13. 235-240 (2000)

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  • [Publications] X.Li,T.Abe and M.Esashi: "Deep Reactive Ion Etching of Pyrex Glass"Proc.of the Micro Electro Mechanical Systems'2000. 13. 271-276 (2000)

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  • [Publications] M.Abe,E.Shinohara,K.Hasegawa,S.Murata and M.Esashi: "Trident-type Tuning Fork Silicon Gyroscope by the Phase Difference Detection"Proc.of the Micro Electro Mechanical Systems'2000. 13. 508-513 (2000)

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  • [Publications] T.Ono,D.Y.Sim and M.Esashi: "Imaging of Micro-discharge in a Micro-gap of Electrostatic Actuator"Proc.of the Micro Electro Mechanical Systems'2000. 13. 651-656 (2000)

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  • [Publications] P.H.Minh,T.Ono and M.Esashi: "Application of Silicon Micromachining Technology for High Throughput Near-field Optical Probe"The Internl.Conf.on Electrical Eng.2000(ICEE2K). 271-274 (2000)

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  • [Publications] X.Li,T.Abe and M.Esashi: "Deep Reactive Ion Etching of PZT Using SF_6 Plasma"The Internl.Conf.on Electrical Eng.2000(ICEE2K). 275-278 (2000)

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  • [Publications] P.H.Minh,T.Ono,S.Tanaka and M.Esashi: "High Throughput Near-field Optical Probe Using Silicon Micromachining Technology"The 6th Intn.Conf.on Near Field Optics and Related Techniques (nfo-6). 6. 96 (2000)

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  • [Publications] M.Esashi,T.Ono,T.Abe: "Micromachining and Nanomachining for Ultrasensitive Chemical Measurement"2000 International Chemical Congress of Pacific. 137 (2000)

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  • [Publications] S.S.Lee,J.H.Kang,T.Ono M.Esashi: "Servo Controlled Thermal IR Sensor Using Tunnel Current and Measurement"Technical Digest of the 17th Sensor Symposium. 17. 177-182 (2000)

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  • [Publications] M.Mizusima and M.Esashi: "Capacitive 3-axis Accelerometer Using SOI Wafer"Technical Digest of the 17th Sensor Symposium. 17. 225-230 (2000)

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  • [Publications] T.Matsunaga and M.Esashi: "Safety Switch for Side Airbag System with Extended Holding Time Using Squeeze Film Effect"Technical Digest of the 17th Sensor Symposium. 17. 241-244 (2000)

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  • [Publications] T.Abe,K.Wakabayashi,X.Li,M.Esashi: "Development of Deep Reactive Ion Etching System for and Hard-Etching Materials"Technical Digest of the 17th Sensor Symposium. 17. 255-258 (2000)

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  • [Publications] N.Takimura,D.W.Lee,P.N.Minh,T.Ono and M.Esashi: "Heater Integarated Micro Probe for High-Density Data Storage"Technical Digest of the 17th Sensor Symposium. 17. 423-426 (2000)

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  • [Publications] S.Tanaka,M.Hara and M.Esashi: "Air-Turbine-Driven Micro-Polarization Modulator for Fourier Transform Infrared Spectroscopy"Technical Digest of the 17th Sensor Symposium. 17. 29-32 (2000)

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  • [Publications] D.W.Lee,T.Ono and M.Esashi: "Surface Imaging with Electro-Magnetically Self Actuating AFM Probe"Technical Digest of the 17th Sensor Symposium. 17. 433-436 (2000)

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  • [Publications] 李成浩,鈴木学,江刺正喜,飯島高志: "圧電膜を用いた振動ジャイロの駆動特性"第17回強誘電体応用会議. 17. 199-200 (2000)

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  • [Publications] Phan.N.Minh,T.Ono and M.Esashi: "Preliminary Result on Fabrication of Coaxial Tip for High Throughput Scanning Optical Probe"第17回「センサ・マイクロマシンと応用システム」シンポジウム講演概要集(和文速報). 17. 108 (2000)

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  • [Publications] 小野崇人,ヤンジンリン,江刺正喜: "極薄シリコン片持ち梁の機械的Q値とその表面状態"第61回応用物理学会学術講演会、. 61. 555 (2000)

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    • Related Report
      2000 Final Research Report Summary
  • [Publications] 宮下英俊,小野崇人,江刺正喜: "熱フィラメント化学気相成長法によるカーボンナノチューブの選択成長"第61回応用物理学会学術講演会、. 61. 655 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] S.Tanaka,P.N.Minh,T.Ono,K.Okamoto and M.Esashi: "Simulation of Micromachined NSOM Probe Using Finite-difference Time-domein Method"第61回応用物理学会学術講演会、. 61. 895 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] P.N.Minh,T.Ono,M.Esashi,T.Yatsui and M.Ohtsu: "Near-field Distribution at the Aperture of the Micromachined NSOM Probe"第61回応用物理学会学術講演会、. 61. 896 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 松永忠雄,江刺正喜: "サイドエアバック用セーフィングセンサ"電気学会フィジカルセンサ研究会. PHS00-3. 11-15 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 宮下英俊,小野崇人,江刺正喜: "カーボンナノチューブの選択成長とデバイスへの応用"電子情報通信学会電子デバイス研究会. ED2000-204. 69-74 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 宮下英俊,小野崇人,江刺正喜: "カーボンナノチューブの選択成長と走査型プローブ顕微鏡探針製作"電気学会ラィジカルセンサ研究会. PHS00-18. 9-14 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] X.Li,T.Abe and M.Esashi: "Deep Reactive Ion Etching of Pyrex Glass Using SF_6 Plasma"Sensors and Actuators. A87. 139-145 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] X.Li,T.Abe,Y.Liu and M.Esashi: "High Density Electrical Feedthrough Fabricated by Deep Reactive Ion Etching of Pyrex Glass"Proc.of the Micro Electro Mechanical Systems'2001. 14. 98-101 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] D.W.Lee,T.Ono,S.Tanaka,T.Abe and M.Esashi: "Fabrication of Microprobe Array with Sub-100nm Nano-Heater for Nanometric Thermal Imaging and Data Storage"Proc.of the Micro Electro Mechanical Systems'2001. 14. 204-207 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] H.Miyashita,T.Ono,P.H.Minh and M.Esashi: "Selective Growth of Carbon Nanotubes for Nano Electro Mechanical Device"Proc.of the Micro Electro Mechanical Systems'2001. 14. 301-304 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Hara,S.Tanaka and M.Esashi: "Micro-turbomachine Driving an Infrared Polarization Modulator for Fourier Transform Infrared Spectroscopy"Proc.of the Micro Electro Mechanical Systems'2001. 14. 282-285 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] P.N.Minh,T.Ono,S.Tanaka,K.Goto and M.Esashi: "High Throughput Optical Near-Field Anerture Array for Data Storage"Proc.of the Micro Electro Mechanical Systems'2001. 14. 309-312 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] W.Watanabe,T.Ono,P.G.Min,Y.Haga and M.Esashi: "Fabrication of Near Field Optical Probe at the End of Optical Fiber"Technical Digest of the 18th Sensor Symposium. 18(印刷中). (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Fukatsu,T.Murakoshi and M.Esashi: "Evaluation Experiment of Electrostatically Levitating Inertia Measurement System"Technical Digest of the 18th Sensor Sympositum. 18(印刷中). (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Ono,X.Li,D.-W.Lee,H.Miyashita arid M.Esashi: "Nanometric Sensing and Processing with Micromachined Functional Probe"Technical Digest of the Transducers'01. 11(印刷中). (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Ono and M.Esashi: "Sensors Update (H.Baltes,W.Gopel and J.Hesse ed)"Wiley-VCH. 25 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] G.Lim, S.Baek and M.Esashi: "A New Burk-Micromachining Using Deep RIE and Wet Etching for an Accelerometer"The Transaction of The IEE of Japan. 118E-9. 420-424 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] J.-J.Choi, K.Minami and M.Easashi: "Rotating Vibration Type Silicon Angular Rate Sensor by Deep ICPRIE and XeF_2 Gas Etching"The Transaction of The IEE of Japan. 118E-10 (in Japanese). 437-443 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] J.-J.Choi, K.Minami and M.Easashi: "Electromagnetical Excitation and Induced Electromotive Voltage Sensing Silicon Angular Rate Sensor"The Transaction of The IEE of Japan. 118E-12 (in Japanese). 641-646 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Y.Shiba, T.Ono, K.Minami and M.Esashi: "Capacitive AFM Probe for High Speed Imaging"The Transaction of The IEE of Japan. 118E-12. 647-651 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Ono and M.Esashi: "Subwavelength Pattern Transfer by Near-Field"Jpn.J.Appl.Phys.. 37-12B. 1644-1648 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Esashi, K.Minami and T.Ono: "Silicon Bulk Micromachining and Nanomachining"Condensed Matter News. 6-3/4. 31-44 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Esashi, S.Sugiyama, K.Ikeda, Y.Wang and H.Miyashita: "Vacuum-Sealed Silicon Micromachined Pressure Sensors"Proceedings of the IEEE. 86/8. 1627-1639 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Ono and M.Esashi: "Nanomachining and Its Application in Nano-mechanics"Oyo Buturi. 67-12 (in Japanese). 1395-1399 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] A.P Hui, R.Toda and M.Esashi: "Extremely High Aspect Ratio Metal Structures for Suspension of a Optical Shatter"Proc.of SPIE Conference on Microelectronic Structures and MEMS for Optical Processing IV.. 3513. 233-238 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Y.Ueda, H.Henmi, K.Minami and M.Esashi: "An Electrostatic Servo Capacitive Pressure Sensor"The Transaction of the IEE of Japan. 119E-2. 94-98 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] S.Ko, D.Sim and M.Esashi: "An Electrostatic Servo-Accelerometer with mG Resolution"The Transaction of the IEE of Japan. 119E-7. 368-373 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Esashi, R.Toda, K.Minami and T.Ono: "Precise Micro-Namomachining of Silicon"The Transaction of the IEE of Japan. 119E-10. 489-497 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] P.N.Minh, T.Ono and M.Esashi: "Nonuniform silicon oxidation and application for the fabrication of aperture for near-field scanning optical microscopy"Applied Physics Letters. 75-26. 4076-4078 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Nagao, K.Minami and M.Esashi: "Silicon Angular Rate Sensor Using PZT Thin Film"Sensors and Materials. 11-1. 31-39 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Ono and M.Esashi: "Scanning Probe Microscope and its Application to nano-fabrication"Journal of Soc.of Instrument and Control Engineering. 38-12 (in Japanese). 763-768 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Ono and M.Esashi: "Nano-mechanoptics"Optronics. 7 (in Japanese). 144-148 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Y.Wang and M.Esashi: "Novel Force-balanced Micromechanical Vacuum Sensors"Vacuum Science and technology (China).. 19. 304-311 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Minami, T.Matsunaga and M.Esashi: "Simple Modeling and Simulation of the Squeeze Film Effect and Transint Response of the MEMS Device"Technical Digest of the MEMS' 99. 12. 338-343 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] N.M.Phan, T.Ono and M.Esashi: "A Novel Fabrication Method of the Tiny Aperture on Silicon Cantilever for Near Field Scanning Optical Microscopy"Technical Digest of the MEMS' 99. 12. 360-365 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Ono, A.Wada and M.Esashi: "Silicon Micromachined Tunable Infrared Polarizer"Technical Digest of the Transducers' 99. 10. 794-797 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Ikeda, N.Shimizu and M.Esashi: "Surface Micromachined Driven Shielded Condenser Microphone with a Sacrificial Layer Etched from the Backside"Technical Digest of the Transducers' 99. 10. 1070-1073 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] J.Yang, T.Ono and M.Esashi: "Mechanical Behavior of Ultrathin Microscantilever"Technical Digest of the Transducers' 99. 10. 1140-1143 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Abe and M.Esashi: "One-Chip Multi-Channel Quartz Crystal Microbalance (QCM) Fabricated by Deep RIE"Technical Digest of the Transducers' 99. 10. 1246-1249 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] J.Mizuno, N.Nottmeyer, Y.Kanai, O.Berberig, T.Kobayashi and M.Esashi: "A Silicon Bulk Micromachined Crash Detection Sensor with Simultanious Angular and Linear Sensitivity"Technical Digest of the Transducers' 99. 10. 1302-1305 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] D.-W.Lee, T.Ono and M.Esashi: "Resonator Integrated Cantilever for Scanning Probe Microscope"Technical Digest of the Transducers' 99. 10. 1360-1363 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Matsunaga, K.Minami and M.Esashi: "Acceleration Switch with Extended Holding Time Using the Squeeze Film Effect"Technical Digest of the Transducers' 99. 10. 1550-1553 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Fukatsu, T.Murakoshi and M.Esashi: "Electrostatically Levitated Micro Motor for Inertia Measurement System"Technical Digest of the Transducers' 99. 10. 1558-1561 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.N.Phan, T.Ono and M.Esashi: "Application of Silicon Micromachining Technology for the Fabrication of the Atomic Force Microscope and Near Field Optical Probe"The Third International Workshop on Materials Science. 3. 537-540 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Esashi: "Silicon Micromachining"The Third International Workshop on Materials Science. 3. 74-79 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] X.Li, T.Abe and M.Esashi: "Micro-Fabrication of Pyrex Glass By Deep RIE"Micromachine Technical Report of IEEJ. MM-99-15 (in Japanese). 11-15 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Abe and M.Esashi: "One-Chip Multi-Channel QCM Fabricated by Deep RIE"Chemical Sensor Technical Report of IEEJ. CS-99-38 (in Japanese). 57-62 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Abe and M.Esashi: "One-Chip Multi-Channel QCM for Liquid Analysis"Chemical Sensor Technical Report of IEEJ. CS-99-47 (in Japanese). 23-26 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] N.M.Phan, T.Ono ands M.Esashi: "Microfabrication of 10nm Aperture on Si Cantilever for Near Field Optical Microscopy"Abstracts of Autumn Conf. on Precision Eng.. 1999. 348 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] D.-W.Lee, T.Ono and M.Esashi: "Resonator Integrated Cantilever for Application of Scanning Probe Microscope"Physical Sensor Technical Report of IEEJ. PS-99-9. 43-48 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Abe, E.Shinohara and M.Esashi: "Trident-type Tuning Fork Silicon Gyroscope"Physical Sensor Technical Report of IEEJ. PS-99-11 (in Japanese). 55-60 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] P.N.Minh, T.Ono and M.Esashi: "Microfabrication of Miniature Aperture at the Apex of SiO_2 Tip on Silicon Cantilever for Near-field Scanning Microscopy"Sensors and Actuators. A80. 163-169 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] J.Yang, T.Ono and M.Esashi: "Mechanical Behavior of Ultrathin Microcantilever"Sensors and Actuators. A82. 102-107 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Abe and M.Esashi: "One-chip Multichannel Quartz Crystal Microbalance (QCM) Fabricated by Deep RIE"Sensors and Actuators. A82. 139-143 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] D.-W.Lee, T.Ono and M.Esashi: "Cantilever with Integrated Resonator for Application of Scanning Probe Microscope"Sensors and Actuators. A82. 11-16 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] P.N.Minh, T.Ono and M.Esashi: "High Throughput Aperture Near-field Scanning Optical Microscopy"Review of Scientific Instruments. 71-8. 3111-3117 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Ono, D.Y.Sim and M.Esashi: "Micro-discharge and Electric Breakdown in a Micro-gap"J.Micromech.Microeng.. 10-3. 445-451 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] J.Yang, T.Ono and M.Esashi: "Surface Effects and High Quality Factor in Ultra Thin Single-crystal Silicon Cantilevers"Applied Physics Letters. 77-23. 3860-3862 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] H.Miyashita and M.Esashi: "Wide Dynamic Range Silicon Diaphragm Vacuum Sensor by Electrostatic Servo System"J.Vac.Sci.Technology. B18-6. 2692-2697 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] S.S.Lee, T.Ono, K.Nakamura and M.Esashi: "Electrostatic Servo Controlled Uncooled Infrared Sensor with Tunneling Transducer"Sensors and Materials. 12-5. 301-314 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Ono and M.Esashi: "Ultra Precise Microprobe for Nano-engineering"Journal of the Japan Welding Soc.. 69-6 (in Japanes). 12-14 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] J.Yang, T.Ono and M.Esashi: "Dominated Energy Dissipation in Ultra Thin Single Crystal Silicon Cantilever : Surface Loss"Proc.of the MEMS' 2000. 13. 235-240 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] X.Li, T.Abe and M.Esashi: "Deep Reactive Ion Etching of Pyrex Glass"Proc.of the MEMS' 2000. 13. 271-276 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Abe, E.Shinohara, K.Hasegawa, S.Murata and M.Esashi: "Trident-type Tuning Fork Silicon Gyroscope by the Phase Difference Detection"Proc.of the MEMS' 2000. 13. 508-513 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Ono, D.Y.Sim and M.Esashi: "Imaging of Micro-discharge in a Micro-gap of Electrostatic Actuator"Proc.of the MEMS' 2000. 13. 651-656 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] P.H.Minh, T.Ono and M.Esashi: "Application of Silicon Micromachining Technology for High Throughput Near-field Optical Probe"The Internal.Conf. on Electrical Eng.2000. 271-274 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] X.Li, T.Abe and M.Esashi: "Deep Reactive Ion Etching of PZT Using SF_6 Plasma"The Internal.Conf. on Electrical Eng.2000. 275-278 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] P.H.Minh, T.Ono, S.Tanaka and M.Esashi: "High Throughput Near-field Optical Probe Using Silicon Micromachining Technology"The 6th Intn.Conf. on Near Field Optics and Related Techniques. 6. 96 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Esashi, T.Ono, T.Abe: "Micromachining and Nanomachining for Ultrasensitive Chemical Measurement"2000 Intern.Chemical Congress of Pacific. 137 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] S.S.Lee, J.H.Kang, T.Ono and M.Esashi: "Servo Controlled Thermal IR Sensor Using Tunnel Current Measurement"Technical Digest of the 17th Sensor Symposium. 17. 177-182 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Mizusima and M.Esashi: "Capacitive 3-axis Accelerometer Using SOI Wafer"Technical Digest of the 17th Sensor Symposium. 17. 225-230 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Matsunaga and M.Esashi: "Safely Switch for Side Airbag System with Extended Holding Time Using Squeeze Film Effect"Technical Digest of the 17th Sensor Symposium. 17. 241-244 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Abe, K.Wakabayashi, X.Li and M.Esashi: "Development of Deep Reactive Ion Etching System for Hard-Etching Materials"Technical Digest of the 17th Sensor Symposium. 17. 255-258 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] N.Takimura, D.W.Lee, P.N.Minh, T.Ono and M.Esashi: "Heater Integarated Micro Probe for High-Density Data Storage"Technical Digest of the 17th Sensor Symposium. 17. 423-426 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] S.Tanaka, M.Hara and M.Esashi: "Air-Turbine-Driven Micro-Polarization Modulator for Fourier Transform Infrared Spectroscopy"Technical Digest of the 17th Sensor Symposium. 17. 29-32 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] D.W.Lee, T.Ono and M.Esashi: "Surface Imaging with Electro-Magnetically Self Actuating AFM Probe"Technical Digest of the 17th Sensor Symposium. 17. 433-436 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] S.H.Lee, G.Suzuki, M.Esashi and T.Iijima: "Vibration Properties of Gyros Using Piezoelectric Thin Film"Abstracts of 17th Conf. on Application of Ferroelectric Materials. 17. 199-200 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] P.H.Minh, T.Ono and M.Esashi: "Priliminary Result on Fabrication of Coaxial Tip for High Throughput Scanning Optical Probe"Late News of 17th Sesnor Symposium. 17. 108 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Ono, J.Yang and M.Esashi: "Mechanical Quality Factor of Ultra Thin Cantilever and Its Surface State"Extended Abstracts (The 61th Autumn Meeting, 2000) ; The Japan Soc. of Applied Physics. 61 (in Japanese). 555 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] H.Miyashita, T.Ono and M.Esashi: "Selective Growth of Carbon Nanotube with Hot-Filament Chemical Vapor Deposition"Extended Abstracts (The 61th Autumn Meeting, 2000) ; The Japan Soc. of Applied Physics. 61 (in Japanese). 655 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] S.Tanaka, P.N.Minh, T.Ono, K.Okamoto and M.Esashi: "Simulation of Micromachined NSOM Probe Using Finite-difference Time-domein Method"Extended Abstracts (The 61th Autumn Meeting, 2000) ; The Japan Soc. of Applied Physics. 61. 895 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] P.H.Minh, T.Ono, M.Esashi, T.Yatsui and M.Ohtsu: "Near-field Distribution at the Aperture of the Micromachined NSOM Probe"Extended Abstracts (The 61th Autumn Meeting, 2000) ; The Japan Soc. of Applied Physics. 61. 896 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Matsunaga and M.Easashi: "Safty Sensor with Extended Holding Time Using the Squeeze Film Effect for Side Air Bag Systems"Physical Sensor Technical Report of IEEJ. PHS-00-3 (in Japanese). 11-15 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] H.Miyashita, T.Ono and M.Esashi: "Selective Growth of Carbon Nanotubes for Applications"Technical Report of IEICE. ED2000-204 (2000-12) (in Japanese). 69-74 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] H.Miyashita, T.Ono and M.Esashi: "Selective Growth of Carbon Nano Tubes for Scanning Microscope Tip"Physical Sensor Technical Report of IEEJ. PHS-00-18 (in Japanese). 9-14 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] X.Li, T.Abe and M.Esashi: "Deep Reactive Ion Etching of Pyrex Glass Using SF_6 Plasma"Sensors and Actuators. A87. 139-145 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] X.Li, T.Abe, Y.Liu and M.Esashi: "High Density Electrical Feedthrough Fabricated by Deep Reactive Ion Etching of Pyrex Glass"Proc.of the MEMS' 2001. 14. 98-101 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] D.W.Lee, T.Ono, S.Tanaka, T.Abe and M.Esashi: "Fabrication of Microprobe Array with Sub-100nm Nano-Heater for Nanometric Thermal Imaging and Data Storage"Proc.of the MEMS' 2001. 14. 204-207 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] H.Miyashita, T.Ono, P.H.Minh and M.Esashi: "Selective Growth of Carbon of Carbon Nanotubes for Nano Electro Mechanical Device"Proc.of the MEMS' 2001. 14. 301-304 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Hara, S.Tanaka and M.Esashi: "Micro-turbomachine Driving an Infrared Polarization Modulator for Fourier Transform Infrared Spectroscopy"Proc.of the MEMS' 2001. 14. 282-285 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] P.N.Minh, T.Ono, S.Tanaka, K.Goto and M.Esashi: "High Throughput Optical Near-Field Aperture Array for Data Storage"Proc.of the MEMS' 2001. 14. 309-312 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] W.Watanabe, T.Onom, P.G.Min, Y.Haga and M.Esashi: "Fabrication of Near Field Optical Probe at the End of Optical Fiber"Technical Digest of the 18th Sensor Symposium. 18, (in press). (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Fukatsu, T.Murakoshi and M.Esashi: "Evaluation Experiment of Electrostatically Levitating Inertia Measurement System"Technical Digest of the 18th Sensor Symposium. 18, (in press). (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Ono, X.Li, D.-W.Lee, H.Miyashita and M.Esashi: "Nanometric Sensing and Processing with Micromachined Functional Probe"Technical Digest of the Transducers' 01. 11, (in press). (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Ono and M.Esashi: "Sensors Update (H.Baltes, W.Gopel and J.Hesse ed.)"Wiley-VCH. 25 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] P.N.Minh,T.Ono and M.Esashi: "Microfabrication of Miniature Aperture at the Apex of SiO_2 Tip on Silicon Cantilever for Near-field Scanning Microscopy"Sensors and Actuators. A80. 163-169 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] J.Yang,T.Ono and M.Esashi: "Mechanical Behavior of Ultrathin Microcantilever"Sensors and Actuators. 82. 102-107 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] D.-W.Lee,T.Ono and M.Esashi: "Cantilever with Integrated Resonator for Application of Scanning Probe Microscope"Sensors and Actuators. A82. 11-16 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] P.N.Minh,T.Ono and M.Esashi: "High Throughput Aperture Near-field Scanning Optical Microscopy"Review of Scientific Instruments. 71・8. 3111-3117 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Ono,D.Y.Sim and M.Esashi: "Micro-discharge and Electric breakdown in a Micro-gap"J.Micromech.Microeng.. 10・3. 445-451 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] J.Yang,T.Ono and M.Esashi: "Surface Effects and High Quality Factor in Ultra Thin Single-crystal Silicon Cantilevers."Applied Physics Letters. 77・23. 3860-3862 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] H.Miyashita and M.Esashi: "Wide Dynamic Range Silicon Diaphragm Vacuum Sensor by Electrostatic Servo System"J.Vac.Sci.Technology. B18・6. 2692-2697 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] X.Li,T.Abe and M.Esashi: "Deep Reactive Ion Etching of Pyrex Glass Using SF_6 Plasma"Sensors and Actuators. A87・3. 139-145 (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.Hara,S.Tanaka and M.Esashi: "Micro-turbomachine Driving an Infrared Polarization Modulator for Fourier Transform Infrared Spectroscopy"Proc.of the Micro Electro Mechanical Systems'2001. 14. 282-285 (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] P.N.Minh,T.Ono,S.Tanaka,K.Goto and M.Esashi: "High Throughput Optical Near-Field Aperture Array for Data Storage"Proc.of the Micro Electro Mechanical Systems'2001. 14. 309-312 (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Ono,X.Li,D.-W.Lee,H.Miyashita and M.Esashi: "Nanometric Sensing and Processing with Micromachined Functional Probe"Technical Digest of the Transducers'01. 11. (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.Esashi,T.Ono,T.Abe: "Micromachining and Nanomachining for Ultrasensitive chemical Measurement "2000 International Chemical congress of Pacific. 137 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] S.S.Lee,J.H.Kang,T.Ono M.Esashi: "Servo Controlled Thermal IR Sensor Using Tunnel Current and Measurement "Technical Digest of the 17th Sensor Symposium. 17. 177-182 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.Mizusima and M.Esashi: "Capacitive 3-axis Accelerometer Using SOI Wafer"Technical Digest of the 17th Sensor Symposium . 17. 225-230 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Matsunaga and M.Esashi: "Safety Switch for Side Airbag System with Extended Holding Time Using Squeeze Film Effect"Technical Digest of the 17th Sensor Symposium. 17. 241-244 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Abe,K.Wakabayashi,X.Li M.Esashi: "Development of Deep Reactive Ion Etching System for and Hard-Etching Materials"Technical Digest of the 17th Sensor Symposium. 17. 255-258 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] S.S.Lee,T.Ono,K.Nakamura and M.Esashi: "Electrostatic Servo Controlled Uncooled Infrared Sensor with Tunneling Transducer"Sensors and Materials. 12・5. 301-314 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 小野崇人,江刺正喜: "ナノエンジニアルングを目指す超微細マイクロプローブ"溶接学会誌. 69・6. 12-14 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] P.H.Minh,T.Ono and M.Esashi: "Application of Silicon Micromachining Technology for High Throughput Near-field Optical Probe"ICEE2K(The Internl.Conf.on Electrical Eng.2000). 271-274 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] X.Li,T.Abe and M.Esashi: "Deep Reactive Ion Etching of PZT Using SF_6 Plasma"ICEE2K (The Internl.Conf. on Electrical Eng.2000). 275-278 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] P.H.Minh,T.Ono,S.Tanaka and M.Esashi: "High Throughput Near-field Optical Probe Using Silicon Micromachining Technology"The 6th Intn.Conf.on Near Field Optics and Related Techniques(nfo-6). 6. 96 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] X.Li,T.Abe,Y.Liu and M.Esashi: "High Density Electrical Feedthrough Fabricated by Deep Reactive Ion Etching of Pyrex Glass"Proc.of the Micro Electro Mechanical Systems'2001. 14. 98-101 (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] D.W.Lee,T.Ono,S.Tanaka,T.Abe and M.Esashi: "Fabrication of Microprobe Array with Sub-100nm Nano-Heater for Nanometric Thermal Imaging and Data Storage"Proc.of the Micro Electro Mechanical Systems'2001. 14. 204-207 (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] H.Miyashita,T.Ono,P.H.Minh and M.Esashi: "Selective Growth of Carbon Nanotubes for Nano Electro Mechanical Device"Proc.of the Micro Electro Mechanical Systems'2001. 14. 301-304 (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] N.Takimura,D.W.Lee,P.N.Minh,T.Ono and M.Esashi: "Heater Integarated Micro Probe for High-Density Data Storage"Technical Digest of the 17th Sensor Symposium. 17. 423-426 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] S.Tanaka,M.Hara and M.Esashi: "Air-Turbine-Driven Micro-Polarization Modulator for Fourier Transform Infrared Spectroscopy"Technical Digest of the 17th Sensor Symposium. 17. 29-32 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.Mizusima and M.Esashi: "Capacitive 3-axis Accelerometer Using SOI Wafer"Technical Digest of the 17th Sensor Symposium. 17. 225-230 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] D.W.Lee,T.Ono and M.Esashi: "Surface Imaging with Electro-Magnetically Self Actuating AFM Probe"Technical Digest of the 17th Sensor Symposium. 17. 433-436 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] W.Watanabe,T.Ono,P.G.Min,Y.Haga and M.Esashi: "Fabrication of Near Field Optical Probe at the End of Optical Fiber"Technical Digest of the 18th Sensor Symposium. 18. (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] K.Fukatsu,T.Murakoshi and M.Esashi: "Evaluation Experiment of Electrostatically Levitating Inertia Measurement System"Technical Digest of the 18th Sensor Symposium. 18. (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] 李成浩,鈴木学,江刺正喜,飯島高志: "圧電膜を用いた振動ジャイロの駆動特性"第17回強誘電体応用会議. 17. 199-200 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Phan.N.Minh,T.Ono and M.Esashi: "Preliminary Result on Fabrication of Coaxial Tip for High Throughput Scanning Optical Probe"第17回「センサ・マイクロマシンと応用システム」シンポジウム講演概要集(和文速報)、. 17. 108 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 小野崇人,ヤンジンリン,江刺正喜: "極薄シリコン片持ち梁の機械的Q値とその表面状態"第61回応用物理学会学術講演会、. 61. 555 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 宮下英俊,小野崇人,江刺正喜: "熱フィラメント化学気相成長法によるカーボンナノチューブの選択成長"第61回応用物理学会学術講演会、. 61. 655 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] S.Tanaka,P.N.Minh,T.Ono,K.Okamoto and M.Esashi: "Simulation of Micromachined NSOM Probe Using Finite-difference Time-domein Method"第61回応用物理学会学術講演会、. 61. 895 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] P.N.Minh.T.Ono,M.Esashi,T.Yatsui and M.Ohtsu: "Near-field Distribution at the Aperture of the Micromachined NSOM Probe"第61回応用物理学会学術講演会、. 61. 896 (200)

    • Related Report
      2000 Annual Research Report
  • [Publications] 松永忠雄,江刺正喜: "サイドエアバック用セーフィングセンサ"電気学会フィジカルセンサ研究会. 11-15 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 宮下英俊,小野崇人,江刺正喜: "カーボンナノチューブの選択成長とデバイスへの応用"電子情報通信学会 電子デバイス研究会. 69-74 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 宮下英俊,小野崇人,江刺正喜: "カーボンナノチューブの選択成長と走査型プローブ顕微鏡探針製作"電気学会フィジカルセンサ研究会. 9-14 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 小野崇人,ファンミンゴ,李東原,江刺正喜: "高密度情報記録のためのマイクロマシンプローブ"レーザ学会学術講演会. (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.Nagao,K.Minami and M.Esashi: "Siicon Angular Rate Sensor Using PZT Thin Film"Sensors and Materials. 11・1. 31-39 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] S.Ko,D.Sim and M.Esashi: "An Electrostatic Servo-Accelerometer with mG Resolution"電気学会論文誌E. 119-E・7. 368-373 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] M.Esashi,R.Toda,K.Minami and T.Ono: "Precise Micro-Nanomachining of Silicon"電気学会論文誌E. 119-E・10. 489-497 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] P.N.Minh,T.Ono and M.Esashi: "Nonuniform silicon oxidation and application for the fabrication of aperture for near-field scanning optical microscopy"Applied Physics Letters. 75・26. 4076-4078 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 小野 崇人、江刺正喜: "走査型プローブ顕微鏡とナノメートル加工への応用"計測と制御. 38・12. 763-768 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 江刺正喜: "ここまで来たマイクロ・ナノメカノプティクス 総説"OPTRONICS. No.7. 140-143 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 小野崇人、江刺正喜: "ナノメカノプティクス"OPTRONICS. No.7. 144-148 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 江刺 正喜: "システムの鍵を握るマイクロマシン技術"技術と経済. No.392. 4-9 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] T.Ono,A.Wada and M.Esashi: "Silicon Micromachined Tunable Infrared Polarizer"[Technical Digest of the Transducers'99. 2P6.5. 794-797 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] M.Ikeda,N.Shimizu and M.Esashi: "Surface Micromachined Driven Shielded Condenser Microphone with a Sacrificial Layer Etched from the Backside"Technical Digest of the Transducers'99. 3D3.3. 1070-1073 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] J.Yang,T.Ono and M.Esashi: "Mechanical Behavior of Ultrathin Microcantilever"Technical Digest of the Transducers'99. 4D1.1. 1140-1143 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] T.Abe and M.Esashi: "One-Chip Multi-Channel Quartz Crystal Microbalance (QCM) Fabricated by Deep RIE"Technical Digest of the Transducers'99. 4B3.1. 1246-1249 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] J.Mizuno,N.Nottmeyer,Y.Knanai,O.Berberig,T.Kobayashi and M.Esashi: "A Silicon Bulk Micromachined Crash Detection Sensor with Simultanious"Technical Digest of the Transducers'99. 4D3.4. 1302-1305 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] D.W.Lee,T.Ono and M.Esashi: "Microscope Resonator Integrated Cantilever for Scanning Probe"Technical Digest of the Transducers'99. 4C4.1. 1360-1363 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] T.Matsunaga,K.Minami and M.Esashi: "Acceleration Switch with Extended Holding Time Using the Squeeze Film Effect"Technical Digest of the Transducers'99. 3P2.14. 1550-1553 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] K.Fukatsu,T.Murakoshi and M.Esashi: "Electrostatically Levitated Micro Motor for Inertia Measurement System"Technical Digest of the Transducers'99. 3P2.16. 1558-1561 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] M.N.Phan,T.Ono and M.Esashi: "Application of Silicon Micromachining Technology for the Fabrication of the Atomic Force Microscope and Near Field Optical Probe"The Third International Workshop on Materials Science. 537-540 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] M.Esashi: "Precise Bulk Micromachining"Microsystems in Harsh Environments Workshop. (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] M.Esashi: "Silicon Micromachining"The Third International Workshop on Materials Science. 74-79 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 李興華、安部隆、江刺正喜: "Deep RIEによるガラスの微細加工の研究"電気学会 マイクロマシン研究会. MM-99-15. 11-15 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] N.M.Phan,T.Ono and M.Esashi: "Microfabrication of 10nm Aperture on Si Cantilever for Near Field Optical Microscopy"1999年度 精密工学会秋季大会 講演論文集. 348 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 李東原、小野崇人、江刺正喜: "電磁駆動型ねじれ振動子の走査型プローブ顕微鏡への応用"電気学会センサーマイクロマシン部門総合研究会資料. PS-99-9. 43-48 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 阿部宗光、篠原英司、江刺正喜: "3脚音叉型Siジャイロ"電気学会センサーマイクロマシン部門総合研究会資料. PS-99-11. 55-60 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] N.Takimura,D.W.Lee,M.N.Phan,T.Ono and M.Esashi: "Heater Integarated Micro Probe for High-Density Data Storage"Technical Digest of the 17th Sensor Symposium. (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] T.Matsunaga and M.Esashi: "Acceleration Switch with a Holding Time by Using the Squeezed Dumping"Technical Digest of the 17th Sensor Symposium. (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] S.S.Lee,J.H.kang,T.Ono and M.Esashi: "Servo Controlled Thermal IR Sensor Using Tunnel Current Measurement"Technical Digest of the 17th Sensor Symposium. (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] D.W.Lee,T.Ono and M.Esashi: "Surface Imaging with Electro-Magnetically Self Actuating AFM Probe"Technical Digest of the 17th Sensor Symposium. (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] S.Tanaka,M.Hara and M.Esashi: "Air-Turbine-Driven Micro-Polarization Modulator for Fourier Transform Infrared Spectroscopy"Technical Digest of the 17th Sensor Symposium. (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] J.Yang,T.Ono and M.Esashi: "Dominated Energy Dissipation in Ultra Thin Single Crystal Silicon Cantilever: Surface Loss"Proc. Of the Micro Electro Mechanical Systems'2000. 235-240 (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] X.Li,T.Abe and M.Esashi: "Deep Reactive Ion Etching of Pyrex Glass"Proc.of the Micro Electro Mechanical Systems'2000. 271-276 (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] M.Abe,E.Shinohara,K.Hasegawa,S.Murata: "Trident-type Tuning Fork Silicon Gyroscope by the Phase Difference Detection"Proc. Of the Micro Electro Mechanical Systems'2000. 508-513 (2000)

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      1999 Annual Research Report
  • [Publications] T.Ono,D.Y.Sim and M.Esashi: "Imaging of Micro-discharge in a Micro-gap of Electrostatic Actuator"Proc. Of the Micro Electro Mechanical Systems'2000. 651-656 (2000)

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      1999 Annual Research Report
  • [Publications] 李成浩、鈴木学、江刺正喜、飯島高志: "圧電膜を用いた振動ジャイロの駆動特性"第17回強誘電体応用会議. (印刷中). (2000)

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  • [Publications] T.Ono and M.Esashi: "Sensors Update (H. Baltes, W.Gopel and J. Hesse ed)"Wiley-VCH. 25 (1999)

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  • [Publications] G.Lim,S.Baek and M.Esashi: "A New Bulk-Micromachining Using Deep RIE and Wet Etching for an Accelerometer" 電気学会論文誌E. 118-E・9. 420-424 (1998)

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      1998 Annual Research Report
  • [Publications] J.-J.Choi、南和幸、江刺正樹: "Deep ICP RIE と XeF_2 ガスエッチングによる回転振動型角速度センサ" 電気学会論文誌E. 118-E・10. 437-443 (1998)

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      1998 Annual Research Report
  • [Publications] J.-J.Choi、南和幸、江刺正樹: "電磁駆動誘導起電力検出型シリコン角速度センサ" 電気学会論文誌E. 118-E・12. 641-646 (1998)

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      1998 Annual Research Report
  • [Publications] Y.Shiba,T.Ono,K.Minami and M.Esashi: "Capacitive AFM Probe for High Speed Imaging^1" 電気学会論文誌E. 118-E・12. 647-651 (1998)

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      1998 Annual Research Report
  • [Publications] T.Ono and M.Esashi: "Subwavelength Pattern Transfer by Near-Field Photolithography" Jpn.J.Appl.Phys.37. 1644-1648 (1998)

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      1998 Annual Research Report
  • [Publications] Y.Ueda,H.Henmi,K.Minami and M.Esashi: "An Electrostatic Servo Capacitive Pressure Sensor" 電気学会論文誌E. 119-E・2. 94-98 (1999)

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      1998 Annual Research Report
  • [Publications] M.Esashi,S.Sugiyama,K.Ikeda,Y.Wang and H.Miyashita: "Vacuum-Sealed Silicon Micromachined Pressure Sensors" Proceedings of the IEEE. 86・8. 1627-1639 (1998)

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  • [Publications] 小野崇人、江刺正喜: "ナノメートル加工の応用(2)-ナノメカニックスへの応用-" 応用物理. 67・12. 1395-1399 (1998)

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      1998 Annual Research Report
  • [Publications] A.P Hui,R.Toda and M.Esashi: "Extremely High Aspect Ratio Metal Structures for Suspentsion of a Optical Shatter" Proc.of SPIE Conference on Microelectronic Structures and MEMS for Optical Processing IV. 3513. 233-238 (1998)

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      1998 Annual Research Report
  • [Publications] K.Minamim,T.Matsunaga and M.Esashi: "Simple Modeling and Simulation of the Squeeze Film Effect and Transint Response of the MEMS Device" Technical Digest of the MEMS'99. 12. 338-343 (1999)

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      1998 Annual Research Report
  • [Publications] N.M.Phan,T.Ono and M.Esashi: "A Novel Fabrication Method of the Tiny Aperture on Silicon Cantilever for Near Field Scanning Optical Microscopy" Technical Digest of the MEMS'99. 12. 360-365 (1999)

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      1998 Annual Research Report
  • [Publications] T.Matsunaga,K.Minami and M.Esashi: "Acceleration Switch with Extended Holding Time Using the Squeeze Film Effect" Technical Digest of the Transducere'99. 10(印刷中). (1999)

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      1998 Annual Research Report
  • [Publications] D.-W.Lee,T.Ono and M.Esashi: "Resonator Integrated Cantilever for Scanning Probe Microscope" Technical Digest of the Transducere'99. 10(印刷中). (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] K.Fukatsu,T.Murakoshi and M.Esashi: "Electrostatically Levitated Micro Motor for Inertia Measurement System" Technical Digest of the Transducere'99. 10(印刷中). (1999)

    • Related Report
      1998 Annual Research Report

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Published: 1998-04-01   Modified: 2016-04-21  

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