| Project/Area Number |
10308022
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Nuclear engineering
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| Research Institution | The University of Tokyo |
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Principal Investigator |
NAKAZAWA Masanaru Graduate School of Engineering, The University of Tokyo, Professor, 大学院・工学系研究科, 教授 (00010976)
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| Co-Investigator(Kenkyū-buntansha) |
FUKUDA Daiji Graduate School of Engineering, The University of Tokyo, Research Associate, 大学院・工学系研究科, 助手 (90312991)
KAWARABAYASHI Jun Nagoya University, Graduate School of Engineering, Research Associate, 大学院・工学研究科, 助手 (80283414)
TAKAHASHI Hiroyuki Research into Artifacts Center for Engineering, The University of Tokyo, Associate Prof., 人工物工学研究センター, 助教授 (70216753)
高田 英治 東京大学, 大学院・工学系研究科, 助手 (00270885)
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| Project Period (FY) |
1998 – 2000
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| Project Status |
Completed (Fiscal Year 2001)
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| Budget Amount *help |
¥34,900,000 (Direct Cost: ¥34,900,000)
Fiscal Year 2000: ¥2,100,000 (Direct Cost: ¥2,100,000)
Fiscal Year 1999: ¥2,600,000 (Direct Cost: ¥2,600,000)
Fiscal Year 1998: ¥30,200,000 (Direct Cost: ¥30,200,000)
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| Keywords | photon / ion beam / charged particle / X-ray / secondary electron emission / synchrotron radiation / MSGC / HPD / DLC |
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| Research Abstract |
Accuracy in microfabrication with electron beam or focused ion beam reaches around 10nm range, which is sufficient for single electron devices or observation of atomic scale phenomena. In this research, we have aimed at a high resolution position-sesitive detectors based on a hybrid principle using the gas proportional detector (MSGC) and the secondary electron emission. After a series of experiments on an electron acceleration and penetration system through a thin SiN membrane of 0.1um thick, the hybrid concept using the electron transmission and the secondary amplification was found to be possible in spite of 〜3keV energy loss in the membrane. For the MSGC used for the hybrid detector, we have also proposed a new multi-grid type electrode pattern. This special patterned MSGC enables a high multiplication gain and high position resolution at the same time. Observed energy resolution was 14% (FWHM) for 5.9keV X-rays. The detector can be operated up to 106 cps/mm^2 and long-term stability was also investigated and found to be very stable. A gas gain of 10^4 has been successfully achieved for a detector of 400 um anode pitch.
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