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Development of a high resolution gas hybrid detector for photons and charged particles using micromachining technique

Research Project

Project/Area Number 10308022
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Nuclear engineering
Research InstitutionThe University of Tokyo

Principal Investigator

NAKAZAWA Masanaru  Graduate School of Engineering, The University of Tokyo, Professor, 大学院・工学系研究科, 教授 (00010976)

Co-Investigator(Kenkyū-buntansha) FUKUDA Daiji  Graduate School of Engineering, The University of Tokyo, Research Associate, 大学院・工学系研究科, 助手 (90312991)
KAWARABAYASHI Jun  Nagoya University, Graduate School of Engineering, Research Associate, 大学院・工学研究科, 助手 (80283414)
TAKAHASHI Hiroyuki  Research into Artifacts Center for Engineering, The University of Tokyo, Associate Prof., 人工物工学研究センター, 助教授 (70216753)
高田 英治  東京大学, 大学院・工学系研究科, 助手 (00270885)
Project Period (FY) 1998 – 2000
Project Status Completed (Fiscal Year 2001)
Budget Amount *help
¥34,900,000 (Direct Cost: ¥34,900,000)
Fiscal Year 2000: ¥2,100,000 (Direct Cost: ¥2,100,000)
Fiscal Year 1999: ¥2,600,000 (Direct Cost: ¥2,600,000)
Fiscal Year 1998: ¥30,200,000 (Direct Cost: ¥30,200,000)
Keywordsphoton / ion beam / charged particle / X-ray / secondary electron emission / synchrotron radiation / MSGC / HPD / DLC
Research Abstract

Accuracy in microfabrication with electron beam or focused ion beam reaches around 10nm range, which is sufficient for single electron devices or observation of atomic scale phenomena. In this research, we have aimed at a high resolution position-sesitive detectors based on a hybrid principle using the gas proportional detector (MSGC) and the secondary electron emission. After a series of experiments on an electron acceleration and penetration system through a thin SiN membrane of 0.1um thick, the hybrid concept using the electron transmission and the secondary amplification was found to be possible in spite of 〜3keV energy loss in the membrane. For the MSGC used for the hybrid detector, we have also proposed a new multi-grid type electrode pattern. This special patterned MSGC enables a high multiplication gain and high position resolution at the same time. Observed energy resolution was 14% (FWHM) for 5.9keV X-rays. The detector can be operated up to 106 cps/mm^2 and long-term stability was also investigated and found to be very stable. A gas gain of 10^4 has been successfully achieved for a detector of 400 um anode pitch.

Report

(4 results)
  • 2001 Final Research Report Summary
  • 2000 Annual Research Report
  • 1999 Annual Research Report
  • 1998 Annual Research Report
  • Research Products

    (20 results)

All Other

All Publications (20 results)

  • [Publications] M.Inoue, D.Fukuda, H.Takahashi, M.Nakazawa, J.Kawarabayashi, Y.Hirata, T.Numazawa, T.Haga: "Development of new position sensitive electron multiplication device fabricated by LIGA process"Microsystem technologies. 6,3. 90-93 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Takahashi, K.Mori, K.Yokoi, D.Fukuda, M.Nakazawa, K.Hasegawa: "Development of a new multi-grid-type microstrip gas chamber"Nuclear Instruments and Methods in Physics Research A. A477,1-3. 13-16 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Takahashi, T.Watanabe, D.Fukuda, K.Mori, A.Kimura, E.Takada, M.Nakazawa: "Position readout of MSGC by position encoding into signal pulses"IEEE Transactions on Nuclear Science. 47,6. 2003-2006 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Takahashi, K.Yokoi, K.Yano, D.Fukuda, M.Nakazawa, K.Hasegawa: "Development of a multi-grid type MSGC with pad readout"Nuclear Instruments and Methods in Physics Research A. A471,1-2. 120-124 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] D.Fukuda, M.Inoue, H.Takahashi, M.Nakazawa, J.Kawarabayashi, Y.Hirata, T.Numazawa, T.Haga: "Development of a micro-array-type electron multiplier"Nuclear Instruments and Methods in Physics Research A. A436,1-2. 196-200 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] J.Kawarabayashi, D.Fukuda, H.Takahashi, et al.: "Development of a micro array type photomultiplier"IEEE Transactions on Nuclear Science. 45,3. 568-571 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Takahashi, K.Yokoi, K.Yano, D.Fukuda, M.Nakazawa, et al.: "Development of a multi-grid-type microstrip gas chamber"IEEE Transactions on Nuclear Science. 48,6. 2317-2320 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M. Inoue, D. Fukuda, H. Takahashi, M. Nakazawa, J. Kawarabayashi, Y. Hirata, T. Numazawa, T. Haga: "Development of new position sensitive electron multiplication device fabricated by LIGA process"Microsystem technologies. 6, No. 3. 90-93 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Takahashi, K. Yokoi, K. Yano, D. Fukuda, M. Nakazawa, K. Hasegawa: "Development of a new multi-grid type Microstrip gas chamber"Nucl. Instr. and Meth.. A471, No. 1-3. 13-16 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Takahashi, T. Watanabe, D. Fukuda, K. Mori, A. Kimura, E. Takada, M. Nakazawa: "Position readout of MSGC by position encoding into signal pulses"IEEE Trans. on Nucl. Sci.. NS-47, No. 6. 2003-2006 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Takahashi, K. Yokoi, K. Yano, D. Fukuda, M. Nakazawa, K. Hasegawa: "Development of a multi-grid type MSGC with pad readout"Nucl. Instr. and Meth.. A471, No. 1-2. 120-124 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] D. Fukuda. M. Inoue. H. Takahashi, M. Nakazawa, J. Kawarabayashi, Y. Hirata, T. Numazawa, T. Haga: "Development of a micro-array-type electron multiplier"Nucl. Instr. and Meth.. A436, No. 1-2. 196-200 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] J. Kawarabavashi, D. Fukuda, H. Takahashi, T. Iguchi, M. Nakazawa, A. Takahashi, R. Tokue, Y. Hirata, T. Numazawa: "Development of a micro array type photomultiplier"IEEE Trans. on Nucl. Sci.. NS-45, No. 3. 568-571 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Takahashi, K. Yokoi, K. Yano, D. Fukuda, M. Nakazawa, et al.: "Development of a multi-grd-type microstrip gas chamber"IEEE Trans. on Nucl. Sci.. NS-48, No. 6. 2317-2320 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.Inoue,D.Fukuda,H.Takahashi,M.Nakazawa,J.Kawarabayashi,Y.Hirata,T.Numazawa,T.Haga: "Development of new position sensitive electron multiplication device fabricated by LIGA process"Microsystem technologies. 6,No.3. 90-93 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] H.Takahashi,K.Mori,K.Yokoi,D.Fukuda,M.Nakazawa,K.Hasegawa: "Development of a new multi-grid type microstrip gas chamber"Nuclear Instruments and Methods in Physics Research A.

    • Related Report
      2000 Annual Research Report
  • [Publications] H.Takahashi,T.Watanabe,D.Fukuda,K.Mori,A.Kimura,E.Takada,M.Nakazawa: "Position readout of MSGC by position encoding into signal pulses"IEEE Transactions on Nuclear Science. 47,No.6. 2003-2006 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] H.Takahashi,K.Yokoi,K.Yano,D.Fukuda,M.Nakazawa,K.Hasegawa: "Development of a multi-grid type MSGC with pad readout"Nuclear Instruments and Methods in Physics Research A.

    • Related Report
      2000 Annual Research Report
  • [Publications] J. Kawarabayashi: "Development of a micro array type photomultiplier"IEEE Trans. Nucl. Sci.. NS-45. 568-571 (1998)

    • Related Report
      1999 Annual Research Report
  • [Publications] D. Fukuda: "Development of a micro-array-type electron multiplier"Nucl. Instr. and Meth. In Phys. Res. A. 436. 196-200 (1999)

    • Related Report
      1999 Annual Research Report

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Published: 1998-04-01   Modified: 2016-04-21  

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