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Studies on optical nondestructive detection methods of small crystal defects in the next generation of silicon wafers

Research Project

Project/Area Number 10450008
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionKyoto Institute of Technology

Principal Investigator

YAMADA Masayoshi  Kyoto Institute of Technology, Department of Electronics and information Science, Professor, 工芸学部, 教授 (70029320)

Co-Investigator(Kenkyū-buntansha) FUKUZAWA Masayuki  Kyoto Institute of Technology, Department of Electronics and information Science, Research Associate, 工芸学部, 助手 (60293990)
Project Period (FY) 1998 – 2001
Project Status Completed (Fiscal Year 2001)
Budget Amount *help
¥5,900,000 (Direct Cost: ¥5,900,000)
Fiscal Year 2001: ¥1,200,000 (Direct Cost: ¥1,200,000)
Fiscal Year 2000: ¥1,200,000 (Direct Cost: ¥1,200,000)
Fiscal Year 1999: ¥3,500,000 (Direct Cost: ¥3,500,000)
Keywordssilicon / nondestructive characterization / crystal defects / birefringence / infrared photoelasticity / 画像処理 / 赤外偏光顕微鏡
Research Abstract

This research has been done to develop optical nondestructive methods with high-sensitivity for detecting small crystal defects in the next generation of silicon substrates, which is one of the most important issues to be solved for electronics industries, and the following research results have been obtained ;
(1) In order to observe residual strains and crystal defects in SOI which is a promising substrate for the next generation of high-speed LSI, a reflection type of infrared polariscope has been developed to detect a small amount of birefringence induced by strains and defects when the probing light is propagating through the silicon layer and also reflecting back from the interface between silicon layer and insulator. By using this instrument developed here, we found that the residual strains and defects caused by lattice mismatching in SOS, which was one of SOI, were reduced by laser annealing. In this way, we demonstrated the usefulness of the reflection type of polariscope deve … More loped here.
(2) A high-sensitivity scanning system for detecting infrared birefringence in silicon wafers has been developed by improving the scanning infrared polariscope which was developed for the qualitaive characterization of residual strains in compound semiconductors. By using this system, we observed defect-induced birefringence due to slip lines, OSF, and etc., (b) process-induced birefringence caused near the holding region during thermal treatment, (c) a small amount of birefringence induced by the weight of silicon wafer itself. In this way, we demonstrated the usefulness of the high-sensitivity scanning system for detecting infrared birefringence in silicon wafers.
(3) We have tried to measure birefringence in dislocation-free silicon ingot by improving the high-sensitivity birefringence detecting system. We found that there is a small amount of optical anisotropy induced by an interaction between light wave and local electric field in silicon although it was considered to be optically isotropic by a classical optic theory. This optical anisotropy was observed when the light wave was propagating along the crystallo graphic <110> direction. Furthermore, we found a extremely small amount of birefringence relating probably to spatial distribution of point defects when we introduced the light wave along the <100> direction that the optical anisotropy was not active. This is indicative of a possibility that we may characterize the distribution of point defects, which is recognized up to now to be very difficult. Less

Report

(5 results)
  • 2001 Annual Research Report   Final Research Report Summary
  • 2000 Annual Research Report
  • 1999 Annual Research Report
  • 1998 Annual Research Report
  • Research Products

    (13 results)

All Other

All Publications (13 results)

  • [Publications] Masayoshi Yamada, Tao Chu: "Microscopic observation of strain induced in heteroepitaxial layers with reflection type of infrared polariscope"Journal of Crystal Growth. 210. 102-106 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.Fukuzawa, M.Yamada: "Photoelastic characterization of Si wafrers by scanning infrared polariscope"Journal of Crystal Growth. 229. 22-25 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] T.Chu, M.Yamada, J.Donecker, M.Rossberg, V.Alex, H.Rieman: "Optical anisotropy and strain-induced birefringence in dislocation-free silicon single crystals"Materials Science & Engineering B. (in press). (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 福澤理行, 儲涛, 山田正良: "赤外光弾性法を用いた半導体ウェハ・デバイス中の歪み分布測定"日本材料学会会誌「材料」. (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Masayoshi Yamada and Tao Chu: "Microscopic observation of strain induced in heteroepitaxial layers with reflection type of infrared polariscope"Journal of Crystal Growth. 210. 102-106 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M. Fukuzawa and M. Yamada: "Photoelastic characterization of Si wafers by scanning infrared olariscope"Journal of Crystal Gtowth. 229. 22-25 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] T. Chu, M. Yamada, J. Donecker, M. Rossberg, V. Alex, and H. Rieman: "Optical anisotropy and strain-induced birefringence in dislocation-free silicon single crystals"Materials Science & Engineering B. (in press). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M. Fukuzawa, T. Chu, and M. Yamada: "Nondestructive measurement of strain distribution in semiconductor wafers and devices by a scanning infrared polariscope"Journal of JSMS (in Japanese). (in press). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 儲 涛, 山田正良: "無転位シリコン単結晶の光学異方性"第62回応用物理学会学術講演会講演予稿集. No.3. 12a-ZM-3 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] T.Chu, M.Yamada, J.Donecker, M.Rossberg, V.Alex, H.Rieman: "Optical anisotropy and strain-induced birefringence in dislocation-free silicon single crystals"Materials Science & Engineering B. (in press). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] 福澤理行, 儲涛, 山田正良: "赤外光弾性法を用いた半導体ウェハ・デバイス中の歪み分布測定"日本材料学会会誌「材料」. 特集号 半導体エレクトロニクス(印刷中). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.Fukuzawa,M.Yamada: "Photoelastic characterization of Si wafers by scanning infrared polariscope"Journal of Crystal Growth. (印刷中). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] Masayoshi Yamada: "Microscopic observation of strain induced in heteroepitaxial layers with reflection type of infrared polariscope"Journal of Crystal Growth. 210/1-3. 102-106 (2000)

    • Related Report
      1999 Annual Research Report

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Published: 1999-04-01   Modified: 2016-04-21  

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