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Study on Compensation Control of Thermal deformation of Ultraprecision Machine Tool

Research Project

Project/Area Number 10450060
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 機械工作・生産工学
Research InstitutionKobe University

Principal Investigator

MORIWAKI Toshimichi  Kobe University, Mechanical Engineering, Professor, 工学部, 教授 (00031104)

Co-Investigator(Kenkyū-buntansha) HINO Rei  Kobe University, Mechanical Engineering, Research Associate, 工学部, 助手 (80273762)
SHIBASAKA Toshiro  Kobe University, Graduate School, Associate Professor, 大学院・自然科学研究科, 助教授 (80094530)
SHAMOTO Eiji  Kobe University, Mechanical Engineering, Associate Professor, 工学部, 助教授 (20216146)
Project Period (FY) 1998 – 1999
Project Status Completed (Fiscal Year 1999)
Budget Amount *help
¥9,600,000 (Direct Cost: ¥9,600,000)
Fiscal Year 1999: ¥4,600,000 (Direct Cost: ¥4,600,000)
Fiscal Year 1998: ¥5,000,000 (Direct Cost: ¥5,000,000)
KeywordsThermal Deformation / Ultraprecision Machine Tool / Air Spindle / Transfer Function / Convolution Integral / Compensation / Ambient Temperature / Rotational Speed / 超精密工作機 / 周囲気温 / ダイヤモンド切削加工 / インプロセス補正制御 / 誤差推定
Research Abstract

The objectives of this research have been successfully attained after two years of research. The major research results obtained are as follows ;
Thermal behavior of the main air spindle system of an ultraprecision machine tool is analyzed experimentally. Influences of the heat generated due to the spindle rotation and the temperature variation of the ambient air are considered. It is found that the thermal deformation due to the ambient temperature change increases with an increase in the rotational speed, which is considered to be caused by an increase in the heart transfer. The transfer functions between the rotational speed of spindle and the thermal deformation and between the ambient temperature and the thermal deformation are obtained separately. A simple method to estimate and compensate the thermal deformation is proposed by utilizing the measured transfer functions and the convolution integral, and machining errors due to the above two heat sources are successfully reduced to less than 15%.

Report

(3 results)
  • 1999 Annual Research Report   Final Research Report Summary
  • 1998 Annual Research Report
  • Research Products

    (44 results)

All Other

All Publications (44 results)

  • [Publications] Eiji Shamoto: "Ultraprecision 6-Axis Table Driven by Means of Walking Drive"Annals of the CIRP. Vol. 49/1. to be published (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 社本 英二: "超音波楕円振動切削加工法による超精密微細金型加工"1999年度精密工学会秋季大会学術講演会講演論文集. 182 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Eiji Shamoto: "Ultraprecision Diamond Cutting of Hardened Steel by Applying Elliptical Vibration Cutting"Annals of the CIRP. Vol. 48/1. 441-444 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Eiji Shamoto: "Ultraprecision Dutile Cutting of Glass by Applying Ultrasonic elliptical Vibration Cutting"Proc. of 1st EUSPEN. 408-411 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 社本 英二: "楕円振動切削加工法(第3報)-三次元切削への適用と実用的諸効果の検討-"精密工学会誌. Vol.65. 586-591 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 社本 英二: "鋼の超精密楕円振動切削加工"日本機械学会[No.99-2]第1回生産加工・工作機械部門講演会講演論文集. 179-180 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] C. Ma: "Regenerative Chater Suppressionin Turning by Applying Ultrasonic Elliptical Vibration"Memoirs of Graduate School of Science & Technology, Kobe Univ.. No. 17-A. 47-62 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 社本 英二: "楕円振動切削加工法(第2報)-振動条件の影響に関する検討-"精密工学会誌. Vol.65. 411-417 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 社本 英二: "Walking Driveを用いた超精密XYθテーブルの開発(第1報)-3本足駆動のアルゴリズムと装置-"1999年度精密工学会春季大会学術講演会講演論文集. 110 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 社本 英二: "Walking Driveを用いた超精密XYθテーブルの開発(第2報)-2本足駆動のアルゴリズムと装置-"1999年度精密工学会春季大会学術講演会講演論文集. 111 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 社本 英二: "主軸回転数変動によるエンドミル加工時の再生型びびり振動の抑制"1999年度精密工学会春季大会学術講演会講演論文集. 207 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Toshimichi Moriwaki: "Intelligent Tool Condition Monitoring for Milling"Manufacturing Systems. Vol. 27. 327-332 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 社本 英二: "ガラスの延性モード超音波楕円振動切削加工-臨界切込み量に関する検討-"1998年度精密工学会秋季大会学術講演会講演論文集. 305 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 社本 英二: "超音波楕円振動切削加工法による鋼の微細形状加工"1998年度精密工学会秋季大会学術講演会講演論文集. 220 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 社本 英二: "電磁誘導作用を利用した面内3自由度位置センサの開発"1998年度精密工学会秋季大会学術講演会講演論文集. 525 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Toshimichi Moriwaki: "Analysis of Thermal Deformation of an Ultraprecision Air Spindle System"Annals of the CIRP. Vol. 47/1. 315-319 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Eiji Shamoto, Hirokazu Murase and Toshimichi Moriwaki: "Ultraprecision 6-Axis Table Driven by Means of Walking Drive"Annals of the CIRP. Vol.49/1(to be published). (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Eiji Shamoto and Toshimichi Moriwaki: "Ultraprecision Diamond Cutting of Hardened Steel by Applying Elliptical Vibration Cutting"Annals of the CIRP. Vol.48/1. 441-444 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Eiji Shamoto, Chun-Xiang Ma and Toshimichi Moriwaki: "Ultraprecision Ductile Cutting of Glassby Applying Ultrasonic Elliptical Vibration Cutting"Proc. of 1st EUSPEN. 408-411 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Eiji Shamoto, Chun-Xiang Ma and Toshimichi Moriwaki: "Elliptical Vibration Cutting (3rd Report, Application to Three Dimensional Cutting and Investigation of Practical Effects)"JSPE. Vol.65, No.4. 586-591 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Eiji Shamoto, Yoshiyuki Morimoto and Toshimichi Moriwaki: "Elliptical Vibration Cutting (2nd report, Study on Effects of Vibration Conditions)"JSPE. Vol.65, No.3. 411-417 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] C.Ma, E.Shamoto, B.Sattayawuthiphong, T.Moriwaki: "Regenerative Chatter Suppression in Turning by Applying Ultrasonic Elliptical Vibration"Memoirs of Graduate School of Science & Technology, Kobe Univ.. No.17-A. 47-62 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Toshimichi Moriwaki and Eiji Shamoto: "Analysis of Thermal Deformation of an Ultraprecision Air Spindle System"Annals of the CIRP. Vol.47/1. 315-319 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Toshimichi Moriwaki and Eiji Shamoto: "Intelligent Tool Condition Monitoring for Milling"Manufacturing Systems. Vol.27, No.3. 327-332 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Eiji Shamoto, Toshimichi Moriwaki, Atsushi Ura, Makoto Matsuo, Michio Osada and Masaaki Seigo: "Ultraprecision Micro Machining of Die Steel by Applying Ultrasonic Elliptical Vibration Cutting"Reprint of 1999 JSPE Autumn Conf.. 182 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Eiji Shamoto, Hirotsugu Sugawara, Akio Tsuji and Toshimichi Moriwaki: "Ultraprecision Elliptical Vibration Cuttingof Steel"Reprint of JSME Conf. [No.99/2]. 179-180 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Eiji Shamoto, Hidetaka Matsuo and Toshimichi Moriwaki: "Development of ultraprecision XYθ table by means of walking drive (1ィイD1stィエD1 report) Algorithm and device of table driven by 2 sets of actuators"Reprint of 1999 JSPE Spring Conf.. 111 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Eiji Shamoto, Yuichi Murase and Toshimichi Moriwaki: "Development of ultraprecision XYθ table by means of walking drive (1ィイD1stィエD1 report) Algorithm and device of table driven by 3 sets of actuators"Reprint of 1999 JSPE Spring Conf.. 110 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Eiji Shamoto, Toshimichi Moriwaki, Makoto Matsuo and Michio Osada: "Micro Machining of Steel by Applying Ultrasonic Elliptical Vibration Cutting"Reprint of 1998 JSPE Autumn Conf.. 220 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Eiji Shamoto, Chun-Xiang Ma and Toshimichi Moriwaki: "Ultrasonic Elliptical Vibration Cutting of Glass-Investigation of Critical Depth of Cut"Reprint of 1998 JSPE Autumn Conf.. 305 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 社本英二: "楕円振動切削加工法(第2法)-振動条件の影響に関する検討-"精密工学会誌. Vol.65,No.3. 411-417 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 社本英二: "楕円振動切削加工法(第3法)-三次元切削への適用と実用的諸効果の検討"精密工学会誌. Vol.65,No.4. 586-591 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Eiji Shamoto: "Ultraprecision Ductile Cutting of Glass by Applying Ultrasonic Elliptical Vibration Cutting"Proc.of 1st EUSPEN. 408-411 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Eiji Shamoto: "Ultraprecision Diamond Cutting of Hardened Steel by Applying Elliptical Vibration Cutting"Annals of the CIRP. Vol.48/1. 441-444 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Eiji Shamoto: "Ultraprecision 6-Axis Table Driven by Means of Walking Drive"Annals of the CIRP. Vol.49/1(to be published). (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] 社本英二: "Walking Driveを用いた超精密XYθテーブルの開発(第1報)-3本足駆動のアルゴリズムと装置-"1999年度精密工学会春季大会学術講演会講演論文集. 110 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 社本英二: "Walking Driveを用いた超精密XYθテーブルの開発(第2報)-2本足駆動のアルゴリズムと装置-"1999年度精密工学会春季大会学術講演会講演論文集. 111 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 社本英二: "主軸回転数変動によるエンドミル加工時の再生型びびり振動の抑制"1999年度精密工学会春季大会学術講演会講演論文集. 207 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 社本英二: "鋼の超精密楕円振動切削加工"日本機械学会[No.99-2]第1回生産加工・工作機械部門講演会講演論文集. 179-180 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 社本英二: "超音波楕円振動切削加工法による超精密微細金型加工"1999年度精密工学会春季大会学術講演会講演論文集. 182 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Toshimichi Moriwaki: "Analysis of Thermal Deformation of an Ultraprecision Air Spindle System" Annals of the CIRP. 47・1. 315-319 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 社本 英二: "ガラスの延性モード超音波楕円振動切削加工-臨界切込み量に関する検討" 1998年度精密工学会秋季大会学術講演会講演論文集. 305 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 社本 英二: "超音波楕円振動切削加工法による鋼の微細形状加工" 1998年度精密工学会秋季大会学術講演会講演論文集. 220 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 社本 英二: "電磁誘導作用を利用した面内3自由度位置センサの開発" 1998年度精密工学会秋季大会学術講演会講演論文集. 525 (1998)

    • Related Report
      1998 Annual Research Report

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Published: 1998-04-01   Modified: 2016-04-21  

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