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Development of New Technology for Micro-Machine Fabrication

Research Project

Project/Area Number 10450100
Research Category

Grant-in-Aid for Scientific Research (B).

Allocation TypeSingle-year Grants
Section一般
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionThe University of Tokushima

Principal Investigator

MISAWA Hiroaki  Graduate School of Engineering, The University of Tokushima, Professor, 工学研究科, 教授 (30253230)

Co-Investigator(Kenkyū-buntansha) YAMAGUCHI Akira  Satellite Venture Business Laboratory, The University of Tokushima, Assistant Professor, 非常勤研究員
SAULIUS Juodkazis  徳島大学, 工学研究科, 助手
MATSUO Shigeki  Faculty of Engineering, The University of Tokushima, Research Associate, 工学部, 助手 (20294720)
JUODKAZIS Saulius  Graduate School of Engineering, The University of Tokushima, Research Associate
Project Period (FY) 1998 – 2000
Project Status Completed (Fiscal Year 2000)
Budget Amount *help
¥13,300,000 (Direct Cost: ¥13,300,000)
Fiscal Year 2000: ¥2,100,000 (Direct Cost: ¥2,100,000)
Fiscal Year 1999: ¥4,400,000 (Direct Cost: ¥4,400,000)
Fiscal Year 1998: ¥6,800,000 (Direct Cost: ¥6,800,000)
Keywordsmicro-machine / joining in room temperature / chemical modification / high voltage / pulling experiment / PDMS / biosensor / シランカップリング処理 / ポリイオン
Research Abstract

Bonding of two substrates is key technology for development of new micro-machine. Until now, a technique to fabricate small structure have been developed and established by a lot of researchers. However, traditional joining techniques of two substrate with small structure have a lot of problem, and development of new joining technique has been hoped. In this research project, we study some joining methods in normal condition(temperature and pressure). Firstly, we tried the joining by using electrostatic force of poly-ion layer on glass slides. It was found that the joining could be achieved by applying an electrical potential above 500 V, and the joining force was 1.36 kgf cm^<-2>. Next, a polymerization reaction of silage-coupling reagent was employed for the joining of glass substrates. By spreading the silane-coupling reagent between two glass substrates, the joining could be achieved without heating and applying electrical potential and the bonding force was 5.6 kgf cm^<-2>.. Moreover, it was confirmed that this technique could be applied for construction of micro-flow-channel without leak. Last, we studied the micro-flow-channel using polydimethylsiloxane(PDMS). Micro-channel was fabricated at PDMS substrate and then the substrate was covered by glass without any reagent for joining. As a result, water flow without leak was observed and it was confirmed that this technique could be applied for micro-electrode system. Therefore, we fabricated an arrayed micro-enzyme electrode on glass substrate, and developed enzyme flow sensor using PDMS micro-channel. This sensor showed good electrochemical response for glucose and lactate with high selectivity.

Report

(4 results)
  • 2000 Annual Research Report   Final Research Report Summary
  • 1999 Annual Research Report
  • 1998 Annual Research Report
  • Research Products

    (11 results)

All Other

All Publications (11 results)

  • [Publications] 大井文香: "自己積層高分子薄膜を用いたマイクロ赤血球分離システムの開発"信学技報. 99. 67-73 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Oi, Fumika ; AOKI, Hidenori ; OHTA, Satochi ; JOKO, Shigeki ; Matsuo, Shigeki ; MISAWA, Hiroaki: "Development of micro red-corpuscle separation system using self-organized polymer film"Shingakugiho. 99. 67-73 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] I.Suzuki: "Behavior of Biradicals Generated from a Norrish Type-I Reaction of 2,2-Diphenylcycloalkanones.Chain-Length Dependence and Magnetic Field Effects"Bill.Soc.Chem.Jpn.. 72,1. 103-113 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] K.Misawa: "Photophysics and Photochemistry of a Laser Manipulated Microparticles"Progress in Polymer Science. 24,5. 665-697 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] M.Miwa: "Drag of a laser trapped micropariticle"Jpn.J.Appl.Phys.. (in press). (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] H-B.Sun: "Three-Dimensional Photonic Crystal Structures achieved with Two-Photon-Absorption Photopolymerization of Resin" Applied Physics Letters. (in press). (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] K.Fukuda: "Self-Organizing Three-Dimensional Colloidal Photomic Crystal Structure with Augmented Dielectric Contrast" Japanese Journal of Applied Physics. 37,5. L508-L511 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] M.Watanabe: "Three-Dimensional Optical Data Storage in Vitreous Silica" Japanese Journal of Applied Physics. 37,12. L1527-L1530 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] H.Ishii: "Photoelectrochemical Fabrication of Submicrometer Platinum Pattern on Titanium Dioxide Single Crystal Surface" Chemistry Letters. 1998,7. 655-656 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] S.Juodkazis: "Photoelectrochemical Submicrometer Patterning of Titanium Dioxide by Platinum" Journal of Electroanalytical Chemistry. (in press). (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] T.Takahashi: "Morphology Dependent Resonant Lasing of a Dye-doped Microsphere Prepared by Nonlinear Optical Material" Thin Solid Films. 331,1-2. 298-302 (1998)

    • Related Report
      1998 Annual Research Report

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Published: 1998-04-01   Modified: 2016-04-21  

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