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The preparation of a surface acoustic wave assist thin film phase grating and the application to the ultra micro optical system.

Research Project

Project/Area Number 10450116
Research Category

Grant-in-Aid for Scientific Research (B).

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionYAMANASHI UNIVERSITY

Principal Investigator

NAKAGAWA Yasuhiko  FACULTY OF ENGINEERING, YAMANASHI UNIVERSITY PROFESSOR, 工学部, 教授 (50006277)

Co-Investigator(Kenkyū-buntansha) KAKIO Shoji  FACULTY OF ENGINEERING, YAMANASHI UNIVERSITY ASSOCIATE RESERCHER, 工学部, 助手 (70242617)
Project Period (FY) 1998 – 2000
Project Status Completed (Fiscal Year 2000)
Budget Amount *help
¥7,400,000 (Direct Cost: ¥7,400,000)
Fiscal Year 2000: ¥2,300,000 (Direct Cost: ¥2,300,000)
Fiscal Year 1999: ¥2,000,000 (Direct Cost: ¥2,000,000)
Fiscal Year 1998: ¥3,100,000 (Direct Cost: ¥3,100,000)
Keywordsphase grating / surface acoustic wave / microlens / tantalum pentoxide single crystal / acousto-optic effect / linear type rapid thermal annealing / Ta_2O_5薄膜 / SAWアシスト法 / Tα_5O_5薄膜 / 2次元位相格子 / 光弾性定数
Research Abstract

Results got by this study are as follows.
(1) The discovery of the phenomenon of which the photoelasticity is emphasized.
Physical property such as photoelastic constant, film thickness, refractive index increases, when surface acoustic wave standing wave is beforehand excited in thin film preparation by sputtering technique. As the result, the efficiency of the optical modulator of the Bragg diffraction system increased at about 6 times.
(2) The proposal of way of making of a thin film phase grating by the surface acoustic wave assist.
A thin film phase grating is easily formed, when a thin film is established, while surface acoustic wave standing wave is beforehand excited on the substrate. The change of the film thickness is about 1.78% The refractive index variation is about 12.5% It is very big. Dielectric constant of the substrate surface changes by the external electric field of surface acoustic wave in period period of standing wave, and the difference occurs by it in the molecular … More adhesion. The spatial variation occurs at film thickness and refractive index as a result.
(3) Preparation and application of the two-dimensional phase grating.
Using orthogonalizing surface acoustic wave standing wave, the two-dimensional phase grating was made. Very accurately placed dot is formed, and the ideal lattice can be easily formed. One piece became an ideal thin film lens, and the application possibility to the ultra microlens was obtained.
(4) The proposal of light polarization control element which effectively utilized the surface acoustic wave power.
High-efficient light tunable filter was proposed. The frequency band is about 0.5MHz. It is available for the light multiplex communication. In addition, it was shown that it was improved at the efficiency, if the Lamb wave is excited in order to increase the overlap area of light wave and surface acoustic wave.
(5) The preparation of the Ta_<>O_5 single crystal thin film by linear type rapid thermal annealing.
It was shown that it proposed linear type rapid thermal annealing and can also make single crystal thin film in the isotropic substrate. Using this, it succeeded in the preparation of the Ta_2O_5 single crystal thin film. Made Ta_2O_5 thin film shows large birefringence. It was shown to be applicable for new function optical device such as memory and optical switching, because it was a ferroelastic and ferroelectric thin film. Less

Report

(4 results)
  • 2000 Annual Research Report   Final Research Report Summary
  • 1999 Annual Research Report
  • 1998 Annual Research Report
  • Research Products

    (24 results)

All Other

All Publications (24 results)

  • [Publications] Y.Nakagawa: "Enhancement of photoelastic constant of optical thin film waveguide assisted by SAW"Ultrasonics. 38. 590-593 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 中川恭彦: "Ta_2O_5圧電性単結晶薄膜の作成とそのSAWデバイスへの応用"2000年先端技術シンポジウム(圧電材料と弾性波デバイス). 147-153 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 中川恭彦: "弾性表面波による光弾性強調現象とその光変調素子への応用"電子情報通信学会. J82-C. 749-756 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Y.Nakagawa: "Fabrication of a Thin Film Phase Grating Assisted by Surface Acoustic Waves"Electronics and Communications in Japan. 82. 26-33 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 中川恭彦: "弾性表面波による薄膜位相格子の作成"電子情報通信学会. J80-A. 1782-1787 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Y.Nakagawa: "Fabrication of a Thin Film Phase Grating Assisted by Surface Acoustic Waves"Jpn.J.Appl.Phys.. 36. 3119-3120 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 中川恭彦: "電磁気学"科学技術出版. 250 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Yasuhiko Nakagawa: "Enhancement of photo-elastic constant of optical thin film wave-guide assisted by surface acoustic wave."Ultrasonics. Vol.38. 590-593 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Yasuhiko Nakagawa: "Preparation of the Ta_2O_5 piezoelectricity single crystal thin film and application to the SAW device."The advanced technology symposium 2000 (piezoelectric material and acoustic wave device). 147-153 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Yasuhiko Nakagawa: "Photoelasticity stress phenomenon by the surface acoustic wave and application to the optical modulator."Institute of Electronics, Information and Communication Engineering. Vol.J82-C. 749-756 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Yasuhiko Nakagawa: "Fabrication of a Thin Film Phase Grating Assisted by Surface Acoustic Waves."Electronics and Communication in Japan. Vol.82. 26-33 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Yasuhiko Nakagawa: "Fabrication of a Thin Film Phase Grating Assisted by Surface Acoustic Waves."Institute of Electronics, Information and Communication Engineering. Vol.J80-A. 1782-1787 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Yasuhiko Nakagawa: "Fabrication of a Thin Film Phase Grating Assisted by Surface Acoustic Waves."Japan Journal Applied Physics. Vol.36. 3119-3120 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Y.Nakagawa,M.Yawata,Kakio: "Enhancement of photoelastic constant of optical thin film waveguide assisted by SAW"Ultrasonics. 38. 590-593 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 中川恭彦: "Ta_2O_5圧電性単結晶薄膜の作成とそのSAWデバイスへの応用"2000年先端技術シンポジウム(圧電材料と弾性波デバイス). 147-153 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Y.Nakagawa,M.Watanabe,M.Yawata,S.Kakio: "Fabrication of a Thin Film Phase Grating Assisted by Surface Acoustic Waves"Electronics and Communications in Japan. 82. 26-33 (1999)

    • Related Report
      2000 Annual Research Report
  • [Publications] 中川恭彦,八幡充洋,垣尾省司: "弾性表面波による光弾性強調現象とその光変調素子への応用"電子情報通信学会論文誌. J82-C-I. 749-758 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Y.Nakagawa: "Dependence on waveguide width of elastic convolver efficiency"16th International Congress on Acoustics. 4pPAc6. 2303-2304 (1998)

    • Related Report
      1999 Annual Research Report
  • [Publications] 中川恭彦,渡辺昌彦,垣尾省司: "弾性表面波アシストによる薄膜位相格子の作成"電子情報通信学会論文誌. J80-A. 1782-178* (1997)

    • Related Report
      1999 Annual Research Report
  • [Publications] Y.Nakagawa, M.Yawata, S.Kakio: "Fabrication of Thin-Film Grating by Surface Acoustic Wave"Jpn. J. Appl. Phys.. 9B. 3119-3120 (1997)

    • Related Report
      1999 Annual Research Report
  • [Publications] 中川恭彦: "電磁磁気学"科学技術出版. 250 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Y.Nakagawa: "Dependence on waveguide width of elastic convolver efficiency" 16th International Congress on Acoustics. 4pPAb6. (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 中川恭彦,渡辺昌彦,八幡充洋,垣尾省司: "弾性表面波アシストによる薄膜位相格子の作成" 電子情報通信学会論文誌. J80-A. 1782-1787 (1997)

    • Related Report
      1998 Annual Research Report
  • [Publications] Y.Nakagawa, M.Yawata, S.Kakio: "Fabrication of Thin-Film Garting Using Surface Acoustic Wave" Jpn.J.Appl.Phys.9B. 3119-3120 (1997)

    • Related Report
      1998 Annual Research Report

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Published: 1998-04-01   Modified: 2016-04-21  

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