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Development of bio-mimetic sensor fusion system for detecting temperature and breath for rescue microrobots

Research Project

Project/Area Number 10450155
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Measurement engineering
Research InstitutionHOKKAIDO UNIVERSITY

Principal Investigator

MAKINO Eiji  Hokkaido Univ., Grad. School of Eng., Asso. Pro., 大学院・工学研究科, 助教授 (70109495)

Co-Investigator(Kenkyū-buntansha) SHIBATA Takayuki  Hokkaido Univ., Grad. School of Eng., Inst., 大学院・工学研究科, 助手 (10235575)
Project Period (FY) 1998 – 1999
Project Status Completed (Fiscal Year 1999)
Budget Amount *help
¥13,400,000 (Direct Cost: ¥13,400,000)
Fiscal Year 1999: ¥3,200,000 (Direct Cost: ¥3,200,000)
Fiscal Year 1998: ¥10,200,000 (Direct Cost: ¥10,200,000)
KeywordsRescue microrobot / Carbon dioxide sensor / Infrared thermal sensor / Pyroelectric thin film
Research Abstract

A quartz crystal balance sensor for detecting carbon dioxide in breath was fabricated using an organic amine compound film as a reactive material with carbon dioxide molecules. It was evaluated with a fabricated standard gas supplying system. The sensor was capable to detect low carbon dioxide concentration gas of 0.04 to 4%, as well as showing a high signal resolution under these concentration region. A reaction speed of the sensor was less than 5min.
A typical pyroelectric thin film of PZT for an infrared sensor for detecting temperature was fabricated by sputtering. In order to obtain a perovskite structure of PZT, it was found that temperature rise rate of over 10℃/s for annealing at any ambient gas conditions such as oxygen, nitrogen or atmosphere was key condition, independent of any deposition condition such as a substrate temperature. Effects of deposition conditions on a pyroelectric coefficient of the deposited PZT thin film was studied. Patterning of deposited PZT thin film was capable to perform by reactive ion etching in SFィイD26ィエD2 gas.
An electrochemical photoetching technique for fabricating shadow masks was developed for evaporation and sputtering of functional thin films. A micromachining technique for ceramic substrates for infrared sensors was developed using photoetching process in a high temperature phosphoric acid. A micro flow sensor for detecting breath flow was fabricated with a structure of three platinum thin film cantilevers (20μm in width and 1mm in length) used as a heater and two thermal sensors.

Report

(3 results)
  • 1999 Annual Research Report   Final Research Report Summary
  • 1998 Annual Research Report
  • Research Products

    (26 results)

All Other

All Publications (26 results)

  • [Publications] 牧野英司: "高温リン酸によるファインセラミックスのフォトエッチングのためのポリイミドレジスト"表面技術. 49. 637-642 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] E.Makino: "Micromachining compatible metal patterning technique using localized decomposition of organometallic compound by laser irradiation"Journal of Micromechanics and Microengineering. 8. 177-181 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] E.Makino: "Patterning and bonding of TiNi shape memory thin film for fabrication of micropump"Proc.SPIE, Design, Test, and Microfabrication of MEMS. 3680. 1030-1037 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] E.Makino: "Micromachining of fine ceramics by photolithography"Sensors and Actuators A. A75/3. 278-288 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 牧野英司: "電解フォトエッチングによる金属基板上の微細パターン形成"表面技術. 50. 637-642 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] E.Makino: "Fabrication of TiNi shape memory actuator for micropump"Proc.SPIE, Electronics and Structures for MEMS. 3891. 328-335 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 牧野英司: "セラミックスのフォトエッチングのための環化ポリブタジエンレジスト膜の形成条件"表面技術. 49. 775-780 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 牧野英司: "パラジウム薄膜パターンのレーザ描画における基板材料および酢酸パラジウム塗布膜厚の影響"表面技術. 49. 1010-1015 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 牧野英司: "金有機化合物のレーザ熱分解によるグレーズドアルミナ基板上の配線パターン形成"表面技術. 50. 933-938 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 牧野英司: "レーザ無電解ニッケルめっきによるポリイミド基板上のマスクレスパターン形成"表面技術. 51. 199-205 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] E. Makino, T. Shibata, and Y. Yamada: "Polyimide resist for photoetching of fine ceramics in hot phosphoric acid (in Japanese)"J. Surf. Finlsh. Soc. Japn.. 49,6. 637-642 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] E. Makino, T. Shibata, and Y. Yamada: "Formation of cyclized polybutadine resist film for ceramic photoetching (in Japanese)"J. Surf. Finlsh. Soc. Japn.. 49,7. 775-780 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] E. Makino, T. Shibata, and Y. Hayakawa: "Effects of substrate material and palladium acetate film thickness on laser writing of palladium patterns (in Japanese)"J. Surf. Finlsh. Soc. Japn.. 49,9. 1010-1015 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] E. Makino and T. Shibata: "Micromachining compatible metal patterning techniqueusing localized decomposition of organometallic compound by laser irradiation"J. Micromech. Microeng.. 8,3. 177-181 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] E. Makino, T. Mitsuya, T. Nakatsuji, and T. Shibata: "Patterning and bonding of TiNi shape memory thin film for fabrication of micropump"Proc. Conf. Design, Test, and Microfabrication of MEMS. vol.3680. 1030-1037 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] E. Makino. T. Shibata, and Y. Yamada: "Micromachining of fine ceramics by photolithograph"Sensors and Actuators. A75/3. 278-288 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] E. Makino, T. Yamashita, and T. Shibata: "Fine pattern evolution on metal sheets using electrolytic photochemical machining (in Japanese)"J. Surf. Finish. Soc. Japn. 50,7. 637-642 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] E. Makino, A. Nakamura, and T. Shibata: "Gold line patterning on glazed alumina substrateusing laser decomposition of metalorganic compound (in Japanese)"J. Surf. Finish. Soc. Japn. 50,10. 933-938 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] E. Makino, T. Mitsuya, and T. Shibata: "Fabrication of TiNi shape memory actuator for micropump"Proc. SPIE, Electronics and Structures of MEMS. vol.3891. 328-335 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] E. Makino, O. Takagi, T. Shibata: "Maskless metal patterning on polyimide substrate using laser-enhanced electroless nickel plating (in Japanese)"J. Surf. Finish Soc. Japn.. 51,2. 199-205 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] E. Makino: "Patterning and bonding of TiNi shape memory thin film for fabrication of micropump"Proc. SPIE, Design, Test, and Microfabrication of MEMS. 3680. 1030-1037 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] E. Makino: "Micromachining of fine ceramics by photolithography"Sensors and Actuators A. A75/3. 278-288 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 牧野英司: "電解フォトエッチングによる金属基板上の微細パターン形成"表面技術. 50. 637-642 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 牧野英司: "金有機化合物のレーザ熱分解によるグレーズアルミナ基板上の配線パターン形成"表面技術. 50. 933-938 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] E. Makino: "Fabrication of TiNi shape memory actuator for micropump"Proc. SPIE, Electronics and Structures for MEMS. 3891. 328-335 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 牧野英司: "レーザー無電解ニッケルめっきによるポリイミド基板上のマスクレスパターン形成"表面技術. 51. 199-205 (2000)

    • Related Report
      1999 Annual Research Report

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Published: 1998-04-01   Modified: 2016-04-21  

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