Development of bio-mimetic sensor fusion system for detecting temperature and breath for rescue microrobots
| Project/Area Number |
10450155
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Measurement engineering
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| Research Institution | HOKKAIDO UNIVERSITY |
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Principal Investigator |
MAKINO Eiji Hokkaido Univ., Grad. School of Eng., Asso. Pro., 大学院・工学研究科, 助教授 (70109495)
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| Co-Investigator(Kenkyū-buntansha) |
SHIBATA Takayuki Hokkaido Univ., Grad. School of Eng., Inst., 大学院・工学研究科, 助手 (10235575)
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| Project Period (FY) |
1998 – 1999
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| Project Status |
Completed (Fiscal Year 1999)
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| Budget Amount *help |
¥13,400,000 (Direct Cost: ¥13,400,000)
Fiscal Year 1999: ¥3,200,000 (Direct Cost: ¥3,200,000)
Fiscal Year 1998: ¥10,200,000 (Direct Cost: ¥10,200,000)
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| Keywords | Rescue microrobot / Carbon dioxide sensor / Infrared thermal sensor / Pyroelectric thin film |
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| Research Abstract |
A quartz crystal balance sensor for detecting carbon dioxide in breath was fabricated using an organic amine compound film as a reactive material with carbon dioxide molecules. It was evaluated with a fabricated standard gas supplying system. The sensor was capable to detect low carbon dioxide concentration gas of 0.04 to 4%, as well as showing a high signal resolution under these concentration region. A reaction speed of the sensor was less than 5min.
A typical pyroelectric thin film of PZT for an infrared sensor for detecting temperature was fabricated by sputtering. In order to obtain a perovskite structure of PZT, it was found that temperature rise rate of over 10℃/s for annealing at any ambient gas conditions such as oxygen, nitrogen or atmosphere was key condition, independent of any deposition condition such as a substrate temperature. Effects of deposition conditions on a pyroelectric coefficient of the deposited PZT thin film was studied. Patterning of deposited PZT thin film was capable to perform by reactive ion etching in SFィイD26ィエD2 gas.
An electrochemical photoetching technique for fabricating shadow masks was developed for evaporation and sputtering of functional thin films. A micromachining technique for ceramic substrates for infrared sensors was developed using photoetching process in a high temperature phosphoric acid. A micro flow sensor for detecting breath flow was fabricated with a structure of three platinum thin film cantilevers (20μm in width and 1mm in length) used as a heater and two thermal sensors.
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Report
(3 results)
Research Products
(26 results)
