| Project/Area Number |
10450159
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Measurement engineering
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| Research Institution | Nagoya University |
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Principal Investigator |
YASUNAGA Mitsuya Nagoya University, Micro System Engineering, Professor, 工学研究科, 教授 (10200065)
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| Co-Investigator(Kenkyū-buntansha) |
OHSHIMA Yasuji Nagoya University, Micro System Engineering, Assistant Professor, 工学研究科, 助手 (60293651)
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| Project Period (FY) |
1998 – 1999
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| Project Status |
Completed (Fiscal Year 1999)
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| Budget Amount *help |
¥7,200,000 (Direct Cost: ¥7,200,000)
Fiscal Year 1999: ¥2,700,000 (Direct Cost: ¥2,700,000)
Fiscal Year 1998: ¥4,500,000 (Direct Cost: ¥4,500,000)
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| Keywords | Laser applying measurement / Michelson interferometry / Fringe pattern / Active sensing / Head disk interface / Ridgeline extraction / Flying head / Spacing measurement / PSD |
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| Research Abstract |
A novel method for measuring head-to-disk spacing was established using the fringe patterns formed over slider and disk surfaces simultaneously based on the Michelson Laser interferometry. Experimental procedure to form clear fringe patterns by adjusting the optical system, two kinds of fringe fixing techniques to cancel background noise, ridge line extraction with high reproducibility by suppressing image noise, correction of the phase shift based on multibeam reflection on a stratified surface were successfully introduced. The present method was experimentally confirmed to be useful as an in-situ measurement using an actual head and desk and an absolute spacing measurement with no necessity of calibration using a glass disk which replaces the actual disk.
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