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Direct Measurements of Kink Diffusion Barrier Height by Plan-view High Resolution Electron Microscopy

Research Project

Project/Area Number 10450230
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Physical properties of metals
Research InstitutionTHE UNIVERSITY OF TOKYO

Principal Investigator

MAEDA Koji  The Univ. of Tokyo, Dept. of Applied Physics, Professor, 大学院・工学系研究科, 教授 (10107443)

Co-Investigator(Kenkyū-buntansha) SUZUKI Kunio  Nagasaki Univ., Dept. of Mater. Sci., Associate Professor, 工学部, 助教授 (50107439)
MERA Yutaka  The Univ. of Tokyo, Dept. of Applied Physics, Research Associate, 大学院・工学系研究科, 助手 (40219960)
Project Period (FY) 1998 – 1999
Project Status Completed (Fiscal Year 1999)
Budget Amount *help
¥14,300,000 (Direct Cost: ¥14,300,000)
Fiscal Year 1999: ¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 1998: ¥13,600,000 (Direct Cost: ¥13,600,000)
KeywordsHigh Resolution Electron Microscopy / Semiconductor / Dislocation / Lattice Image / Kink / Radiation Enhanced Dislocation Glide / Peierls Mechanism / Image Processing / Ge / GaN / 電子顕微鏡 / 高分解能 / 欠陥 / 電子励起
Research Abstract

One of the aims of this Project is to develop an image-processing scheme to extract from a high resolution electron microscopic (HREM) plan-view image of a dislocation in semiconductor the line shape of the partial dislocations with a resolution far higher than the conventional weak beam technique. With this novel technique, we investigate the kink motion along a dislocation line and tried to deduce the kink migration energy, which is one of the fundamental parameters in dislocation glide motion in semiconductors. Experiments done for Ge and GaAs revealed that the migration of kinks on 30° partial dislocations is enhanced by electronic excitation induced by electron beam irradiation used for microscopic observations. For Ge, the kink migration energy under electronic excitation wag measured to be about 0.75 eV. Although not by HREM observations, effects of electron irradiation on dislocation glides in hexagonal GaN single crystals were also investigated. It was found that the mobility of basal dislocations and edge dislocations on a pyramida1 slip plane is enhanced. From the fact that concave parts and convex parts are both affected, it was concluded that kink pair formation as well as kink migration is enhanced by electronic excitation.

Report

(3 results)
  • 1999 Annual Research Report   Final Research Report Summary
  • 1998 Annual Research Report
  • Research Products

    (17 results)

All Other

All Publications (17 results)

  • [Publications] M. Inoue, et al.: "Electronically Enhanced Kink Motion on 30° Partial Dislocations in Ge Directly Observed by Plan-view High Resolution Electron Microscopy"J. Appl. Phys.. 83・4. 1953-1957 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M. Inoue, et al.: "Reliable Image Processing that can Extract an Atomically-resolved Line Shape of Partial Dislocations in Semiconductors from Plan-view High-resolution Electron Microscopic Images"Ultramicroscopy.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 前田康二、鈴木邦夫: "半導体中の転位運動素過程の原子レベル直線観察"まてりあ. 37・12. 998 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y. Yamashita, et al.: "Hydrogen Enhanced Dislocation Glides in Silicon"Phys. Stat. Sol. (a). 171. 27-34 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] K. Maeda, et al.: "Electronically induced Dislocation Glide Motion in Hexagonal GaN Single Crystals"Physica B. 273-274. 134-139 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M. Inoue, K. Suzuki, H. Amasuga, Y. Mera and K. Maeda: "Electronically Enhanced Kink Motion on 30° Partial Dislocations in Ge Directly Observed by Plan-view High Resolution Electron Microscopy"J. Appl. Phys.. 83(4). 1953-1957 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M. Inoue, K. Suzuki, H. Amasuga, M. Nakamura, Y. Mera, S. Takeuchi and K. Maeda: "Reliable Image Processing that can Extract an Atomically-resolved Line Shape of Partial Dislocations in Semiconductors from Plan-view High-resolution Electron Microscopic Images"Ultramicroscopy. 75. 5-14 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] K. Maeda and K. Suzuki: "Direct Observations of the Elementary Processes of Dislocation Glides in Semiconductors"Materia. 37(12). 988 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y. Yamashita, F. Jyobe, Y. Kamiura and K. Maeda: "Hydrogen Enhanced Dislocation Glides in Silicon"phys. stat. sol. (a). 171. 27-34 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] K. Maeda, K. Suzuki, M. Ichihara, S. Nishiguchi, K. Ono, Y. Mera and S. Takeuchi: "Electronically induced Dislocation Glide Motion in Hexagonal GaN Single Crystals"Physica B. 273-274. 134-139 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Yamashita: "Hydrogen Enhanced Dislocation Glides in Silicon"Phys.stat.sol.(a). 171. 27-34 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] K.Maeda: "Electronically induced Dislocation Glide Motion in Hexagonal GaN Single Crystals"Physica B. 273/274. 134-139 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] M.Inoue: "Electronically enhanced kink motion on 30 degree partial dislocations in Ge directly observed by plan-view high resolution electron microscopy" J.Appl.Phys.83. 1953-1957 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] M.Inoue: "Reliable image processing that can extract an atomically-resolved shape of partial dislocations in semiconductors from plan-view high resolution electron microscopic images" Ulramicroscopy. 75. 5-14 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 前田康二: "半導体中の転位運動素過程の原子レベル直接観察" 日本金属学会会報. 37. 988 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 前田康二: "GaN中の転位-有害性と無害性の起源" 応用電子物性分科会誌. 4. 170-175 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Y.Yamashita: "Hydrogen Enhanced Dislocation Glides in Silicon" phys.stat.sol.(a). 171. 27-34 (1999)

    • Related Report
      1998 Annual Research Report

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Published: 1998-04-01   Modified: 2016-04-21  

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