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Real tine characterization and control of growing interface structures of thin films

Research Project

Project/Area Number 10450317
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 工業分析化学
Research InstitutionThe University of Tokyo

Principal Investigator

NIHEI Yoshimasa  Inst. of Industrial Science, The University of Tokyo, Professor, 生産技術研究所, 教授 (10011016)

Co-Investigator(Kenkyū-buntansha) ISHII Hideshi  Inst. of Industrial Science, The University of Tokyo, Research Associate, 生産技術研究所, 助手 (30251466)
OWARI Masanori  Environmental Science Center, The University of Tokyo, Professor, 環境研究安全センター, 教授 (70160950)
Project Period (FY) 1998 – 1999
Project Status Completed (Fiscal Year 1999)
Budget Amount *help
¥12,200,000 (Direct Cost: ¥12,200,000)
Fiscal Year 1999: ¥4,100,000 (Direct Cost: ¥4,100,000)
Fiscal Year 1998: ¥8,100,000 (Direct Cost: ¥8,100,000)
KeywordsPhotoelectron Diffraction / Real time XPED / Surfactant Epitaxy / Surface alloy / Tensor XPED / Cu / Ge (111) / Photoelectron Holography / Gu
Research Abstract

1. Instrumentation of real time X-ray Photoelectron Diffraction (XPED) Analysis
For real time measurements of interface structures, reactions and growth by XPED, the improvement of our XPED-MBE chamber was carried out. The new manipulator and transfer rods system enables the XPED measurements at from 77K to about 1300K with the precise rotation.
2. Development of novel theory to investigate interface structures ; Tensor XPED and Photoelectron Holography
To investigate interface structures precisely, novel theory of tensor XPED and Photoelectron Holography were developed. Using these schemes, theoretical XPED patterns of Cu/Ge (111) systems were investigated.
3. Interface structure of Cu/Ge (111) systems (Interface structure and alloy formation of discommensurate system)
The structure of discommensurate domain Cu Layer on Ge (111)-c (2x8) surface was studied by X-ray Photoelectron Diffraction (XPED). It turned out that Cu forms the double layer structure in the discommensurate domain at the initial stage of epitaxy and 0.6Å relaxation of outermost Cu layer occurs. Alloy formation in the interface between Cu an Ge layers was also investigate.
4. Design and Instrumentation of real time XPED detection systems for measurements of interface reaction
To investigate interface reactions precisely and real time, conventional plot-by-plot XPED measurements is not adequate. Thus, theoretical and experimental study on 2 dimensional simultaneous detection of the polar angle and energy distributions was performed. Theoretical design of new type input lens system with a high through put was also carried out.

Report

(3 results)
  • 1999 Annual Research Report   Final Research Report Summary
  • 1998 Annual Research Report
  • Research Products

    (28 results)

All Other

All Publications (28 results)

  • [Publications] Shinji Omori: "Reconstruction of the crystal structure by Kikuchi-band analysis in X-ray photo- and Auger electron diffraction"J. Electron Spectrosc. Relat. Phenom.. 88-91. 517-522 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Hideshi ISHII: "Surface Structure of Thin CaO Layers Formed on CaF_2(111) studied by Photoelectron Diffraction"J. Electron Spectrosc. Relat. Phenom.. 88-91. 545-549 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Susumu SHIRAKI: "Design of Input Lens System for a 180° Deflection Toroidal Analyzer using Trajectory Simulation"J. Electron Spectrosc. Relat. Phenom..

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 白木将: "エネルギー・角度同時検出の新型アナライザーを用いたオージェ電子回折"表面科学会誌. 20. 452-457 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Shinji Omori: "Photoelectron Diffraction Intensity Calculation by Using Tensor LEED Theory"Journal of Vacuum Science and Technology. A17. 1621-1625 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Shinji Omori: "Disappearance of Element-Specific Kikuchi Bands from Fluoride Surfaces"Journal of Vacuum Science and Technology. A17. 1625-1629 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Takanori Suzuki: "Photoelectron Diffraction Intensity Calculation by Using Tensor LEED Theory"Surface Science Letters. 440. 881-886 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Susumu Shiraki: "Measurements of Auger Electron Diffraction by using a 180° Deflection Toroidal Analyzer"Surf. Rev. and Lett. 6. 585-590 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Shinji Omori: "Photoelectron Diffraction Study of the initial-stage of Growth of Cu on Ge(111)-c(2×8)"Surf. Rev. and Lett. 6. 1079-1083 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Shinji Omori: "Epitaxial Growth of SrF_2 on Ge(111)-c(2×8) as Studied by Photoelectron Diffraction and Holography"Surf. Rev. and Lett. 6. 1085-1089 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Shinji Omori: "Reconstruction of the crystal structure by Kikuchi-band analysis in X-ray photo- and Auger electron diffraction"J. Electron Spectrosc. Relat. Phenom.. 88-91. 517-522 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Hideshi Ishii: "Surface structure of Thin CaO Layers Formed on CaFィイD22ィエD2 (111) studied by Photoelectron Diffraction"J. Electron Spectrosc. Relat. Phenom.. 88-91. 545-549 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Susumu Shiraki: "Desing of Input Lens System for a 180° Deflection Toroidal Analyzer using Trajectory Simulation"J. Electron Spectrosc. Relat. Phenom.. 88-91. 1021-1026 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Susumu Shiraki: "Measurements A Auger Electron Diffraction by Using Electrostatic Analyzer with Simultaneous Detection of Energy and Angle Distribution"Hyomen Kagaku. 20 (in Japanese). 452-457 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Shinji Omori: "Photoelectron Diffraction Intensity Calculation by Using Tensor LEED Theory"J. Vac. Sci. Technol.. A17. 1621-1625 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Shinji Omori: "Disappearance of Element-Specific Kikuchi Bands from Fluoride Surfaces"J. Vac. Sci. Technol.. A17. 1626-1629 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Taknori Suzuki: "Photoelectron Diffraction Intensity Calculation by Using Tensor LEED Theory"Surf. Sci. Lett.. 440. 881-886 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Susumu Shiraki: "Measurements of Auger Electron Diffraction by using a 180° Deflection Toroidal Analyzer"Surf. Rev. Lett.. 6. 585-590 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Shinji Omori: "Photoelectron Diffraction Study of the initial-stage of Growth of Cu on Ge (11l)-c(2x8)"Surf. Rev. Lett.. 6. 1079-1083 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Shinji Omori: "Epitaxial Growth of SrFィイD22ィエD2 on Ge (111)-c(2x8) as Studied by Photoelectron Diffraction and Holography"Surf. Rev. Lett.. 6. 1085-1089 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Shinji Omori: "Photoelectron Diffraction Intensity Calculation by Using Tensor LEED Theory"Journal of Vacuum Science and Technology. A17. 1621-1625 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Shinji Omori: "Disappearance of Element-Specific Kikuchi Bands from Fluoride Surfaces"Journal of Vacuum Science and Technology. A17. 1626-1629 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Takanori Suzuki: "Photoelectron Diffraction Intensity Calculation by Using Tensor LEED Theoy"Surface Science Letters. 440. 881-886 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Shinji Omori: "“Photoelectron Diffraction Intensity Calculation by Using Tensor LEED Theory"" Journal of Vacuum Science and Technology. (in press).

    • Related Report
      1998 Annual Research Report
  • [Publications] Shinji Omori: "“Disappearance of Element-Specific Kikuchi Bands from Fluoride Surfaces"" Journal of Vacuum Science and Technology. (in press).

    • Related Report
      1998 Annual Research Report
  • [Publications] Hideshi ISHII: "Surface Structure of Thin CaO Layers Formed on CaF_2(111) studied by Photoelectron Diffraction" J.Electron Spectrosc.Relat.Phenom.88-91. 545-549 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Shinji OMORI: "Reconstruction of the crystal structure by Kikuchi-band analysis in X-ray photo-and Auger electron diffraction" J.Electron Spectrosc.Relat.Phenom.88-91. 517-522 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Susumu SHIRAKI: "Design of Input Lens System for a 180° Deflection Toroidal Analyzer using Trajectory Simulation" J.Electron Spectrosc.Relat.Phenom.88-91. 1021-1026 (1998)

    • Related Report
      1998 Annual Research Report

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Published: 1998-04-01   Modified: 2016-04-21  

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