| Project/Area Number |
10554012
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| Research Category |
Grant-in-Aid for Scientific Research (B).
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| Allocation Type | Single-year Grants |
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| Section | 展開研究 |
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| Research Field |
固体物性Ⅰ(光物性・半導体・誘電体)
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| Research Institution | Utsunomiya University |
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Principal Investigator |
NAKAI Shun-ichi Faculty of Engineering, Utsunomiya University Professor, 工学部, 教授 (70081429)
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| Co-Investigator(Kenkyū-buntansha) |
SAITOH Keiichi Toshiba Co.Ltd.Division of electronic devices, researcher, 電子デバイス事業部, 主務(研究職)
KASHIWAKURA Takayuki Faculty of Engineering, Utsunomiya University Assistant, 工学部, 助手 (90261817)
斎藤 啓一 株式会社 東芝, 電子デバイス事業部, 主務
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| Project Period (FY) |
1998 – 2000
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| Project Status |
Completed (Fiscal Year 2000)
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| Budget Amount *help |
¥15,400,000 (Direct Cost: ¥15,400,000)
Fiscal Year 2000: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 1999: ¥2,500,000 (Direct Cost: ¥2,500,000)
Fiscal Year 1998: ¥12,000,000 (Direct Cost: ¥12,000,000)
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| Keywords | Soft X-ray Spectrometer / X-ray Crystal Spectrometer / Position Sensitive Detector / Soft X-ray Monochrometor / Soft X-ray Spectroscopy / 軟X線分光法 |
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| Research Abstract |
Soft X-ray resonant emission spectroscopy is one of powerful methods to study the information about the electronic structure of solids. The synchrotron radiation is selected by the double crystal monochrometor. The secondary X-ray emission spectra(fluorescence spectra)from sample are analyzed by the secondary monochrometor. However, the intensity of the secondary radiation is generally weak, then we developed the new high resolution, high efficiency spectrometer. In order to achieve high efficiency, we developed the bent crystal spectrometer equipped with the position sensitive detector.
We designed the new soft X-ray spectrometer. The spectrometer is the bent crystal vacuum spectrometer of Johann type, in which a bent crystal of radius of curvature 100cm is mounted. The analyzing crystal with its atomic planes parallel to the face is placed tangent to a circle corresponding to the Rowland circle. The position sensitive detector is placed tangent to this circle.
The test measurement of this spectrometer was performed by using Si K_α emission spectra from Silicon target. In this case, the electron beam(3KV, 80μA)from electron gun was used for excitation source. The resolution of the spectrometer was estimated about 0.5 eV for Si K_α region. Three type detectors, microchannel plate, resistive anode gas proportional counter and backgammon type position sensitive detector have been tested.
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