| Project/Area Number |
10555012
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 展開研究 |
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| Research Field |
Applied optics/Quantum optical engineering
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| Research Institution | TOHOKU UNIVERSITY |
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Principal Investigator |
YANAGIHARA Mihiro Res. Inst. for Sci. Meas., Tohoku University, Assoc. Prof, 科学計測研究所, 助教授 (40174552)
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| Co-Investigator(Kenkyū-buntansha) |
EJIMA Takeo Res. Inst. for Sci. Meas., Tohoku University, Res. Assoc., 科学計測研究所, 助手 (80261478)
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| Project Period (FY) |
1998 – 1999
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| Project Status |
Completed (Fiscal Year 1999)
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| Budget Amount *help |
¥13,000,000 (Direct Cost: ¥13,000,000)
Fiscal Year 1999: ¥1,100,000 (Direct Cost: ¥1,100,000)
Fiscal Year 1998: ¥11,900,000 (Direct Cost: ¥11,900,000)
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| Keywords | microscopy / soft X-ray emission / Schwarzschild mirror / multilayer / normal incidence / imaging |
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| Research Abstract |
Soft-X-ray emission microscopy is a novel tool to obtain a magnified image of a small spot of a sample by imaging soft X-ray emission from the atoms under irradiation of soft X-rays or electrons using a multilayer-coated Schwarzschild objective. It provides an image very sensitive to the kind of atoms because the soft X-ray emission is selectively reflected by the narrow band pass of the multilayer. The aim of this research is to develop a soft X-ray emission microscopy of a 0.5-μm resolution and to demonstrate its basic advantages.
I constructed a soft-X-ray emission microscope with a Schwarzschild objective of 50 x magnification coated with a Mo/Si multilayer. Using it, I observed a test sample under electron beam irradiation and obtained a distribution image of Si atoms. The result demonstrates the primary advantage of the microscope that the Si L emission is selectively reflected by the Mo/Si multilayer.
A multilayer objective reflects visible light as well as soft X-rays. Thus I carried out an imaging test for the microscope by observing a test sample with visible light and obtained a spatial resolution of 0.7μm. The resolution is very close to the diffraction limit of visible light. This result shows that the microscope has been successfully adjusted with high precision. Because the diffraction limit of soft X-rays is smaller than that of visible light, it was expected to achieve 0.5μm in the resolution. However, a resolution from 1.5μm to 2.0 μm was finally obtained. The most probable reason for the resolution under 0.7μm was the low resolution of the soft X-ray detector employed in this study. To overcome the disadvantage, I should employ a Schwarzschild objective of high magnification and/or X-ray film of high resolution. The usefulness of this microscopy will be demonstrated from now on by observing biological samples and mineral samples.
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