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Establishment of a new method of evaluation for the adhesive strength of thin films by micro-indentation wit two degrees of freedom

Research Project

Project/Area Number 10555024
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Materials/Mechanics of materials
Research InstitutionTOHOKU UNIVERSITY

Principal Investigator

KAMIYA Shoji  Graduate School of Engineering, Tohoku University, Associate Professor, 大学院・工学研究科, 助教授 (00204628)

Co-Investigator(Kenkyū-buntansha) SASAGAWA Kazuhiko  Fac. of Sci. Tech., Hirosaki Univ., Associate Professor, 理工学部, 助教授 (50250676)
SAKA Masami  Graduate School of Engineering, Tohoku University, Professor, 大学院・工学研究科, 教授 (20158918)
UMEHARA Noritsugu  Graduate School of Engineering, Tohoku University, Associate Professor, 大学院・工学研究科, 助教授 (70203586)
Project Period (FY) 1998 – 1999
Project Status Completed (Fiscal Year 1999)
Budget Amount *help
¥5,800,000 (Direct Cost: ¥5,800,000)
Fiscal Year 1999: ¥2,000,000 (Direct Cost: ¥2,000,000)
Fiscal Year 1998: ¥3,800,000 (Direct Cost: ¥3,800,000)
KeywordsThin Films / Adhesive Strength / Quantitative Evaluation / Interface Crack / Fracture resistance / Interface Fracture Toughness
Research Abstract

This research project aims at the establishment of a new method of evaluation for the adhesive strength of thin films by micro-indentation with two degrees of freedom. We studied the following three points and have succeeded to developed a method which can be generally applicable to various combinations of films and substrates.
Trial production of two-freedom indentor
A micro-indentation set-up with two degrees of freedom was developed. This is equipped with an optical microscope which enables real-time observation of crack extension behavior for the measurement of interface crack length.
Selection of the optimum loading path and shape of indentor
Various loading, configurations were examined by using the indentor developed above. As a conclusion, specimens should be prepared where the film is projected a little out of the cross section of the substrate. This projection is pushed upwards from the interface side by a conical stylus of diamond, which we found the best way to efficiently extend an interface crack.
Evaluation of toughness by the computational simulation
Computational simulations were carried out according to the loading configuration above. By comparing the crack extension resistance curves obtained by both experiment and simulation, we succeeded to evaluate the toughness of interface. As an example, the toughness of interface between a WC-Co substrate and the diamond film prepared as a wear protection coating was determined to be about 14 J/mィイD12ィエD1. Although adhesion of wear protection coating is one of the critical problems, this is the first quantitative data ever obtained all over the world for the adhesive strength of diamond coatings on WC-Co cutting tools. This fact proves that our new method is quite a successful one with a significant advantage for industries.

Report

(2 results)
  • 1999 Annual Research Report   Final Research Report Summary
  • Research Products

    (18 results)

All Other

All Publications (18 results)

  • [Publications] S.Kamiya(M.Sato,M.Saka and H.Abe): "Residual stress distribution in the direction of the film normal in thin diamond films"Journal of Applied Physics. 86・1. 224-229 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] S.Kamiya(H.Takahashi,M.Saka and H.Abe): "Evaluation and improvement of the adhesive fracture toughness of CVD diamond on silicon substrate"EEP-Vol.26-1, Advances in Electronic Packaging D.Agonafer et al. ed.. 26・1. 763-767 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 神谷庄司(高橋博紀、坂真澄、阿部博之): "気相合成ダイヤモンドの結晶構造とその界面破壊じん性に及ぼす影響"日本機械学会1999年度年次大会講演論文集. 99・1. 3-4 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] S.Kamiya(H.Takahashi,A.Kobayashi,M.Saka and H.Abe): "Fracture strength of chemically vapor deposited diamond on the substrate and its relation to the crvstalling structure"Diamond and Related Materials. (印刷中). (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] N.Umehara(K.Kato,M.Bai and Y.Miyake): "Effect of internal stress of CNx coating on its wear in sliding friction"Surface and Coating Technology. 113. 233-241 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] K.Sasagawa(M.Hasegawa,M.Saka and H.Abe): "Experimental verification of prediction method for electromigration failure of polycrystalline lines"Journal of Applied Physics. (印刷中). (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] S. Kamiya (M. Sato, M. Saka and H. Abe): "Residual stress distribution in the direction of the film normal in thin diamond films"Journal of Applied Physics. Vol.86. 224-229 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] S. Kamiya (H. Takahashi, M. Saka and H. Abe): "Evaluation and improvement of the adhesive fracture toughness of CVD diamond on silicon substrate"Advances in Electronic Packaging, D. Agonafer et al.. EEP-Vol.26-1. 763-767 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] S. Kamiya (H. Takahashi, M. Saka and H. Abe): "A study of crystal structure and its relation to the interface fracture toughness of CDV diamond"Proceedings of 1999 JSME Annual Meeting. Vo.99-1. 3-4 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] S. Kamiya (H. Takahashi, A. Kobayashi, M. Saka and H. Abe): "Fracture strength of chemically vapor deposited diamond on the substrate and its relation to the crystalline structure"Diamond and Related Materials. (in press). (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] N. Umehara (K. Kato, M. Bai and Y. Miyake): "Effect of internal stress of CNx coating on its wear in sliding friction"Surface and Coating Technology. Vol. 113. 233-241 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] K. Sasagawa (M. Hasegawa, M. Saka and H. Abe): "Experimental verification of prediction method for electromigration failure of polycrystalline lines"Journal of Applied Physics. Vol. 87 (in press). (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] S.Kamiya (M.Sato,M.Saka and H.Abe): "Residual stress distribution in the direction of the film normal in thin diamond films"Journal of Applied Physics. 86・1. 224-229 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] S.Kamiya (H.Takahashi,M.Saka and H.Abe): "Evaluation and improvement of the adhesive fracture toughness of CVD diamond on silicon substrate"EEP-Vol. 26-1, Advances in Electronic Packaging D. Agonafer et al .ed.. 26・1. 763-767 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 神谷庄司(高橋博紀、坂真澄、阿部博之): "気相合成ダイヤモンドの結晶構造とその界面破壊じん性に及ぽす影響"日本機械学会1999年度年次大会講演論文集. 99・1. 3-4 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] S.Kamiya (H.Takahashi,A.Kobayashi,M.Saka and H.Abe): "Fracture strength of chemically vapor deposited diamond on the substrate and its relation to the crystalline structure"Diamond and Related Materials. (印刷中). (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] N.Umehara (K.Kato,M.Bai and Y.Miyake): "Effect of internal stress of CNx coating on its wear in sliding friction"Surface and Coating Technology. 113. 233-241 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] K.Sasagawa (M.Hasegawa,M.Saka and H.Abe): "Experimental verification of prediction method for electromigration failure of polycrystalline lines"Journal of Applied Physics. (印刷中). (2000)

    • Related Report
      1999 Annual Research Report

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Published: 1998-04-01   Modified: 2016-04-21  

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