| Project/Area Number |
10555041
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 展開研究 |
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| Research Field |
機械工作・生産工学
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| Research Institution | Kobe University |
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Principal Investigator |
SHAMOTO Eiji Kobe University, Mechanical Engineering, Associate Professor, 工学部, 助教授 (20216146)
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| Co-Investigator(Kenkyū-buntansha) |
HINO Rei Kobe University, Mechanical Engineering, Research Associate, 工学部, 助手 (80273762)
SHIBASAKA Toshiro Kobe University, Graduate School, Associate Professor, 大学院・自然科学研究科, 助教授 (80094530)
MORIWAKI Toshimichi Kobe University, Mechanical Engineering, Professor, 工学部, 教授 (00031104)
UDA Yutaka Nikon Co., Ltd., Technological Development Department, Senior Manager, 生産技術本部, 課長(研究職)
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| Project Period (FY) |
1998 – 1999
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| Project Status |
Completed (Fiscal Year 1999)
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| Budget Amount *help |
¥7,200,000 (Direct Cost: ¥7,200,000)
Fiscal Year 1999: ¥2,800,000 (Direct Cost: ¥2,800,000)
Fiscal Year 1998: ¥4,400,000 (Direct Cost: ¥4,400,000)
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| Keywords | Walking drive / Piezoelectric actuator / Ultraprecision positioning / XYθ table / Feed device / High rigidity / Fine positioning resolution / Dual mode driving system |
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| Research Abstract |
The objectives of this research have been successfully attained after two years of research. The major research results obtained are as follows ;
1.Development of walking table and its performance
Ultraprecision XYθtable is developed by applying the principle of walking drive. Stiffness and straight motion accuracy of the developed table are measured. The device has a high stiffness of more than 38 N/μm and a good straight motion accuracy of less than 0.5μm.
2.Development of algorithm and software for dual mode drive
An algorithm of dual mode drive is developed in order to improve the maximum speed of the feed system. By the developed algorithm, the table is driven by elliptical vibration, which corresponds to running motion of animals, when the positioning error is large. On the other hand, it is driven by the walking drive, which corresponds to walking motion , when the error is small. Software is developed here based on the above algorithm.
3.Development of laser feedback system
A feedback feasibility of the developed feed system is verified experimentally. The experimental results show that the feed system has an excellent positioning resolution of 5 nm and a relatively high maximum speed of 24 mm/sec.
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