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Micro-machining using ultraprecision machine tool with twist-roller friction drive

Research Project

Project/Area Number 10555042
Research Category

Grant-in-Aid for Scientific Research (B).

Allocation TypeSingle-year Grants
Section展開研究
Research Field 機械工作・生産工学
Research InstitutionTottori University

Principal Investigator

MIZUMOTO Hiroshi  Tottori Univ.Fac.of Engg.Professor, 工学部, 教授 (80108795)

Co-Investigator(Kenkyū-buntansha) YABUTA Yoshito  Tottori Univ.Fac.of Engg.Research Assistant, 工学部, 助手 (80263490)
ARII Shiro  Tottori Univ.Fac.of Engg.Ass.Professor, 工学部, 助教授 (80222751)
Project Period (FY) 1998 – 2000
Project Status Completed (Fiscal Year 2000)
Budget Amount *help
¥12,000,000 (Direct Cost: ¥12,000,000)
Fiscal Year 2000: ¥1,100,000 (Direct Cost: ¥1,100,000)
Fiscal Year 1999: ¥2,500,000 (Direct Cost: ¥2,500,000)
Fiscal Year 1998: ¥8,400,000 (Direct Cost: ¥8,400,000)
KeywordsAerostatic guideway / Friction drive / Machine tool / Mechatronics / Metal cutting / Nanotechnology / Positioning / Single-point diamond turning / 精密機械 / 超精密工作機械 / 能動制御
Research Abstract

An ultraprecision machine tool with the twist-roller friction drive is developed for improving the precision metal cutting technology, especially the micro-machining technology used for manufacturing optical parts and micro mechanism. The twist-roller friction drive is a kind of positioning mechanism, and was invented by the head investigator for realizing Angstrom positioning resolution. The twist-roller friction drive is advantageous for ultraprecision positioning, however, this mechanism causes some lateral force which influences the straightness of motion of the positioning table. The active inherent restrictor incorporated into the aerostatic guideway can decrease the influence and improve the straightness. The ultraprecision machine tool with the twist-roller friction drive and the active inherent restrictor has three axes that are numerically controlled, and has the ability of tuming and milling.
In the experiment of turning, a single-point diamond tool is mounted on the vertical … More Y-table on the horizontal Z-axis and an aluminum alloy is mounted on the air-bearing spindle on the horizontal X-table. By turning, flat and spherical mirrors are manufactured, and micro steps in the order of nanometer are made on the mirror surface. Accuracy of machined parts is in the order of 0.1μm, and surface roughness is in the order of 10nm. In the experiment of milling, a small diameter of ball endmil is mounted on the air-bearing spindle and the aluminum alloy is mounted on the Y-table. By milling, small cones and pyramids whose height are 0.1mm are manufactured. Their accuracy is about 10μm and surface roughness is in the order of several microns. Small letters and gear are also manufactured in the same accuracy shown above.
These experiments show that the ultraprecision machine tool with the twist-roller friction drive can be used in practice. Therefore, the result of this research can contribute the development of the ultraprecision positioning and the micro-machining technologies. Less

Report

(4 results)
  • 2000 Annual Research Report   Final Research Report Summary
  • 1999 Annual Research Report
  • 1998 Annual Research Report
  • Research Products

    (9 results)

All Other

All Publications (9 results)

  • [Publications] Mizumoto,H.,Inoue,S.,Arii,S.,Kami,Y.and Yabuya,M.: "An Ultraprecision Machine Tool using Twist-roller Friction Drives and Active Control Aerostatic Guideways,"Proceedings of the 1st International euspen Conference,. Vol.1. 28-31 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Mizumoto,H.,Inoue,M.,Arii,S.,Kami,Y.and Yakuya,M.: "An Ultraprecision Machine Tool with Active Control Aerostatic Guideways for Improving Quality of Machined Surface,"Proceedings of the 9th International Conference on Production Engineering, Vol.1,1999, pp.165-170.. Vol.1. 165-170 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Mizumoto,H.,Arii,S.,Inoue,S.and Yabuya,M.: "A Performance Evaluation of the Ultraprecision Machine Tool using Twist-roller Friction Drive Mechanism"Proceedings of the 1st euspen Topical Conference on Fabrication and Metrology in Nanotechnology,. Vol.2. 464-471 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Mizumoto, H., Inoue, M., Arii, S., Kami, Y.and Yabuya, M.: "An Ultraprecision Machine Tool using Twist-roller Friction Drives and Active Control Aerostatic Guideways"Proceedings of the 1st International euspen Conference. Vol.1. 28-31 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Mizumoto, H., Inoue, S., Arii, S., Kami, Y.and Yabuya, M.: "An Ultraprecision Machine Tool with Active Control Aerostatic Guideways for Improving Quality of Machined Surface"Proceedings of the 9th International Conference on Production Engineering. Vol.1. 165-170 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Mizumoto, H., Arii, S., Inoue, S.and Yabuya, M.: "A Performance Evaluation of the Ultraprecision Machine Tool using Twist-roller Friction Drive Mechanism"Proceedings of the 1st euspen Topical Conference on Fabrication and Metrology in Nanotechnology. Vol.2. 464-471 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Mizumoto,H.,Arii,S.,Inoue,S.and Yabuya,M.: "A Performance Evaluation of the Ultraprecision Machine Tool using Twist-roller Friction Drive Mechanism"Proceedings of the 1st euspen Topical Conference on Fabrication and Metrology in Nanotechnology,. Vol.2. 464-471 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Mizumoto,H.,Inoue,M.,Arii,S.,Kami,Y.and Yabuya,M.: "An Ultraprecision Machine Tool using Twist-roller Friction Drives and Active Control Aerostatic Guideways,"Proceedings of the 1st International euspen Conference. Vol.1. 28-31 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Mizumoto,H.,Inoue,S.,Arii,S.,Kami,Y.and Yabuya,M.: "An Ultraprecision Machine Tool with Active Control Aerostatic Guidewaya for Improving Quality of Machined Surface,"Proceedings of the 9th International Conference on Production Engineering. Vol.1. 165-170 (1999)

    • Related Report
      1999 Annual Research Report

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Published: 1998-04-01   Modified: 2016-04-21  

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