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Fabrication of Advanced In-Pipe Working Micromachine Using Electro-Rheological Fluids

Research Project

Project/Area Number 10555058
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Fluid engineering
Research InstitutionTokyo Institute of Technology

Principal Investigator

YOSHIDA Kazuhiro  Tokyo Institute of Technology, Precision and Intelligence Laboratory, Associate Professor, 精密工学研究所, 助教授 (00220632)

Co-Investigator(Kenkyū-buntansha) KONDOH Yutaka  Tokyo Institute of Technology, Precision and Intelligence Laboratory, Research Associate, 精密工学研究所, 助手 (80293059)
YOKOTA Shinichi  Tokyo Institute of Technology, Precision and Intelligence Laboratory, Associate Professor, 精密工学研究所, 教授 (10092579)
Project Period (FY) 1998 – 1999
Project Status Completed (Fiscal Year 1999)
Budget Amount *help
¥13,000,000 (Direct Cost: ¥13,000,000)
Fiscal Year 1999: ¥4,000,000 (Direct Cost: ¥4,000,000)
Fiscal Year 1998: ¥9,000,000 (Direct Cost: ¥9,000,000)
KeywordsMicromachine / Electro-rheological fluid / In-pipe mobile micromachine / Microvalve / Micropump / Functional fluid / Fluid power system / Actuator
Research Abstract

To realize advanced in-pipe working micromachines with 10mm in diameter, a simple micro fluid control system is fabricated by using ER (Electro-Rheological) fluids whose apparent viscosity can be controlled by the applied electric field strength.
1. Advanced actuator using particle-type ER fluids: A simple advanced actuator METERA (Movable Electrode-Type ER Actuator) is proposed. With applying voltage to movable electrodes between which particle-type ER fluids flow, the movable electrodes are moved by the differential pressure. R-METERA (rotary type) and L-METERA (Linear type) are fabricated and the characteristics are experimentally investigated.
2. Micro ER valve using homogeneous ER fluids: A simple microvalve using homogeneous ER fluids is proposed. The microvalve has a pair of parallel plate electrodes and homogeneous ER fluids flow between them. By the applied electric field strength, the differential pressure and flowrate are controlled. Micro ER valves are fabricated by conventional machining and micromachining and the characteristics are experimentally investigated.
3. Piezoelectric micropump using resonance drive: As a fluid power source, a high output piezoelectric micropump is proposed. The micropump utilizes large volume change of a bellows caused by resonance with a piezoelectric element and an additional mass. Through experimental investigations, the validity is confirmed.
4. Structure of advanced in-pipe working micromachines: A micro position control system composed of a micro ER valve, a piezoelectric micropump using resonance drive and a bellows microactuator is fabricated and the validity is experimentally confirmed. Also, a 3-DOF bending and propelling mechanism is fabricated and tested.

Report

(3 results)
  • 1999 Annual Research Report   Final Research Report Summary
  • 1998 Annual Research Report
  • Research Products

    (38 results)

All Other

All Publications (38 results)

  • [Publications] J. H. Park: "Resonantly Driven Piezoelectric Micropump- Fabrication of a Micropump Having High Power Density -"Mechatronics. 9. 687-702 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] J. H. Park: "Micro Fluid Control System Using Homogeneous ER Fluids (Proposition of Micro ER Valve and Basic Experiments)"Proc. 1999(IEEE/RSJ Int. Conf. on Intelligent Robots and Systems(IROS'99). 2. 1063-1068 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y. Kondoh: "Movable Electrode- Type ER Actuators (Proposal of Linear- Type and Rotary-Type METERA)"Proc. 1999IEEE/RSJ Int. Conf. on Intelligent Robots and Systems(IROS'99). 2. 1757-1761 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 朴 重濠: "均一系ER流体を用いたマイクロ液圧制御システム(バルブ・ポンプから成る圧力制御システムの試作)"日本機械学会第76期全国大会講演論文集. 253-254 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 吉田和弘: "均一系ER流体を作動流体としたマイクロバルブ"日本機械学会・精密工学会山梨講演会講演論文集. 81-82 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 吉田和弘: "均一系ER流体を作動流体としたマイクロバルブの基本特性"計測自動制御学会第13回流体制御シンポジウム講演論文集. 53-56 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 吉田和弘: "均一系ER流体を作動流体としたマイクロバルブの提案"1999年度精密工学会春季大会学術講演会講演論文集. 302 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 朴 重濠: "共振駆動を用いた圧電マイクロポンプ(均一系ER流体のポンピング)"日本機械学会ロボティクス・メカトロニクス講演会'99 講演論文集. 2P1-48-072(1)-(2) (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 朴 重濠: "均一系ER流体を用いたマイクロ流体制御システム(開ループ1軸位置制御システムの試作)"日本機械学会1999年度年次大会講演論文集. V. 221-222 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 吉田和弘: "流体パワーを用いた管内走行マイクロマシン(3自由度走行メカニズム)"日本機械学会1999年度年次大会講演論文集. V. 223-224 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 近藤 豊: "回転可動電極形ERアクチュエータ:R-METERA(試作および静特性実験)"日本機械学会1999年度年次大会講演論文集. V. 225-226 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 吉田和弘: "均一系ER流体を作動流体としたマイクロバルブ(半導体プロセスを用いたマイクロバルブの試作)"計測自動制御学会第17回流体計測・第14回流体制御合同シンポジウム講演論文集. 139-142 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] J. H. Park, K. Yoshida and S. Yokota: "Resonantly Driven Piezoelectric Micropump - Fabrication of a Micropump Having High Power Density"Machatronics. 9-7. 687-702 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] J. H. Park, K. Yoshida and S. Yokota: "Micro Fluid Control System Using Homogeneous ER Fluids (Proposition of Micro ER Valve and Basic Experiments)"Proc. 1999 IEEE/RSJ Int. Conf. on Intelligent Robots and Systems (IROS '99). 2. 1063-1068 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y. Kondo and S. Yokota: "Movable electrode-Type ER Actuators (Proposal of Linear-Type and Rotary-Type METERA)"Proc. 1999 IEEE/RSJ Int. Conf. on Intelligent Robots and Systems (IROS '99). 2. 1757-1761 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] J. H. Park, K. Yoshida, S. Yokota and H. Takatori: "Micro Hydraulic Control System Using Homogeneous ER Fluid (Fabrication of a Pressure Control System Composed of Valve and Pump)"Proc. 76th JSME Fall Annual Meeting. V. 253-254 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] K. Yoshida, H. Takatori, J. H. Park and S. Yokota: "A Microvalve Using Homogeneous ER Fluids"Proc. JSME-JSPE Yamanashi District Conf.. 81-82 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] K. Yoshida, H. Takatori, J. H. Park and S. Yokota: "Basic Characteristics of a Microvalve Using Homogeneous ER Fluids"Proc. 13th Symp. on Fluid Control. 53-56 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] K. Yoshida, H. Takatori, J. H. Park and S. Yokota: "Proposition of a Microvalve Using Homogeneous ER Fluids"Proc. 1999 JSME Springl Annual Meeting. 302 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] J. H. Park, K. Yoshida and S. Yokota: "A Piezoelectric Micropump Using Resonance Drive (Pumping of Homogeneous ER Fluid)"Proc. 1999 JSME Conf. on Robotics and Mechatronics (ROBOMEC '99). 2P1-48-072(1)-(2) (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] J. H. Park, K. Yoshida and S. Yokota: "Micro Fluid Control System Using Homogeneous ER Fluid (Fabrication of an Open-Loop Micro Position Control System)"Proc. 1999 JSME Annual Meeting. V. 221-222 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] K. Yoshida, Y. Takatsu, S. Yokota and Y. Nagamine: "An In-Pipe Mobile Micromachine Using Fluid Power (A 3-DOF Mobile Mechanism)"Proc. 1999 JSME Annual Meeting. V. 223-224 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y. Kondoh, T. Tomita, S. Yokota, Y. Nagamine and H. Nagashima: "Rotary Movable Electrode Type ER Actuator : R-METERA (Fabrication and the Static Characteristics)"Proc. 1999 JSME Annual Meeting. V. 225-226 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] K. Yoshida, M. Kikuchi, S. Yokota and J .H. Park: "Microvalves Using Homogeneous ER Fluids (Fabrication Microvalves Using Micromachining)"Proc. 7th Symp. on Fluid Control and Measurement. 139-142 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Kondoh: "Movable Electrode-Type ER Actuators (Proposal of Linear-type and Rotary-type METERA)"Proc.IEEE/RSJIROS. 3. 1757-1761 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] J.H.Park: "Resonantly Driven Piezoelectric Micropump - Fabrication of a Micropump Having High Power Density-"Mechatronics. 9. 687-702 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] J.H.Park: "Micro Fluid Control System Using Homogeneous ER Fluids (Proposition of Micro ER Valve and Basic Experiments)"Proc.IEEE/RSJIROS. 2. 1063-1068 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 近藤 豊: "回転可動電極形ERアクチュエータ:R-METERA (試作および静特性実験)"機械学会年次大会講演集. V. 225-226 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 吉田 和弘: "均一系ER流体を作動流体としたマイクロバルブの提案"精密工学会春季大会学術講演会講論集. 302 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 吉田 和弘: "均一系ER流体を作動流体としたマイクロバルブ(半導体プロセスを用いたマイクロバルブの試作)"計自学会流体計測流体制御合同シンポジウム講論集. 139-142 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 吉田 和弘: "半導体プロセスによる試作マイクロERバルブの基本特性"機械学会ロボティクスメカトロニクス講演会講論集. (発表予定). (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 朴 重濠: "共振駆動を用いた圧電マイクロポンプ(均一系ER流体のポンピング)"機械学会ロボティクスメカトロニクス講演会講論集. 2p-148-072(1)-2p1-48-072(2) (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 朴 重濠: "均一系ER流体を用いたマイクロ流体制御システム(開ループ1軸位置制御システムの試作)"機械学会年次大会講論集. V. 221-222 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 吉田 和弘: "流体パワーを用いた管内走行マイクロマシン(3自由度走行メカニズム)"機械学会年次大会講論集. V. 223-224 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] J.H.Park,K.Yoshida and S.Yokota: "Resonantly Driven Piezoelectric Micropump" Proc.6th UK Mechatronics Forum int.Conf.(Mechatronics'98). 441-446 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 朴 重濠,吉田和弘,横田眞一 高取宏樹: "均一系ER流体を用いたマイクロ液圧制御システム(バルブ・ポンプから成る圧力制御システムの試作)" 日本機械学会第76期全国大会講演論文集. V. 253-254 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 吉田和弘,高取宏樹,朴 重濠,横田眞一: "均一系ER流体を作動流体としたマイクロバルブ" 日本機械学会山梨講演会講演論文集. 81-82 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 吉田和弘,高取宏樹,朴 重濠,横田眞一: "均一系ER流体を作動流体としたマイクロバルブの基本特性" 計測自動制御学会第13回流体制御シンポジウム講演論文集. 53-56 (1998)

    • Related Report
      1998 Annual Research Report

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Published: 1998-04-01   Modified: 2016-04-21  

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