| Project/Area Number |
10555064
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 展開研究 |
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| Research Field |
Thermal engineering
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| Research Institution | TOHOKU UNIVERSITY |
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Principal Investigator |
MARUYAMA Shigenao Institute of Fluid Science, Tohoku University, Professor, 流体科学研究所, 教授 (80173962)
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| Co-Investigator(Kenkyū-buntansha) |
OKADA Shigenobu SHIMADZU Solutions for Science, Vice Section chief, 航空機事業部, 副課長
OHARA Taku Institute of Fluid Science, Tohoku University, Associate Professor, 流体科学研究所, 助教授 (40211833)
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| Project Period (FY) |
1998 – 1999
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| Project Status |
Completed (Fiscal Year 1999)
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| Budget Amount *help |
¥13,000,000 (Direct Cost: ¥13,000,000)
Fiscal Year 1999: ¥5,300,000 (Direct Cost: ¥5,300,000)
Fiscal Year 1998: ¥7,700,000 (Direct Cost: ¥7,700,000)
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| Keywords | Interferometer / Phase-shifting / film thickness / phase change / ellipsometry |
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| Research Abstract |
A real-time measurement system of molecular film thickness using a phase-shifting technique is proposed. In order to observe the molecular films accurately, the following conditions have been required in this system :
1. An image data must be non-compression data.
2. A-D conversion cannot be contained in the image processing.
3. An electric noise cannot be ignored.
4. An accurate heat transfer control is required.
To realize this system, a digital phase-shifting camera has been developed. It has three digital Charge Coupled Device (CCD) sensors and high precision polarizer. Furthermore, a new digital recorder has been developed in order to take high-resolution image data. This recorder can take images as a 10 bit data without compression process, and can record 60 image data per a second. Combining both digital camera and recorder system, more accurate capturing system is accomplished.
A principle of phase-shifting ellipsometry is derived using both phase-shifting technique and conventional principle of ellipsometry. A test cell for observation of condensed surface has been developed based on this principle. A Peltier element is used for cooling to make condensed surface. And peltier- thermistor controler is developed to operate this test cell ; as a result, active and accurate heat transfer control can be achieved. A condensed surface was observed using this measurement system.
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