• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

PRODUCTION OF LASER-DRIVEN MICROMACHINES BY USING LASER MICRO-MANIPYULATION AND THREE-DIMENSION LASER BEAM LITHOGRAPHY

Research Project

Project/Area Number 10555083
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionGIFU NATIONAL COLLEGE OF TECHNOLOGY

Principal Investigator

INABA Seiki  GIFU NATIONAL COLLEGE OF TECHNOLOGY, DEPARTMENT OF ELECTRICAL ENGINEERING, PROFESSOR, 電気情報工学科, 教授 (30110183)

Co-Investigator(Kenkyū-buntansha) HANE Kazuhiro  TOHOKU UNIVERSITY, FACULTY OF ENGINEERING, PROFESSOR, 大学院・工学研究科, 教授 (50164893)
KUMAZAKI Hironori  GIFU NATIONAL COLLEGE OF TECHNOLOGY, DEPARTMENT OF ELECTRICAL ENGINEERING, ASSOCIATE PROFESSOR, 電気情報工学科, 助教授 (70270262)
Project Period (FY) 1998 – 2001
Project Status Completed (Fiscal Year 2001)
Budget Amount *help
¥7,800,000 (Direct Cost: ¥7,800,000)
Fiscal Year 2001: ¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 2000: ¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 1999: ¥1,400,000 (Direct Cost: ¥1,400,000)
Fiscal Year 1998: ¥4,400,000 (Direct Cost: ¥4,400,000)
Keywordsoptical trap / lasermicromanipulation / three-dimensional laserbeam lithography / laser drive / micromachine / レーザマイクロマニビュレーション
Research Abstract

(1) The construction of the optical system for optical trap and laser lithography
Two YAG lasers (1064nm wavelength, 500mW) for optical trap, and a He-Cd laser (325nm wavelength, 20mW) for laser lithography were used. The microstructure objects are freely moved, fixed, and molded by laser in the optional position. Manipulation under the microscope is possible and it is recorded by the digital camera.
(2) The optical trap of micro spheres on the UV photopolymer resin liquid
Following microstructure objects were fabricated by putting micro spheres on the UV photopolymer resin liquid, and doing the optical trap.
(a) It was possible to fix the minute sphere to the column which is perpendicularly extended on the slide. This system is effective for the construction of the micro optical system of the sphere lens.
(b)It was possible to fix the minute sphere to the optical fiber tip. This system is effective for raising optical incidence efficiency to the optical fiber.
(3) The optical trap of the droplet of the UV photopolymer resin
It succeeds in doing the optical trap of micro droplet itself of the UV photopolymer resin. This droplet trappedby laserwas used as adhesive for micro objects. Micro droplet was transported and was fixed for combining the micro spheres. Doing similar processes, several micro spheres were connected.
(4) Laser driven microstructure objects
Polystyrene latex sphere coupled optical trap was driven by laser. Polystyrene latex sphere on the cantilever beam fabricated by laser lithography was vibrated photothermally.
However, the cantilever beam of the single-mode optical fiber was not driven because of weakness of laser intensity.
In the future, the optical system of which the three-dimensional trap is possible must be constructed for the fabrication of practical microstructure objects.

Report

(5 results)
  • 2001 Annual Research Report   Final Research Report Summary
  • 2000 Annual Research Report
  • 1999 Annual Research Report
  • 1998 Annual Research Report
  • Research Products

    (4 results)

All Other

All Publications (4 results)

  • [Publications] 稲葉 成基: "光トラップ法と光造形法を用いたマイクロ構造物の製作"塑性と加工(日本塑性加工学会誌). 40巻・466号. 12-16 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S.INABA, H.KUMAZAKI AND K.HANE: "FABRICATION OF MICRO STRUCTURE OBJECTS USING OPTICAL TRAP AND LASEER BEAM LITHOGRAPHY"Journal of the Japan Society for Technology of plasticity. Vol.40, No.466. 12-16 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 稲葉成基: "光トラップ法と光造形法を用いたマイクロ構造物の製作"塑性と加工(日本塑性加工学会誌). 40巻466号. 12-16 (1999)

    • Related Report
      2000 Annual Research Report
  • [Publications] 稲葉成基: "光トラップ法と光造形法を用いたマイクロ構造物の製作"塑性と加工(日本塑性加工学会誌). 40・466. 12-16 (1999)

    • Related Report
      1999 Annual Research Report

URL: 

Published: 1998-04-01   Modified: 2016-04-21  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi