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Prototype Fabrication Research of Ultra-sensitive Optical Sensor Using Charging Effect of Quantum Dots

Research Project

Project/Area Number 10555096
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Electronic materials/Electric materials
Research InstitutionHokkaido University

Principal Investigator

YOH Kanji  RCIQE., Hokkaido Univ. Pro., 量子界面エレクトロニクス研究センター, 教授 (60220539)

Co-Investigator(Kenkyū-buntansha) YANO Kazuo  Central Research Lab., Hitachi Ltd., Senior Res., 中央研究所・システムLSI研究室, 主任研究員
HIRAKAWA Kazuhiko  IIS., University of Tokyo, Asso. Pro., 生産技術研究所, 助教授 (10183097)
Project Period (FY) 1998 – 1999
Project Status Completed (Fiscal Year 1999)
Budget Amount *help
¥11,600,000 (Direct Cost: ¥11,600,000)
Fiscal Year 1999: ¥4,700,000 (Direct Cost: ¥4,700,000)
Fiscal Year 1998: ¥6,900,000 (Direct Cost: ¥6,900,000)
KeywordsSelf-assembled InAs Quantum Dot / Single Electron Device / Quantum Dot / Quasi 1-Dimensional Transistor Structure / Ultrasensitive Optical Sensor / Charging Effect / Self-organization / Ultra-sensitive Sensor
Research Abstract

We have investigated the electronic states of self-assembled InAs dots through electron tunneling spectroscopy and conductance spectroscopy. Both types of measurements were performed based on the built-in device structures which were specially designed together with the self-assembled quantum dots. Both methods plays crutial role to investigate electronic states in the self assembled InAs dots because electron states can be directly monitored unlike commonly performed optical methods such as the photoluminescence measurements. Major results are listed as follows. (I) In order to clarify the effects of dot size variations on the performance of high resolution sensors based on charging effects, we have verified electronic states (1s-like, 1p-like, 1d-like, 2s-like states) and their magnetic fields dependence and that the variations were well resolved by the present electron tunneling method. The average wave function extent in the dots were estimated by the observation of diamagnetic shi … More fts and the results were well accounted for by the estimation based on the dot size estimated by the AFM measurements. The tunneling spectroscopy results were found to be consistent with the far-infrared absorption experiment which were performed by Professor Hirakawa who is one of the member investigators of the present projects. (ii) In order to overcome the size variation effects of the quantum dots, we have proposed and investigated the new device structure which contains several thousands of dots in one device and measures averaged "single dot" states through channel conductance. In addition to the the feature of aviding the dot size variation, the present device structure has also an advantage of increasing the small scattering cross-sections which is the major weakness of the ultra-sensitive optical sensors using charging effects. The present device was verified to be sensitive enough to monitor the electron charging states of an average "single dot". This was the first demonstration to observe shell structures by the built-in conductance methods using heterojunction transistor structures. Less

Report

(3 results)
  • 1999 Annual Research Report   Final Research Report Summary
  • 1998 Annual Research Report
  • Research Products

    (32 results)

All Other

All Publications (32 results)

  • [Publications] Kanji Yoh: "Self-assembled InAs dots and quantum wires fabricated on patterned (311)A GaAs substrates by molecular beam epitaxy"J.Electronic Materials. 28. 457-465 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Kanji Yoh: "Crossover from Coulomb blockade to single electron memory mode in a d-dopedchannel GaAs splitgate transistor embedded with InAs dots in adjacent to channel"The Physics of Semiconductors (World Scientific). (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] S.Takabayashi: "Structual and transport characterization of AlGaAs/GaAs quantum wires formed by selective doping mechanism"Inst.Phys.Conf.Ser.. 162. 391-396 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Kanji Yoh: "Self-assembled InAs dots and quantum wires fabricated on patterned (311)A GaAs substrates by molecular beam epitaxy"J.Crystal Growth. 201/202. 1164-1167 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Kanji Yoh: "Resonant tunneling spectroscopy of InAs quantum dots buried in GaAs"Physica B. 272. 24-27 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Kanji Yoh: "Single Electron Charging of InAs Quantum Dots Characterized by d-doped Channel Conductivity"Physica E. (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Kanji Yoh: "Conductance Spectroscopy of InAs Quantum dots Buried in GaAs"Physica E. (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] S.-W.Lee: "Bound-to-continuum intersubband photoconductivity of self-assembled InAs quantum dots in modulation-doped heterostructures"Appl.Phys.Lett.. 75. 1428-1430 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Kanji Yoh: "Resonant tunneling through coupled InAs quantum dots"Physica B. 249-251. 243-246 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Kanji Yoh, Toshiya Saitoh, Arata Tanimura, Ryuusuke Nakasaki and Hironobu Kazama: "Self-assembled InAs dots and quantum wires fabricated on patterned (311)A GaAs substrates by molecular beam epitaxy"J. Electronic Materials. vol.28, No.5. 457-465 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Kanji Yoh and Sanshiro Shiina: "Crossover from Coulomb blockade to single electron memory mode in a d-dopedchannel GaAs split-gate transistor embedded with InAs dots in adjacent to the channel"The Physics of Semiconductors (World Scientific, 1999 ISBN : 98 1 -02-4030-9 (CD)).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] S. Takabayashi, Yoshiaki Kitasho, Hironobu Kazama and Kanji Yoh: "Structural and transport characterization of AlGaAS/GaAS quantum wires formed by selective doping mechanism"Inst. Phys. Conf. Ser.. No.162. 391-396 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Kanji Yoh, Ryusuke Nakasaki and Shingo Takabayashi: "Self-assembled InAs dots and quantum wires fabricated on patterned (311)A GaAs substrates by molecular beam epitaxy"J.Crystal Growt. 201/202. 1164-1167 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Kanji Yoh and Yoshiyuki Kitasho: "Resonant tunneling spectroscopy of InAs quantum dots buried in GaAs"Physica B. vol.272. 24-27 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Kanji Yoh, Hironobu Kazama and Takaya Nakano: "Resonant tunneling through coupled InAs quantum dots"Physica B. vol.249-251. 243-246 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Kanji Yoh and Hironobu Kazama: "A Single Electron Charging of InAs Quantum Dots Characterized by d-doped Channel Conductivity"Physica E. (in press). (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Kanji Yoh and Hironobu Kazama: "Conductance Spectroscopy of InAs Quantum dots Buried in GaAs"Physica E. (in press). (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] S.-W.Lee, K.riirakawa, and Y.Shimada: "Bound-to-continuum intersubband photoconductivity of self-assembled InAs quantum dots in modulation-doped heterostructures"Appl. Phys. Lett.. vol.75. 1428-1430 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Kanji Yoh: "Self-assembled InAs dots and quantum wires fabricated on patterned(311)A GaAs substrates by molecular beam epitaxy"J. Electronic Materials. 28. 457-465 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Kanji Yoh: "Crossover from Coulomb blockade to single electron memory mode in a d-doped channel GaAs split-gate transistor embedded with InAs dots in adjacent to the channel"The Physics of Semiconductors (World Scientific). (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] S. Takabayashi: "Structural and transport characterization of AlGaAs/GaAs quantum wires formed by selective doping mechanism"Inst. Phys. Conf. Ser.. 162. 391-396 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Kanji Yoh: "Self-assembled InAs dots and quantum wires fabricated on patterned (311)A GaAs substrates by molecular beam epitaxy"J. Crystal Growth. 201/202. 1164-1167 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Kanji Yoh: "Resonant tunneling spectroscopy of InAs quantum dots buried in GaAs"Physica B. 272. 24-27 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Kanji Yoh: "Single Electron Charging of InAs Quantum Dots Characterized by d-doped Channel Conductivity"Physica E. (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] Kanji Yoh: "Conductance Spectroscopy of InAs Quantum dots Buried in GaAs"Physica E. (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] S.-W. Lee: "Bound-to-continuum intersubband photoconductivity of self-assembled InAs quantum dots in modulation-doped heterostructures"Appl. Phys. Lett. 75. 1428-1430 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Kanji Yoh: "Resonant tunneling through coupled InAs quantum dots" Physica B. 249-251. 243-246 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 高林深悟: "ラテラルnipi構造の作製とその静電気力顕微鏡による評価" 信学技法 Technical Report of IEICE. ED98-85. 9-16 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Kanji Yoh: "Self-assembled InAs dots and quantum wires fabricated on patterned(311)A GaAs" J.Electronic Materials. (in press). (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] Kanji Yoh: "Crossover from Coulomb blockade to single electron memory mode in a δ-dopedchannel GaAs split-gate transistor embedded with InAs dots in adjacent to the channel" The Physics of Semiconductors(World Scientific). (in press). (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] S.Takabayashi: "Structural and transport characterization of AlGaAs/GaAs quantum wires formed by selective doping mechanism" Inst.Phys.Conf.Ser.(IOP publishing). (in press). (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] Kanji Yoh: "Self-assembled InAs dots and quantum wires fabricated on patterned (311)A GaAs substrates by molecular beam epitaxy" J.Crystal Growth. (in press). (1999)

    • Related Report
      1998 Annual Research Report

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Published: 1998-04-01   Modified: 2016-04-21  

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