• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Development of scanning near-field optical microscope with a micro rasonator and a optical resonator

Research Project

Project/Area Number 10555121
Research Category

Grant-in-Aid for Scientific Research (B).

Allocation TypeSingle-year Grants
Section展開研究
Research Field 電子デバイス・機器工学
Research InstitutionOsaka University

Principal Investigator

OSHIKANE Yasushi  Osaka Univ., Grad. School of Eng., Assist. Prof., 大学院・工学研究科, 助手 (40263206)

Co-Investigator(Kenkyū-buntansha) INOUE Haruyuki  Osaka Univ., Grad. School of Eng., Assist. Prof., 大学院・工学研究科, 助手 (30304009)
ENDO Katsuyoshi  Osaka Univ., Grad. School of Eng., Associ. Prof., 大学院・工学研究科, 助教授 (90152008)
KATAOKA Toshihiko  Osaka Univ., Grad. School of Eng., Prof., 大学院・工学研究科, 教授 (50029328)
Project Period (FY) 1998 – 2000
Project Status Completed (Fiscal Year 2000)
Budget Amount *help
¥12,600,000 (Direct Cost: ¥12,600,000)
Fiscal Year 2000: ¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 1999: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 1998: ¥10,700,000 (Direct Cost: ¥10,700,000)
KeywordsScanning Near-field Optical Microscope / spherical micro resonator / Whispering Gallery Modes / Morphology Dependent Resonances / photoresist / HeCd laser / micro protrusion / three dimensional boundary element method / エバネセント場 / Tiサファイアレーザー / WGMモード / 光の近接場 / 走査系近接場光学顕微鏡 / SNOM / ポリスチレン微小球 / 進行波共振 / 時間領域差分法
Research Abstract

There are many types of Scanning Near-field Optical Microscopes with differenet methods of near-field creation. But most of them can not accept both high spatial resolutions and variety of sample materials. In this report, our proposal of a prototypical SNOM probe consists of a micro resonator and a micro protrusion may solve the problem.
Optical micro fabrication which has to be applied to optical waveguides and optical memories needs localization and enhancement of near-field. We have designed and created a new probe, as desribed above, for these purposes. A series of trial experiments showed that there are many sources of stray lights or light scattering around the probe. So a spherical micro resonator is formed from an single mode optical fiber, which was stretched by hand and heated with CO2 laser irradiation. As a result, the glass resonator had a supporting spoke. The end of the spoke was fixed with bond, and the resonator was installed on the quartz substrate to couple an illumi … More nation light without any unexpected light sources. In the next step, the micro protrusion was created from a photoresist with a focal spot of HeCd laser illumination. The laser was focused with a microscope objective, therefore the size of the protrusion was about 1 micron. The light scattering from the micro protrusion was observed by scanning the wavelength of Ti : Sapphire laser, because an appropriate wavelength caused an optical resonance inside the micro resonator. This result confirmed that the prototypical probe might acts as a SNOM probe.
We scanned a surface of commercial compact disc as a standard sample with this probe. On the CD surface, there are many pits recorded with well-known sizes (depth=100nm, width=500-800nm, length=870-3180nm). As a result, the pits were sanned clearly, and we confirmed the validity of the prototypical probe. Further improvements will be achieved by an optimization of the probe configuration with computer aided designing as follows.
We developed a computer simulation code with three dimensional boudary element method to analyze an electromagnetic wave propagation around the probe. This code simulated a near-field phenomenon of approaching of a sample to a probe. The increase of light scattering from the protrusion with decreasing the distance between probe and sample was simulated well. And also, the influence of the shape and the material of the protrusion on the light scattering was found. This result expected an importance of the optical resonance in the protrusion which size is below the light wavelength.
We conclude that this research created an prototypical novel probe for SNOM, and the research results gave us an polestar in further improvement of the SNOM probes for optical nano fabrication. Less

Report

(4 results)
  • 2000 Annual Research Report   Final Research Report Summary
  • 1999 Annual Research Report
  • 1998 Annual Research Report
  • Research Products

    (27 results)

All Other

All Publications (27 results)

  • [Publications] Y.Oshikane et al.: "Scanning Near-field Optical Microscope with a Small Spherical Protrusion Probe Excited with WGM resonances(invited)"Special issue of Near Field Optics in Optical Memory and Neural Networks. Vol.9,No.3. 147-168 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Arima et al.: "Scanning Tunneling Microscopy Study Of Hydrogen-terminated Si(001) Surfaces After Wet Cleaning"Surface Science. Vol.446,No.1-2. 128-136 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Y.Oshikane et al.: "A prototypical resonant microcavity probe for scanning near-field optical microscope"Proc.of 6th International Conference on Near Field Optics and Related Techniques (The Netherlands). 142-142 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 押鐘 ほか: "微小球内のWGM共振を利用した走査型近接場光学顕微鏡の開発"2000年度精密工学会秋季大会学術講演会講演論文集. G40 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 押鐘 ほか: "共振球プローブを用いた走査型近接場光学顕微鏡の開発-標準試料の走査結果とプローブの性能評価-"2000年度精密工学会春季大会学術講演会講演論文集. L68 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 片岡,押鐘: "近接場ナノフォトニクス入門(大津,河田編)"オプトロニクス社. 67-73 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Yasushi Oshikane, Toshihiko Kataoka, Katsuyoshi Endo, and Haruyuki Inoue: "Scanning Near-field Optical Microscope with a Small Spherical Protrusion Probe Excited with WGM resonances (invited)"Special issue of Near Field Optics in Optical Memory and Neural Networks. Vol.9, No.3. 147-168 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Kenta Arima, Katsuyoshi Endo, Toshihiko Kataoka, Yasushi Oshikane, Haruyuki Inoue, and Yuzo Mori: "Scanning Tunneling Microscopy Study Of Hydrogen-terminated Si (001) Surfaces After Wet Cleaning"Surface Science. Vol.446, No.1-2. 128-136 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Yasushi Oshikane, Toshihiko Kataoka, Katsuyoshi Endo, and Haruyuki Inoue: "A prototypical resonant microcavity probe for scanning near-field optical microscope"Proc. of 6th International Conference on Near Field Optics and Related Techniques (The Netherlands). 142 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Yasushi Oshikane et al.: "Scanning Near-field Optical Microscope with a Small Spherical Protrusion Probe Excited with WGM resonances (invited)"Special issue of Near Field Optics in Optical Memory and Neural Networks. vol.9,No.3. (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Yasushi Oshikane et al.: "A prototypical resonant microcavity probe for scanning near-field optical microscope"Proc.of 6th International Conference on Near Field Optics and Related Techniques (The Netherlands). 142-142 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 押鐘 他: "微小球内のWGM共振を利用した走査型近接場光学顕微鏡の開発"2000年度精密工学会秋季大会学術講演会講演論文集. G40 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 押鐘 他: "共振球プローブを用いた走査型近接場光学顕微鏡の開発-標準試料の走査結果とプローブの性能評価-"2000年度精密工学会春季大会学術講演会講演論文集. L68 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Kenta Arima et al.: "Scanning Tunneling Microscopy Study Of Hydrogen-terminated Si(001)Surfaces After Wet Cleaning"Surface Science. Vol.446,No.1-2. 128-136 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 片岡俊彦,押鐘寧: "近接場ナノフォトニクス入門(大津,河田編)"オプトロニクス社. 133 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Y. Oshikane et al.: "3D-FDTD and experimental analysis of a resonant microcavity probe for high-resolution SNOM"SPIE Proc. v. 3791. vol. 3791. 57-61 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] H. Nakagawa et al.: "Development of a High Sensitive Probe for Scanning Near-Field Optical Microscope with a Micro Cavity"Proc. of the 9th ICPE (Osaka, Japan). 905-910 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 片岡俊彦: "「走査型近接場光学顕微鏡による微細形状計測」"光技術コンタクト. vol. 37, No. 8. 523-528 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 押鐘 他: "「SNOM用微小共振球プローブの電磁場解析による特性診断」"1999年度精密工学会秋季大会学術講演会講演論文集. 74 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 中川 他: "「微小共振球プローブを用いた走査型近接場光学顕微鏡の特性」"1999年度精密工学会秋季大会学術講演会講演論文集. P75 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 押鐘 他: "「共振球プローブを用いた走査型近接場光学顕微鏡の開発 -標準試料の走査結果とプローブの性能評価-」"2000年度精密工学会春季大会学術講演会講演論文集. L68 (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] 中川 他: "微小共振球プローブを用いた走査型近接場光学顕微鏡の開発" 1998年度精密工学会秋季大会学術講演会講演論文集. J62 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 押鐘 他: "狭帯域化半導体レーザーによるミクロンオーダの微小球内の進行波共振とその制御" 第59回応用物理学会学術講演会講演予稿集. 第3分冊. 917-917 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Y.Oshikane et al.: "3D-Electromagnetic field analysis of a micro-cavity probe for high resolution SNOM" Technical Digest of the 5th International Conference on Near Field Optics(Shirahama,1998). 12-13 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] H.Nakagawa et al.: "Scanning near-field optical microscope with a micro-cavity probe" Technical Digest of the 5th International Conference on Near Field Optics(Shirahama,1998). 179-180 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] K.Endo et al.: "Atomic structures of hydrogen-terminated Si(001) surfaces after wet cleaning by scanning tunneling microscopy" Appl.Phys.Lett.Vol.73,No.13. 1853-1855 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 押鐘 他: "Whispering Gallery Modesにより微小球表面に発生する近接場と物質との相互作用" 第46回応用物理学関係連合講演会講演予稿集. 第3分冊. E19 (1999)

    • Related Report
      1998 Annual Research Report

URL: 

Published: 1998-04-01   Modified: 2016-04-21  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi