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DEVELOPMENT OF HIGH PERFORMANCE STRESS SENSOR USING SEMICONDUCTING BARIUM TITANATE THIN WIRES WITH GIANT PIEZORESISTIVE EFFECTS

Research Project

Project/Area Number 10555214
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Inorganic materials/Physical properties
Research InstitutionUNIVERSITY OF TOKYO

Principal Investigator

KUWABARA Makoto  UNIVERSITY OF TOKYO, GRADUATE SCHOOL OF ENGINEERING, PROFESSOR, 大学院・工学系研究科, 教授 (40039136)

Co-Investigator(Kenkyū-buntansha) MATSUMOTO Kazunori  SUMITOMO METAL MIMING, CO., SENIORRESEARCHER, 中央研究所, 主任研究員
MATSUDA Hirofumi  UNIVERSITY OF TOKYO, GRADUATE SCHOOL OF ENGINEERING, RESEARCH ASSOCIATE, 大学院・工学系研究科, 助手 (00282690)
宮澤 薫一  東京大学, 大学院・工学系研究科, 講師 (60182010)
Project Period (FY) 1998 – 1999
Project Status Completed (Fiscal Year 1999)
Budget Amount *help
¥12,700,000 (Direct Cost: ¥12,700,000)
Fiscal Year 1999: ¥4,500,000 (Direct Cost: ¥4,500,000)
Fiscal Year 1998: ¥8,200,000 (Direct Cost: ¥8,200,000)
KeywordsPiezoresistive effect / Barium titanate / Ceramic wires / Single grain boundary / PTCR / Slurry-drawing method / Ferroelectric domain / Stress sensors / 強誘電体 / ドメイン構造 / 類似粒界 / セラミック細線 / 弾一粒界 / ゾルゲル法
Research Abstract

The objective of this study is to clear the mechanism of the piezoresistive effect in semiconducting barium titanate ceramics and to establish a procedure for producing high-peformance stress sensors using barium titanate thin wires with a single grain boundary structure, which exhibit a significantly large piezoresistive effect at room temperature.
The obtained results are summarized as follows :
1) Preparation of semiconducting barium titanate thin ceramic wires : We succeeded in producing semiconducting barium titanate thin ceramic wires, with a diameter of 10-20 μm, consisting of single grains joined together in series by drawing green fibers from slurry, followed by sintering at 1370℃ in air.
2) Observation of giant piezoresistive effects : An extremely large piezoresistive effect of more than 10^7 in gauge factor (defined as the resistance change ratio per strain) was observed for some of the single grain boundaries formed in semiconducting barium titanate thin ceramic wires produce … More d.
3) Analysis of the 90゜ domain wal motion under mechanical stresses : We directly observed how 90゜ domain walls move in a BaTiO_3 ceramic wire under tensile and compressive stresses with a polarizing microscope. In this experiment, we found that just as a 90゜ domain wall arrived at a grain boundary, associated with an instantaneous change of the domain morphology in the vicinity of the grain boundary, the grain boundary resistivity drastically changed. It has been for the first time confirmed that the piezoresistivity in semiconducting barium titanate ceramics is directly connected with the change of the domain morphology in the vicinity of grain boundaries.
4) Analysis of the piezoresistivity mechanism : We were able to successfully determine the direction of spontaneous polarization in the two ferroelectric domains adjacent to a 90゜ domain wall moving in a single grain under mechanical stresses. From the obtained results it has been found that the meachanism of the piezoresistivity in semiconducting barium titanate ceramics can be interpreted by a surface charge compensation model by spontaneous polarization at grain boundaries.
5) Est ablishment of a procedure for producing high-performance stress sensor devices : We made prototype stress sensor devices using semiconducting barium titanate thin ceramic wires, which exhibit a large piezoresistive effect at room temperature, and confirmed their stress sensor function working as expected though some problems such as reproducibility remain. Less

Report

(3 results)
  • 1999 Annual Research Report   Final Research Report Summary
  • 1998 Annual Research Report
  • Research Products

    (34 results)

All Other

All Publications (34 results)

  • [Publications] H.Matsuda,K.Hamamoto,M.Kuwabara: "Stress Induced Resistivity Anomaly in Semiconducting BaTiO_3 Ceramic Wire"J.Am.Ceram.Soc.. 81. 229-232 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M>Kuwabara,H.Matsuda,K.Hamamoto: "Role of Spontaneous Polarization in the Grain Boundary Properties in Barium Titanate Ceramics."Proc.of US-Japan Workshop on Electrically Active Ceramic Interfaces. 129-132 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M.Kuwabara: "Grain-Boundary Electronic Properties in Semiconducting Barium Titanate Ceramics"Proc.Conf.Mater.Technology,CIMTEC'98. 125-133 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M.Kuwabara,H.Matsuda,K.Hamamoto: "Giant Piezoresistive Effects in Single Grain Boundaries of Semiconducting Barium Titanate Ceramics"J.Electroceramics. 4. 99-103 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M.Kuwabara,K.Hamamoto: "Domain-Wall Motion under Mechanical Stresses and Giant Piezoresistivity in Thin Barium Titanate Ceramic Bars"J.Intelligent Mater.Sys.and Structures. 10. 434-438 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] K.hamamoto,H.Matsuda,K.Miyazawa,,M.Kuwabara: "Piezoresistance in Thin BaTiO_3 Ceramic Bars and Their Application"Proc.9th US-Japan Seminar on Diele.& Piezoelectric Ceramics. 441-444 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 桑原 誠: "フロンティアセラミックスが拓く新世紀"工業調査会. 20 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M.Kuwabara, H.Matsuda, Y.Ohba: "PTCR-Type (Ba, S) Tio_3 Varistors by Single-Step Firing in Air"Ceram.Trans.. 88. 251-262 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M.Kuwabara, H.Matsuda and K.Hamamoto: "Role of Spontaneous Polarization in the Grain Boundary Properties in Barium Titanate Ceramics"Proc.of US-Japan Workshop on Elect.Active Ceram.Interfaces. 129-132 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M.Kuwabara: "Grain-Boundary Electronic Properties in Semiconducting Barium Titanate Ceramics"Proc.CIMTEC '98. 125-133 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H.Shimooka, K.Yamada, S.Takahashi, M.Kuwabara: "Preparation of Transparent, Partially-Crystallized BaTiO_3 Monolithic Xerogels by Sol-Gel Processing"J.Sol-Gel Sci. and Technology. 13. 873-876 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M.Kuwabara: "Domain-Wall Motion under Mechanical Stresses and Giant Piezoresistivity in Thin Barium Titanate Ceramic Bars"Proc.4th ICIM. 5-7 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H.Matsuda, M.Kuwabara, et al.: "Optical Absorption in Sol-Gel-Derived Crystalline Barium Titanium Fine Particles"J.Am.Ceram.Soc.. 81. 3010-3012 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H.Matsuda, T.Kobayashi, M.Kuwabara, et al.: "Structural Effects on Optical Properties of Sol-Gel Derived Transparent Monolithic BaTiO_3 Gel"Publ.Ceram.Soc.Jpn.. 1. 3-8 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M.Kuwabara, H.Matsuda, and Y.Ohba: "Varistor Characteristics in PTCR-Type (Ba, Sr)TiO_3 Ceramics Prepared by Single-Step Firing in Air."J.Mater.Sci.. 34. 2635-2639 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H.Matsuda, T.Kobayashi, H.Shiibashi, M.Kuwabara: "Optical Properties of Crystalline Gels of Barium Titanate System"Publ.Ceram.Soc.Jpn.. 5. 23-26 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] T.Kobayashi, H.Matsuda, M.Kuwabara: "Shift of Optical Absorption Edge in Sol-Gel Derived Transparent BaTiO_3 Gels during Aging"J.Sol-Gel Sci. and Technology. 16. 165-171 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M.Kuwabara, H.Matsuda, K.Hamamoto: "Giant Piezoresistive Effects in Single Grain Boundaries of Semiconducting Barium Titanate Ceramics"J.Electroceramics. 4. 99-103 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M.Kuwabara, K.Hamamoto: "Domain-Wall Motion under Mechanical Stresses and Giant Piezoresistivity in Thin Barium Titanate Ceramic Bars"J.Int elligent Mater.Sys. and Structures. 10. 434-438 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] K.Hamamoto, H.Matsuda, K.Miyazawa, M.Kuwabara: "Piezoresistance in Thin BaTiO_3 Ceramic Bars and Their Applications"Proc.9th US-Japan Seminar on Diele. & Piezoelectric Ceramics. 441-444 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H.Matsuda, N.Kobayashi, T.Kobayashi, K.Miyazawa M.Kuwabara: "Room-Temperature Synthesis of Crystalline Barium Titanate Thin films by High-Concentration Sol-Gel Method"J.Non-Cryst.Solids. 271. 162-166 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] K.Miyazawa, M.Kuwabara: "Low Temperature Fabrication of PZT thin Films"Trans.Mater.Res.Soc.Jpn.. 25. 189-192 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M.Kuwabara: "Domain-Wall Motion under Mechnical Stresses and Giant Piezoresistivity in Thin Barium Titanate Ceramic Bars"Pro.4th Int.Conf.Intelligent Mater. 14-17 (1998)

    • Related Report
      1999 Annual Research Report
  • [Publications] H.Matsuda,K.Hamamoto,M.Kuwabara: "Stress Induced Resistivity Anomaly in Semiconducting BaTiO3 Ceramic W"J.Am.Ceram.Soc.. 81・1. 229-232 (1998)

    • Related Report
      1999 Annual Research Report
  • [Publications] M.Kuwabara,H.Matsuda,K.Hamamoto: "Giant Piezoresistive Effects in Single Grain Boundaries of Semiconducting Barium Titanate Ceramics"J.Electroceramics. 4,suppl.1. 99-103 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] K.Hamamoto,H.Matsuda,K.Miyazawa,M.Kuwabara: "Piezoresistance in Thin BaTiO3 Ceramic Bars and Their Applications"Proc.9th US-Japan Seminar on Diele.&Piezoelectric Ceramics. 441-444 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] M.Kuwabara,K.Hamamoto: "Domain-Wall Motion under Mechanical Stresses and Giant Piezoresistivity in Thin Barium Titanate Ceramic Bars"J.Intelligent Mater.Sys.Str.. (in press). (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] 桑原 誠: "巨大機能物性発現セラミックスの創製と応用へのインパクト"化学工業. 50・11. 1月7日 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 桑原 誠: "フロンティアセラミックスが拓く世界"工業調査会 3章 20. (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] H.Matsuda,K.Hamamoto,M.Kuwabara: "Stress Induced Resistivity Anomaly in Semiconducting BaTiO_3 Ceramic Wire" J.Am.Ceram.Soc.81・1. 229-232 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] M.Kuwabara,H.Matsuda,K.Hamamoto: "Role of Spontaneous Polarization in the Grain Boundary Properties in Barium Titanate Ceramics" Proc.US-Japan Workshop on Ele.Active Ceram.Surf.46-49 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] M.Kuwabara: "Grain Boundary Electronic Properties in Semiconducting Barium Titanate Ceramics" Proc.CIMTEC'98. 14-19 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] M.Kuwabara: "Domain-Wall Motion under Mechanical Stress and Giant Piezoresistivity in Thin Barium Titanate Ceramic Bars" Proc.4th ICIM'98. 14-17 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] M.Kuwabara,H.Matsuda,K.Hamamoto: "Giant Piezoresistive Effect in Single Grain Boundaries of Semiconducting Barium Titanate Ceramics" J.Electroceramics. (in press). (1999)

    • Related Report
      1998 Annual Research Report

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Published: 1998-04-01   Modified: 2016-04-21  

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