| Project/Area Number |
10558066
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 展開研究 |
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| Research Field |
プラズマ理工学
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| Research Institution | NAGASAKI UNIVERSITY |
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Principal Investigator |
FUJIYAMA Hiroshi NAGASAKI UNIVERSITY, PROFESSOR, 工学部, 教授 (20112310)
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| Co-Investigator(Kenkyū-buntansha) |
KUWAHARA Hajime NISSIN ELECTRIC CO.LTD.GENERAL MANAGER, 知的財産部, 部長(研究職)
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| Project Period (FY) |
1998 – 1999
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| Project Status |
Completed (Fiscal Year 1999)
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| Budget Amount *help |
¥6,600,000 (Direct Cost: ¥6,600,000)
Fiscal Year 1999: ¥1,300,000 (Direct Cost: ¥1,300,000)
Fiscal Year 1998: ¥5,300,000 (Direct Cost: ¥5,300,000)
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| Keywords | ECR PLASMA / MIRROR MAGNETIC FIELD / SPUTTERING / NARROW TUBE COATING / INNER COATING / プラズマプロセス / 反応性スパッタリング / 機能性薄膜 / PVD |
|---|
| Research Abstract |
COAXIAL ELECTRON CYCLOTRON RESONANCE PLASMAS WITH MIRROR-TYPE MAGNETIC FIELD HAVE BEEN DEVELOPED TO GENERATE AND TRANSPORT OF HIGH DENSITY PLASMAS IN MILIMETER-SIZE NARROW TUBE FOR LOW PRESSURE AND NARROW-GAP CONDITIONS.MIRROR-TYPE MAGNETIC FIELD CAN DECREASE AN ELECTRON LOSS IN THE AXIAL DIRECTION.BY AXIAL SCANNING OF THE MIRROR-TYPE MAGNETIC FIELD, IT HAS BEEN REALIZED THE SPUTTER COATING OF INSIDE WALL OF NARROW TUBES.
MAIN RESULTS OF THE ARE SUMMRIZED AS FOLLOWS ;
1) GENERATION POINTS OF ECR PLASMA STRONGLY DEPENDS ON THE GAS PRESSURE.IN THE LOW PRESSURE CONDITION, ECR PLASMA COULD BE GENERATED 2 METER AWAY FROM A MICROWAVE INJECTION WINDOW.
2) STABLE PLASMA GENERATION WAS REALIZED AT THE LOW PRESSURE CONDITIONS BY USING MIRROR-TYPE MAGNETIC FIELD.
3) IT WAS SUCCESSFULLY PERFORMED TITANIUUM INNER COATING OF METALLIC TUBE WITH 27MM IN INNER DIAMETER AND 2 M IN LENGTH.
4) INNER COATINGS OF BOTH GLASS AND FERROMAGNETIC TUBES WERE ALSO REALIZED BY THIS METHOD.
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