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In situ Monitoring of Surface Reaction of III Nitrides Using Gravimetric and Optical Monitoring Methods

Research Project

Project/Area Number 10650003
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionTokyo University of Agriculture & Technology

Principal Investigator

SEKI Hisashi  Tokyo Univ. of Agriculture & Technology, Department of Applied Chemistry, Prof., 工学部, 教授 (70015022)

Co-Investigator(Kenkyū-buntansha) KOUKITU Akinori  Tokyo Univ. of Agriculture & Technology, Department of Applied Chemistry, Associate Prof., 工学部, 助教授 (10111626)
Project Period (FY) 1998 – 1999
Project Status Completed (Fiscal Year 1999)
Budget Amount *help
¥4,100,000 (Direct Cost: ¥4,100,000)
Fiscal Year 1999: ¥1,200,000 (Direct Cost: ¥1,200,000)
Fiscal Year 1998: ¥2,900,000 (Direct Cost: ¥2,900,000)
KeywordsIII nitrides / vapor phase epitaxy / compound semiconductor / gravimetric monitoring / in situ monitoring / GaN / InN / 窒化物 / 表面反応 / 原子層エキタピシー / 表面光吸収法 / 緩衝層 / GaAs基板 / 反応過程
Research Abstract

In this study, the growth mechanisms of GaN and InN were investigated with atomic lavel. In order to clarify the growth mechanism, two in situ systems, gravimetric and optical monitorings, were performed. In situ gravimetric monitoring provides the direct information about weight change of the substrate with atomic level, and in situ optical monitoring provides the dynamic information about the reaction on the surface.
The results are shown as follows.
1. At first the growth conditions for the buffer layer were optimized. It was found that high quality GaN epitaxial layer can be growth on the buffer layer of 20-30nm thick.
2. Atomic leyer epitaxy of cubic-GaN on GaAs was achieved, and it was found that high quality cubic-GaN can be growth by this growth method.
3. The polarity dependence of the growth rate and hydrogen-etching rate was obtained.

Report

(3 results)
  • 1999 Annual Research Report   Final Research Report Summary
  • 1998 Annual Research Report
  • Research Products

    (22 results)

All Other

All Publications (22 results)

  • [Publications] A. Koukitu: "Thermodynamic Study on Phase Separation during MOVPE Growth of InxGa1-xN"J. Crystal Growth. 189/190. 13-18 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] N. Takahashi: "Vapor-phase Epitaxy of InxGa1-xN using chloride Sources"J. Crystal Growth. 189/190. 37-41 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 纐纈 明伯: "窒化物半導体気相成長エピタキシーの熱力学"日本結晶成長学会誌. 25. 81-98 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] A. Koukitu: "Thermodynamic Study on the Role of Hydrogen during the MOVPE Growth of Group III Nitrides"J. Crystal Growth. 197. 99-105 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] A. Koukitu: "Thermodynamic Analysis on the MOVPE Growth of Nitride Semiconductors Using Hydrazine"Physica Status Solidi. 216. 707-712 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] A. Koukitu: "Halogen-Transport Atomic-Layer Epitaxy of Cubic GaN Monitored by In Situ Gravimetric Method"Jpn. J. Appl. Phys.. 38. 4980-4982 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] T. Taki: "Investigation of Thickness Dependence of Hexagonal Component in Cubic GaN film Growth on GaAs (001) by MOVPE"Blue Laser and Light Emitting Diodes II, Ohmsha. 113-116 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y. Kumagai: "Investigation of Substrate Orientation Dependence for the Growth of GaN on GaAs (111)A and (111)B Surfaces by Metalorganic Hydrogen chloride Vapor-Phase Epitaxy"JPN. J. Appl. Phys.. 39. L149-L151 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y. Kumagai: "In Situ Gravimetric Monitoring of Halogen Transport Atomic Layer Epitaxy of Cubic-GaN"Applied Surface Science. (in press).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] A. Koukitu, H. Seki: "Thermodynamic Study on Phase Separation during MOVPE Growth of InxGal-xN"J. Crystal Growth. 189/190. 13-18 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] N. Takahashi, N. Matsumoto, A. Koukitu, H. Seki: "Vaporphase Epitaxy of InxGal-xN using Chloride Sources"J. Crystal Growth. 189/190. 37-41 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] A. Koukitu, T. Taki, N. Takahashi, H. Seki: "Thermodynamic Study on the Role of Hydrogen during MOVPE Growth of Group III Nitrides"J. Crystal Growth. 197. 99-105 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] A. Koukitu, Y. Kumagai, N. Kubota, H. Seki: "Thermodynamic Analysis on the MOVPE Growth of Nitride Semiconductors Using Hydrazine"Physica Status Solidi. 216. 707-712 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] A. Koukitu, Y. Kumagai, T. Taki, H. Seki: "Halogen-Transport Atomic-Layer Epitaxy of Cubic GaN Monitored by In Situ Gravometric Method"Jpn. J. Appl. Phys.. 38. 4980-4982 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] T. Taki, A. Koukitu, H. Seki: "Investigation of Thickness Dependence of Hexagonal Component in Cubic GaN Films Growth on GaAs(001) by MOVPE"Blue Laser and Light Emitting Diodes II, Ohmsha. ISBN4・274・90245・5 C3050. 113-116 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y. Kumagai, A. Koukitu, and H. Seki: "Investigation of Substrate Orientation Dependence for the Growth of GaN on GaAs(111)A and (111)B Surface by Metalorganic Hydrogen Chloride Vapor-Phase Epitaxy"Jpn.J.Appl.Phys. 39. L149-L151 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y. Kumagai A. Koukitu, and H. Seki: "In Situ Gravimetric Monitoring of Halogen Transport Atomic Layer Epitaxy of Cubic-GaN"Applied Surface Science. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] A.Koukitu: "Halogen-Transport Atomic-Layer Epitaxy of Cubic-GaN Monitored by In Situ Gravimetric Method."Japanese Journal of Applied Physics. 38. 4980-4982 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] A.Koukitu: "Thermodynamic Analysis on the MOVPE Growth of Nitride Semiconductors Using Hydrazine"Physica Status Solidi. 216. 707-712 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Y.Kumagai: "Investigation of Substrate Orientation Dependence for the Growth of GaN on GaAs (111)A and (111)B Surfaces by Metalorganic Hydrogen Chloride Vapor-Phase Epitaxy"Japanese Journal of Applied Physics. 39. L149-L151 (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] Y.Kumagai: "In-situ gravimetric monitoring of halogen transport atomic layer epitaxy of cubic-GaN"Applied Surface Science. (in press).

    • Related Report
      1999 Annual Research Report
  • [Publications] Tetsuya TAKI: "The study of hydrogen chemisorption on the GaAs (III) B Ga surface under demospheric pressure using the in situ optical monitoring" Extend Abstracts of the 17th Electronic Materials Symposium. 211-214 (1998)

    • Related Report
      1998 Annual Research Report

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Published: 1998-04-01   Modified: 2016-04-21  

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