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Development of Methods for the design of Microfocus Optical Systems

Research Project

Project/Area Number 10650034
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied optics/Quantum optical engineering
Research InstitutionTOHOKU UNIVERSITY

Principal Investigator

NAMIOKA Takeshi  Tohoku University, Professor Emeritus, 名誉教授 (90015743)

Co-Investigator(Kenkyū-buntansha) KOIKE Masato  Kansai Research Establishment, Advanced Photon Research Center, Japan Atomic Energy Research Institute, Senior Research Scientist, 関西研究所, 主任研究員
KINOSHITA Hiroo  Laboratory of Advanced Science and Technology for Industry, Himeji Institute of Technology, Professor, 高度産業科学技術研究所, 教授 (50285334)
YANAGIHARA Mihiro  Research Institute for Scientific Measurement, Tohoku university, Associate Professor, 科学計測研究所, 助教授 (40174552)
MASUI Shin  Research and Development Center, Sumitomo Heavy Industries Ltd., Researcher, 総合技術研究所, 研究員
Project Period (FY) 1998 – 1999
Project Status Completed (Fiscal Year 1999)
Budget Amount *help
¥3,400,000 (Direct Cost: ¥3,400,000)
Fiscal Year 1999: ¥1,600,000 (Direct Cost: ¥1,600,000)
Fiscal Year 1998: ¥1,800,000 (Direct Cost: ¥1,800,000)
KeywordsMicrofocus / Double-element optical system / Schwarzschild optics / Telecentric optical system / Ray tracing / Aberration analysis / Spot diagram / EUVL / シャバルツシルト光学系
Research Abstract

A third-order aberration theory has been developed for a plane-symmetric double-element optical system that consists of an extended source, two ellipsoidal gratings, and an image plane. Analytic formulas were derived for spot diagrams and aberration curves similar to Seidel aberrations. The theory was shown to be extended to multi-element systems by means of a recurrence formula. Analytic aberration curves were also derived, on the basis of the theory, for Schwarzschild optics as a function of axis alignment error and the distance between the centers of curvature of the concave and convex spherical mirrors. The effects of various factors on the performance of a Schwarzschild objective was further investigated by means of ray tracing on condition that the objective had a magnification of 50, a numerical aperture of 0.25, and an object-to-image distance of 〜1 m. the result showed that a spatial resolution of 30 nm could be obtained on the optical axis by arranging the mirrors non-concentrically by an amount of 0.69 mm. A design method was established for a varied-line-spacing plane grating monochromator, whose wavelength scanning was made by simple grating rotation about the surface normal. The result showed that the designed monochromator was capable of providing a high throughput in an energy range of 1-2 keV. In addition, a scalar theory was developed to estimate the optimum land-to-groove ratio and groove depth of a laminar grating. A three-aspheric-mirror optics for extreme ultraviolet lithography (EUVL) was designed, constructed, and tested. The mirrors were aligned to a precision of 3 nm RMS by successively adjusting the mirrors by amounts computed from wavefront errors measured with a Fizeau-type interferometer. The EUVL system was then tested on a synchrotron radiation beamline and showed a diffraction-limited performance of 56 nm.

Report

(3 results)
  • 1999 Annual Research Report   Final Research Report Summary
  • 1998 Annual Research Report
  • Research Products

    (89 results)

All Other

All Publications (89 results)

  • [Publications] M.Toyoda: "A soft-x-ray imaging microscope with a multilayer-coated Schwarzschild objective"Jpn. J. Appl. Phys.. (In press). (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 小池雅人: "軟X線平面結像不等間隔溝ホログラフィック回折格子の製作と評価"JAERI-Conf.. (印刷中). (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 柳原美広: "軟X線発光による界面の研究"第五回X線結像光学シンポジウム予稿集. 22-23 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 増井新: "軟X線分光光学系の収差"第五回X線結像光学シンポジウム予稿集. 56-57 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Li: "EUVL optical design for below 50nm feature size"第五回X線結像光学シンポジウム予稿集. 101-102 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 新部正人: "極端紫外光リソグラフィ用反射型マスクの評価"第五回X線結像光学シンポジウム予稿集. 103-104 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 小池雅人: "軟X線フラットフィールドホログラフィックラミナー回折格子"第五回X線結像光学シンポジウム予稿集. 105-106 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 増井新: "Plane symmetryを持つ2枚反射光学系の収差解析とその応用"第五回X線結像光学シンポジウム予稿集. 107-108 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] N.Miyata: "Buried interfaces in Mo/Si multilayers studied by soft-x-ray emission spectroscopy"Jpn. J. Appl. Phys.. 38. 6476-6478 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] S.Masui: "Geometric aberration theory of double-element optical systems"J. Opt. Soc. Am.. A16. 2253-2268 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H.Kinoshita: "Development of 3-aspherical mirror optics for extreme ultraviolet lithography"Proc. 9th Int. Conf. on Production Engineering. 9-18 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] S.Irie: "Development for the alignment procedure of three-aspherical-mirror optics"Proc. 9th Int. Conf. on Production Engineering. 67-72 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H.Kinoshita: "Progress in development of 3-aspherical-mirror optics for EUVL"Proc. SPIE. 3767. 164-171 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] T.Yamazaki: "Comparison of mechanically ruled versus holographically varied-spacing gratings for a soft x-ray flat field spectrograph"Appl. Opt.. 38. 4001-4003 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M.Koike: "Design of holographic gratings recorded with aspheric wave-front recording optics for soft X-ray flat field spectrographs"J. Electron Spectrosc. and Relat. Phenom.. 101/103. 913-918 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] S.Masui: "Aberration theory and design method of double-element optical systems"Proc. SPIE. 3737. 498-508 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] K.Murakami: "Ring-field extreme ultraviolet exposure system using aspherical mirrors"Jpn. J. Appl. Phys.. 37. 6750-6755 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 波岡武: "反射結像光学の基礎 I:フェルマーの原理"レーザー研究. 26. 476-480 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 波岡武: "反射結像光学の基礎 II:光線追跡"レーザー研究. 26. 570-574 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 波岡武: "反射結像光学の基礎 III:評価関数"レーザー研究. 26. 652-656 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H.Kinoshita: "Design of LIGA beamline using a multilayer coated reflection mirror"Proc. SPIE. 3447. 2-11 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 木下博雄: "0.1μm以降を狙いとした極端紫外線技術の展望"精密工学会誌. 64. 979-982 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H.Kinoshita: "A multilayer-coated reflection mirror for microfabrication"Jpn. J. Appl. Phys.. 37. 2758-2761 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H.Kinoshita: "Synchrotron radiation lithography for manufacturing integrated circuit beyond 100 nm"J. Synchrotron Rad.. 5. 320-325 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] T.Watanabe: "Electron-beam writing of large-area Fresnel zone plates"J. Synchrotron Rad.. 5. 791-793 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] T.Watanabe: "Design of beamline optics for EUVL"J. Synchrotron Rad.. 5. 1149-1152 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M.Yoyoda: "Zero-order free, multilayer-coated laminar grating in the 31-nm region"Jpn. J. Appl. Phys.. 37. 2066-2067 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 小池雅人: "光学技術ハンドブック第2版(分担章節:「分散素子」)"朝倉書店. (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 波岡武: "波岡武・山下広順共編:「X線結像光学」(分担章節:§2.X線とは,pp.7-16;§4.1.4.X線光学のための幾何光学,pp.61-69)"培風館. 309 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 木下博雄: "波岡武・山下広順共編:「X線結像光学」(分担章節:§5.6.縮小投影露光光学系,pp.148-153)"培風館. 309 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 柳原美広: "波岡武・山下広順共編:「X線結像光学」(分担章節:§4.2.2.表面粗さの効果,pp.73-74;§8.3.レーザープラズマX線による評価,pp.261-265;付録1.軟X線領域における薄膜の光学定数の決定法,pp.296-299)"培風館. 309 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 木下博雄: "光技術動向調査報告書XV(分担章節:§5.4.3.EUVリソグラフィ技術と光源,pp.371-374)"光産業技術振興協会. 513 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] T.Namioka: "Vacuum Ultraviolet Spectroscopy I, Experimental Methods in Physical Sciences Vol.31(分担章節:§17.Diffraction Gratings, pp.347-377)"Academic Press. 420 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M.Koike: "Vacuum Ultraviolet Spectroscopy II, Experimental Methods in Physical Sciences Vol.32(分担章節:§1.Normal-incidence monochromators and spectrometers, pp.1-20)"Academic Press. 307 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M. Toyoda, Y. Shitani, M. Yanagihara, T. Ejima, M. Yamamoto, and M. Watanabe: "A soft-w-ray imaging microscope with a multilayer-coated Schwarzschild objective"Jpn. J. Appl. Phys.. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M. Koike, T. Yamazaki, S. Ishikawa, T. Imazono, N. Miyata, M. Yanagihara, Y. Harada, and K. Sano: "Fabrication and evaluation of a varied-spacing holographic grating for a flat-field spectrograph (in Japanese)"JAERI-Conf.. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M. Yanagihra: "Studies on interfaces by soft x-ray emission (in Japanese)"Extended Abstr. OF 5th Symposium on X-Ray Imaging Optics. 22-23 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] S. Masui: "Aberrations in soft-x-ray spectroscopic optical systems (in Japanese)"Extended Abstr. OF 5th Symposium on X-Ray Imaging Optics. 56-57 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y. Li, H. Kinoshita, and T. Watanabe: "EUVL optical design for below 50 nm feature size"Extended Abstr. OF 5th Symposium on X-Ray Imaging Optics. 101-102 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M. Niibe, T. Watanabe, H. Nii, K. Tanaka, and H. Kinoshita: "Evaluation of reflection-type masks for extreme ultraviolet lithography (in Japanese9"Extended Abstr. OF 5th Symposium on X-Ray Imaging Optics. 103-104 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M. Koike, T. Yamazaki, N. Miyata, M. Yanagihara, E. Gullikson, Y. Harada, and K. Sano: "Holographic laminar gratings for a soft-x-ray flat-field spectrograph (in Japanese)"Extended Abstr. OF 5th Symposium on X-Ray Imaging Optics. 105-106 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] S. Masui and T. Namioka: "Aberration analysis of a double-element optical systems and its applications (in Japanese)"Extended Abstr. OF 5th Symposium on X-Ray Imaging Optics. 107-108 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] N. Miyata, S. Ishikawa, M. Yanagihara, and M. Watanabe: "Buried interfaces in Mo/Si multilayers studied by soft-x-ray emission spectroscopy"Jpn. J. Appl. Phys.. 38-11. 6476-6478 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] S. Masui and T. Namioka: "Geometric aberration theory of double-element optical systems"J Opt. Soc. Am. A. 16-9. 2253-2268 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H. Kinoshita, T. Watanabe, J. Daniel, D. Bajuk, Y. Platonov, and J. Wood: "Development of 3-aspherical mirror optics for extreme ultraviolet lithography"Proc. 9th Intern. Conf. on Production Engineering. 9-18 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] S. Irie, A. Miyafuji, T. Watanabe, H. Kinoshita, K. Sugisaki, T. Oshino, and K. Murakami: "Development for the alignment procedure of three-aspherical-mirror optics"Proc. 9th Intern. Conf. on Production Engineering. 67-72 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] T. Yamazaki, E. Gullikson, N. Miyata, M. Koike, Y. Harada, S. Mrowka, U. Kleineberg, J. Underwood, M. Yanagihara, and K. Sano: "Comparison of mechanically ruled versus holographically varied-spacing gratings for a soft x-ray flat field spectrograph"Appl. Opt.. 38-7. 4001-4003 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M. Koike, T. Yamazaki, and Y. Harada: "Design of holographic gratings recorded with aspheric wave-front recording optics for soft x-ray flat field spectrographs"J. Electron Spectrosc. and Relat. Phenom.. 101/103-6. 913-918 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] S. Masui and T. Namioka: "Aberration theory and design method of double-element optical systems"Proc. SPIE. 3737. 498-508 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] K. Murakami, T. Oshino, H. Kinoshita, T. Watanabe, M. Niibe, M. Ito, H. Oizumi, and H. Yamanashi: "Ring-field extreme ultraviolet exposure system using aspherical mirrors"Jpn. J. Appl. Phys.. 37-12. 6750-6755 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] T. Namioka: "Fundamentals of imaging reflective optics. I. Fermat's principle (in Japanese)"Rev. Laser Engineering. 26-6. 476-480 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] T. Namioka: "Fundamentals of imaging reflective optics. II. Ray tracing (in Japanese)"Rev. Laser Engineering. 26-7. 570-574 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] T. Namioka: "Fundamentals of imaging reflective optics. III. Merit function (in Japanese)"Rev. Laser Engineering. 26-8. 652-656 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H. Kinoshita, Y. Kimpara, T. Uruga, T. Watanabe, M. Niibe, Y. Platonov, and J. Wood: "Design of LIGA beamline using a multilayer coated reflection mirror"Proc. SPIE. 3447. 2-11 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H. Kinoshita and T. Watanabe: "The status of extreme ultraviolet lithography beyond 0.1μm ( in Japanese)"J. Jpn. Soc. Precision Engineering. 64-7. 979-982 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H. Kinoshita, Y. Kmpara, T. Watanabe, Y. Platonov, and J. L. Wood: "A multilayer-coated reflection mirror for microfabrication"Jpn. J. Appl. Phys.. 37-5. 2758-2761 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H. Kinoshita, T. Watanabe, and M. Niibe: "Synchrotron radiation lithography for manufacturing integrated circuit beyond 100 nm"J Synchrotron Rad.. 5-5. 320-325 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] T. Watanabe, T. Okada, and H. Kinoshita: "Electron-beam writing of large-area Fresnel zone plates"J Synchrotron Rad.. 5-5. 791-793 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] T. Watanabe, T. Haga, M. Niibe, and H. Kinoshita: "Design of beamline optics for EUVL"J Synchrotron Rad.. 5. 1149-1152 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M. Toyoda, N. Miyata, M. Yanagihara, and M. Watanabe: "Zero-order free, multilayer-coated laminar grating in the 31-nm region"Jpn. J. Appl. Phys.. 37-4. 2066-2067 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M.Toyoda: "A soft-x-ray imaging microscope with a multilayer-coated Schwarzschild objective"Jpn.J.Appl.Phys.. (in press9. (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] 小池雅人: "軟X線平面結像不等間隔溝ホログラフィック回折格子の製作と評価"JAERI-Conf.. 8発表予定). (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] 柳原美広: "軟X線発光による界面の研究"第五回X線結像光学シンポジウム予稿集. 22-23 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 増井 新: "軟X線分光光学系の収差"第五回X線結像光学シンポジウム予稿集. 56-57 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Y.Li: "EUVL optical design for below 50nm feature size"第五回X線結像光学シンポジウム予稿集. 101-102 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 新部正人: "極端紫外光リソグラフィ用反射型マスクの評価"第五回X線結像光学シンポジウム予稿集. 103-104 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 小池雅人: "軟X線フラットフイールドホログラフイックラミナー回折格子"第五回X線結像光学シンポジウム予稿集. 105-106 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 増井 新: "Plane symmetryを持つ2枚反射光学系の収差解析とその応用"第五回X線結像光学シンポジウム予稿集. 107-108 (1999)

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  • [Publications] N.Miyata: "Buried interfaces in Mo/Si multilayers studied by soft-X-ray emission spectroscopy"Jpn.J.Appl.Phys.. 38,10. 6476-6478 (1999)

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  • [Publications] S.Masui: "Geometric aberration theory of double-element optical systems"J.Opt. Soc. Am.. A16,9. 2253-2268 (1999)

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  • [Publications] H.Kinoshita: "Development of 3-aspherical mirror optics for extreme ultraviolet lithography"Proc.9th Int Conf.on Production Engineering. 9-18 (1999)

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  • [Publications] S.Irie: ""Development for the alignment procedure of three-aspherical-mirror optics"Proc.9th Int Conf.on Production Engineering. 67-72 (1999)

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  • [Publications] H.Kinoshita: "Progress in development of 3-aspherical mirror optics for EUVL,"Proc.SPIE. 3767. 164-171 (1999)

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  • [Publications] T.Yamazaki: "Comparison of mechanically ruled versus holographically varied-spacing gratings for a soft X-ray flat field spectrograph"Appl.Opt.. 38,7. 4001-4003 (1999)

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  • [Publications] M.Koike: "Design of holographic gratings recorded with aspheric wave-front recording optics for soft X-ray flat field spectrographs"J.Electron Spectrosc.and Relat.Phenom.. 101/103. 913-918 (1999)

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  • [Publications] S.Masui: "Aberration theory and design method of double-element optical systems"Proc.SPIE. 3737. 498-508 (1999)

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  • [Publications] 小池雅人: "光学技術ハンドプツク第2版(分担章節:「分散素子」)"朝倉書店. (2000)

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  • [Publications] 波岡 武: "波岡武・山下広順共編:「X線結像光学」 (分担章節:§2.X線とは、pp.7-16;§4.1.4.X線光学のための幾何光学,pp.61-69)"培風館. 309 (1999)

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  • [Publications] 木下博雄: "波岡武・山下広順共編:「X線結像光学」(分担章節:§5.6.縮小投影露光光学系、pp.148-153)"培風館. 309 (1999)

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  • [Publications] 柳原美広: "波岡武・山下広順共編:「X線結像光学」(分担章節:§4.2.2.表面粗さの効果,pp-73-74;§8-3.レーザープラズマX線による評価,pp.261-265;付録1.軟X線領域における薄膜の光学定数の決定法,pp.296-299)"培風館. 309 (1999)

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  • [Publications] 木下博雄: "光技術動向調査報告書XV(分担章節:§5.4.3.EUVリソグラフィ技術と光源,pp.371-374)"光産業技術振興協会. 513 (1999)

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  • [Publications] H.Kinoshita,T.Watanabe,and M.Niibe: "Synchrotron Radiation Lithography for manufacturing Integrated Circuits Beyond 100 nm" Journal of Synchrotron Radiation. 5. 320-325 (1998)

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  • [Publications] T.Watanabe,T.Haga,M.Niibe,and H.Kinoshita: "Design of beamline optics for EUVL" Journal of Synchrotron Radiation. 5. 1149-1152 (1998)

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  • [Publications] M.Koike,T.Yamazaki,and Y.Harada: "Design of holographic gratings recorded with aspheric wave-front recording optics for soft X-ray flat field spectrographs" Journal of Electron Spectroscopy and Related Phenomena. (印刷中). (1999)

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  • [Publications] S.Mashui and T.Namioka: "Third-Order Aberration Theory of Double-Ekement Optical Systems" Abstracts of 12^<th> Intem.Conf.Vacuum Ultraviolet Radiation Physics. We-118 (1998)

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  • [Publications] D.Attwood,M.Koike et al.: "Tunable coherent radiation in the soft X-ray and extreme ultraviolet spectral regions" IEEE Journal of Quantum Electronics. (印刷中). (1999)

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  • [Publications] M.Toyoda,N.Miyata,M.yanagihara,and M.Watanabe: "Zero-Order-Free,Multilayer-Coated Laminar Grating in the 31 nm Region" Japanese Journal of Applied physics. 37・4A. 2066-2067 (1998)

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  • [Publications] T.Namioka: "Vacuum Ultraviolet Spectroscopy I,Experimental Methods in the Physical Sciences Vol.31(Chapter 17)" Academic Press,New York, 347-377 (1998)

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  • [Publications] M.Koike: "Vacuum Ultraviolet Spectroscopy II.Experimental Methods in the Physical Sciences Vol.32(Chapter 1)" Academic Press,New York, 1-20 (1998)

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Published: 1998-04-01   Modified: 2016-04-21  

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