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Research on static and dynamic characteristics of the thermally induced levitation mechanism (TIL) using thermal creep flow.

Research Project

Project/Area Number 10650057
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied physics, general
Research InstitutionTottori University

Principal Investigator

FUKUI Shigehisa  Tottori University, Faculty of Engineering, Professor, 工学部, 教授 (40273883)

Project Period (FY) 1998 – 1999
Project Status Completed (Fiscal Year 1999)
Budget Amount *help
¥3,300,000 (Direct Cost: ¥3,300,000)
Fiscal Year 1999: ¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 1998: ¥2,600,000 (Direct Cost: ¥2,600,000)
KeywordsMolecular Gas Dynamics / Boltzmann Equation / Direct Simulation Monte Carlo / Thermal Creep Flow / Microtribology / Molecular Gas-film Lubrication / Nanotechnology / Micro Mechanism / モンテカルロ 直接シミュレーション(DSHC) / モンテカルロ直接シミューレーション(DSMC) / 非接触マイクロメカニズム / 動特性
Research Abstract

This research estimates the static and dynamic characteristics of the micro levitation mechanism caused by thermal creep flow, which occurs only in regions where the Knudsen number defined as the ratio of the molecular mean free path and the characteristic length is not negligible, between two parallel plates with submicron spacings and temperature gradients. Linearization analysis method in frequency domain of the static and dynamic characteristics is established by the use of the molecular gas film lubrication equation(MGL equation) including thermal creep flow effects, which is a Reynolds-type gas bearing equation for arbitrarily small spacings. Static pressure distributions by the method are compared with those by the direct simulation Monte Carlo (DSMC) technique and are found to agree well with each other. Dynamic pressures, which consist of stiffness and damping characteristics, are also analyzed by the linearization method of the MGL equation. The results of this research are helpful in designing the thermally induced micro levitation mechanism.

Report

(3 results)
  • 1999 Annual Research Report   Final Research Report Summary
  • 1998 Annual Research Report
  • Research Products

    (9 results)

All Other

All Publications (9 results)

  • [Publications] 福井茂寿、山根清美: "熱ほふく流を利用した超微小すきま浮上メカニズム動特性の分子気体潤滑解析"日本機械学会流体工学部門講演会講演論文集. 99・10. 123-124 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 福井茂寿、山根清美ほか2名: "熱ほふく流を利用したナノメータ浮上メカニズム(TIL)の基本特性解析"日本トライボロジー学会トライボロジー会議2000春東京予稿集. (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Fukui,S. and Yamane,K.: "Static and dynamic analyses of thermally induced leviation (TIL) mechanisms utilizing thermal creep flow (in Japanese)"Proceedings of JSME(Japan Society of Mechanical Engineers) Fluid Engineering Conference, Tottori. Vol.99-10. 123-124 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Fukui,S., Yamane,K., Yamazumi,T. and Wakasugi,Y.: "Fundamental characteristics of thermally induced leviation (TIL) mechanisms utilizing thermal creep flow (MGL and DSMC analyses) (in Japanese)"Proceedings of JAST(Japan Society of Tribologists) Tribology Conf. 2000, Tokyo. (in press). (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 福井茂寿,山根清美: "熱ほふく流を利用した超微小すきま浮上メカニズム動特性の分子気体潤滑解析"日本機械学会流体工学部門講演会講演論文集. 99-10. 123-124 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 福井茂寿,山根清美,山住剛,若杉康博: "熱ほふく流を利用したナノメータ浮上メカニズム(TIL)の基本特性解析"日本トライボロジー学会トライボロジー会議2000春東京予稿集. (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] 福井茂寿・山根清美: "分子気体潤滑のDSMC解析" 日本流体力学会第9回計算流体シンポジウム講演論文集. 435-436 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 福井茂寿・山根清美: "分子気体潤滑解析の液晶ディスプレイ作成・マイクロマシンへの応用" 日本機械学会第76期全国大会講演論文集(V). 151-152 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 福井茂寿・山根清美: "自由分子流領域における気体潤滑の特性解析(速度分布関数に基づく境界値問題)" 日本機械学会IIP,98講演会論文集. 74-75 (1998)

    • Related Report
      1998 Annual Research Report

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Published: 1998-04-01   Modified: 2016-04-21  

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