Development of ultra precision straight-motion stage by referring a crystalline array on crystalline surface

• Project/Area Number: 10650109
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: 機械工作・生産工学
• Research Institution: Nagaoka University of Technology
• Principal Investigator: TAKADA Koji Nagaoka Univ. of Tech., Engineering Faculty, Professor, 工学部, 教授 (80126474)
• Co-Investigator(Kenkyū-buntansha): AKETAGAWA Masato Nagaoka Univ. of Tech., Engineering Faculty, Associate professor, 工学部, 助教授 (10231854) ; YANAGI Kazuhisa Nagaoka Univ. of Tech., Engineering Faculty, Professor, 工学部, 教授 (80108216)
• Project Period (FY): 1998 – 1999
• Project Status: Completed (Fiscal Year 1999)
• Budget Amount: ¥3,800,000 (Direct Cost: ¥3,800,000); Fiscal Year 1999: ¥500,000 (Direct Cost: ¥500,000); Fiscal Year 1998: ¥3,300,000 (Direct Cost: ¥3,300,000)
• Keywords: scanning tunneling microscope / regular crystalline lattice / ultra precision straight-motion stage / sub-nanometer / Atomic tracking control / トラッキング制御

Research Abstract

A lattice spacing of approximately 0.2 nm is stable and uniform over long range when the crystal are stress free. An atomic array on crystalline surface is also thought to be straightness-reference. Using a scanning tunneling microscope (STM), it is possible to obtain an atomic image on crystalline surface in air. An ultra precision straightness reference and digital lattice scale by referring a crystalline array on a crystalline surface can be achieved with STM. The following results were obtained.
(1) Atomic tracking and movement control of the tip position of a STM by referring to atomic array on regular crystalline surface was developed. The maximum tracking length along atomic array on crystalline of graphite was around 100 nm. This control method can be extended to real-time length measurement with subnanometer resolution using regular crystalline lattice.
(2) Ultra precision straight-motion stage by referring a crystalline array on crystalline surface was developed. The atomic tracking control was applied to the stage. The maximum tracking and moving length of 100 nm along atomic array on crystalline of graphite was achieved.

Research Products

• [Publications] Masato Aketagawa et al.: "Tracking and stepping control of the tip position of a scanning tunneling microscope by referring to atomic points and arrays on a regular crystalline surface"Rev. Sci. Instrum.. 70・4. 2053-2059 (1999)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] Masato Aketagawa et al.: "Tracking and stepping control of the tip position of a scanning tunneling microscope by referring to atomic points and arrays on a regular crystalline surface"Review of Scientific Instruments. Vol. 70, No. 4. 2053-2059 (1999)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] Masato Aketagawa et al.: "Tracking and stepping control of the tip position of a scanning tunneling microscope by referring to atomic points and arrays on a regular crystalline surface"Review of Scientific Instruments. 70・4. 2053-2059 (1999)
• [Publications] Masato Aketagawa et al.: "Direct length comparison between regular crystalline lattice and SEM standard grating using dual tunneling unit STM" International Journal of Machine Tools and Manufacture. 38・5-6. 677-683 (1998)
• [Publications] Masato Aketagawa et al.: "Length measurement using regular crystalline lattice and a dual tunneling unit scanning tunneling microscope in a thermo-stabilized cell" Measurement Science and Technology. 9・7. 1076-1081 (1998)
• [Publications] Masato Aketagawa et al.: "Long atomic imaging over a 5-μm-long region using ultra-low thermally drifted dual-tunneling-unit scanning tunneling microscope in a thermo-stabilized cell" Review of Scientific Instruments. 70・1. 133-136 (1999)
• [Publications] 明田川正人 他: "結晶格子を基準とする微小長さ測定(第3報)-熱ドリフト誤差の抑制と測定範囲の数μmレベルへの拡大-" 精密工学会誌. 65・1. 121-125 (1999)
• [Publications] Masato Aketagawa et al.: "Tracking and stepping control of the tip position of a scanning tunneling microscope by referring to atomic points and arrays on a regular crystalline surface" Review of Scientific Instruments. 70・4未定. (1999)