STUDY OF SHAPE MEASUREMENTS ON AN ULTRA PRESICION LATHE BY USING A LATERAL SHEARING INTERFEROMETER
| Project/Area Number |
10650119
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
機械工作・生産工学
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| Research Institution | TOYAMA PREFECTURAL UNIVERSITY |
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Principal Investigator |
NOMURA Takashi TOYAMA PREFECTURAL UNIVERSITY, MECHANICAL SYSTEMS ENGINERING, ASSOCIATE PROFESSOR, 工学部, 助教授 (00104977)
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| Co-Investigator(Kenkyū-buntansha) |
KAMIYA Kazuhide TOYAMA PREFECTURAL UNIVERSITY, MECHANICAL SYSTEMS ENGINERING, ASSISTANT, 工学部, 助手 (00244509)
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| Project Period (FY) |
1998 – 1999
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| Project Status |
Completed (Fiscal Year 1999)
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| Budget Amount *help |
¥3,700,000 (Direct Cost: ¥3,700,000)
Fiscal Year 1999: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 1998: ¥2,800,000 (Direct Cost: ¥2,800,000)
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| Keywords | LATERAL SHEARING INTERFEROMETER / ON-MACHEINE SHAPE MEASUREMENT / ULTRA PRESICION LATHE / ラテラルシアリング干渉計 / 回折格子 / レーザ描画装置 |
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| Research Abstract |
1) A systematic error caused by changing of a shear amount was clarified in the integration method with respect to analysis of a lateral shearing interferogram. A analyzing method combined the integration method with the polynomial method was proposed to remove the error.
2) A program was developed to remove a systematic error in the optical system of the interferometer.
3) An error is caused, when a lateral shearing interferogram of a work piece with a periodic aberration is analyzed. The analyzing error was clarified.
4) A lateral shearing interferometer was deigned and manufactured. By the interferometer, shape measurements were performed on the lathe.
5) A compact lateral shearing interferometer was deigned and manufactured. The interferometer can be set on the lathe without remove the toll post of the lathe.
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Report
(3 results)
Research Products
(8 results)
