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Construction and Control of Ultra-precision Positioning System Driven by Leadscrew Mechanism Applied Elastic Functional Element

Research Project

Project/Area Number 10650257
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionShinshu University

Principal Investigator

FUKADA Shigeo  Shinshu University, Faculty of Engg., Associate Prof., 工学部, 助教授 (70156743)

Project Period (FY) 1998 – 1999
Project Status Completed (Fiscal Year 1999)
Budget Amount *help
¥3,500,000 (Direct Cost: ¥3,500,000)
Fiscal Year 1999: ¥600,000 (Direct Cost: ¥600,000)
Fiscal Year 1998: ¥2,900,000 (Direct Cost: ¥2,900,000)
KeywordsPositioning / Leadscrew / Ultra-precision
Research Abstract

This study proposes a simple method that will give extreme improvements in positioning performance of leadscrew mechanism. The method is achieved by intentionally attaching a linear elastic element to a sliding leadscrew. This study aims at investigating propriety and availability of the proposed method, and at considering control method proper to the new mechanism. A positioning system is constructed to be attached the elastic element, while design procedure of the elastic element is considered to manufacture the element practically. Moreover, the property of the developed system and control method is discussed.
A positioning stage with stroke of 200 mm is newly developed. The stage is driven by a sliding leadscrew rotated by a DC servo motor of 130 W, and the motor is driven by a linear current amplifier. The table displacement is detected by a laser interferometer. A special arrangement of optical elements is introduced using a three-sided mirror set on the table to reflect the laser … More beam from the interferometer. The optical arrangement makes it possible to measure the table displacement without any influence of Abbe's error. The design method of the elastic element is shown using a cylinder with flexure hinges formed by notching. Three elastic elements with different stiffness are made practically.
The stiffness of the manufactured elements are measured and compared to the design specifications. The actual stiffness is smaller than the calculation. Some experiments are performed on the developed positioning system to investigate its performance. The relation between the torque input and the table displacement shows quite linear characteristics in microscopic range, so that the availability of the method is proved. The stage is controlled by a software servo system. The controller is designed based on PI operation, and the parameters are given in coarse, fine and ultra-fine range respectively. It is ascertained that the positioning resolution of the system is 5 nm, and that the error of 20 mm step positioning is less than 6 nm. Less

Report

(3 results)
  • 1999 Annual Research Report   Final Research Report Summary
  • 1998 Annual Research Report
  • Research Products

    (15 results)

All Other

All Publications (15 results)

  • [Publications] 深田茂生: "弾性変換機能を付加した送りねじ機構による超精密位置決め"1998年度精密工学会秋季大会学術講演会講演論文集. 471 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 陶 夏: "弾性変形要素を付加したすべり送りねじによる超精密位置決め(静・動摩擦特性のモデル実験)"日本機械学会北陸信越支部第36期総会講演会講演論文集. 221-222 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Shigeo Fukada: "Ultra-precision Positioning with Nanometric Resolution Using Leadscrew Mechanism"Proceedings of the 1st International euspen Conference. Vol.1. 56-59 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 深田茂生: "弾性変形要素を付加したすべり送りねじによる超精密位置決め(線形な微動特性を持つ超精密位置決めシステムの構成)"1999年度精密工学会秋季大会学術講演会講演論文集. 526 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Shigeo Fukada: "A Newly Developed Positioning System with Nanometric Resolution Driven by Leadscrew Mechanism"Proceedings of 1st euspen Topical Conference on Fabrication and Metrology in Nanotechnology. (2000年5月発表予定). (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Shigeo FUKADA: "Ultra-precision Positioning Driven by leadscrew Mechanism Attached Elastic Element"Proc. JSPE. 1998 Autumn. (in Japanese). 471 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Xia TAO: "Highly Precise Positioning by Sliding Lead Screw Attached Elastic Element (Model Experiment on Static-Kinetic Friction)"Proc. 36th Conference of Hokuriku-Shinetsu branch of JSME. (in Japanese). 221-222 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Shigeo FUKADA: "Ultra-precision Positioning with Nanometric Resolution Using Leadscrew Mechanism"Proc. 0 of the 1st International euspen Conference. 56-59 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Shigeo FUKADA: "Ultra-precision Positioning Driven by leadscrew Mechanism Attached Elastic Element (Construction of Ultra-precision Positioning System with Linear Property within Microscopic Range)"Proc. JSPE, 1999 Autumn. (in Japanese). 526 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Shigeo FUKADA: "A Newly Developed Positioning System with Nanometric Resolution Driven by Leadscrew Mechanism"Proc. of 1st euspen Topical Conference on Fabrication and Metrology in Nanotechnology. (Programmed). (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Shigeo FUKADA: "Ultra-precision Positioning with Nanometric Resolution Using Leadscrew Mechanism"Proceedings of the 1st International euspen Conference. vol.1. 56-59 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 深田茂生: "弾性変形要素を付加したすべり送りねじによる超精密位置決め(線形な微動特性を持つ超精密位置決めシステムの構成)"1999年度精密工学会秋季大会学術講演会講演論文集. 526 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Shigeo FUKADA: "A Newly Developed Positioning System with Nanometric Resolution Driven by Leadscrew Mechanism"1st euspen Topical Conference on Fabrication and Metrology in Nanotechnology. (2000年5月発表予定). (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] 深田茂生: "弾性変換機能を付加した送りねじ機構による超精密位置決め" 1998年度精密工学会秋季大会学術講演会講演論文集. 471 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 陶夏,深田茂生,賀勢晋司: "弾性変形要素を付加したすべり送りねじによる超精密位置決め" 日本機械学会北陸信越支部代36期総会・講演会. 発表予定. (1999)

    • Related Report
      1998 Annual Research Report

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Published: 1998-04-01   Modified: 2016-04-21  

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