| Project/Area Number |
10650314
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Electronic materials/Electric materials
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| Research Institution | UNIVERSITY OF THE RYUKYUS |
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Principal Investigator |
TOGUCHI Minoru UNIVERSITY OF THE RYUKYUS, FACULTY OF ENGINEERING, PROFESSOR, 工学部, 教授 (10163982)
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| Co-Investigator(Kenkyū-buntansha) |
SONEGAWA Tomihiro UNIVERSITY OF THE RYUKYUS, FACULTY OF ENGINEERING, ASSISTANT, 工学部, 助手 (20295299)
HIGA Akira UNIVERSITY OF THE RYUKYUS, FACULTY OF ENGINEERING, ASSOCIATE PROFESSOR, 工学部, 助教授 (50228699)
MAEHAMA Takehiro UNIVERSITY OF THE RYUKYUS, FACULTY OF ENGINEERING, ASSOCIATE PROFESSOR, 工学部, 助教授 (60045044)
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| Project Period (FY) |
1998 – 1999
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| Project Status |
Completed (Fiscal Year 1999)
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| Budget Amount *help |
¥3,500,000 (Direct Cost: ¥3,500,000)
Fiscal Year 1999: ¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 1998: ¥2,800,000 (Direct Cost: ¥2,800,000)
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| Keywords | HYDROGENATED AMORPHOUS CARBON THIN FILM / VHF PLASMA / SPUTTERING / HYDOROGEN PARTIAL PRESSURE / PLASMA TREATMENT / SUBSTRATE BIAS |
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| Research Abstract |
IN THIS STUDY, GROWTH CONDITIONS AND THE FILM STRUCTURE OF HAYDROGENATED AMORPHOUS CARBON FILMS BY SPUTTERING USING VHF PLASMA WERE INVESTIGATED. STRUCTURAL CHANGES OF THE FILMS BY PLASMA TREATMENT IS ALSO INVESTIGATED.
AS APPLYING SUBSTRATE BIAS, THE RANGE OF HYDROGEN PARTIAL PRESSURE IN WHICH THE FILMS WERE ABLE TO BE FORMED BECOMES NARROW. THE DEPENDENCE OF HYDROGEN CONTENT IN THE A-C: H FILMS PREPARED WITH SUBSTRATE BIAS ON HYDROGEN PARTIAL PRESSURES IS SIMILAR TO THAT WITHOUT SUBSTRATE BIAS. HOWEVER, THE PARTIAL PRESSURE AT THE MAXIMUM OF THE HYDROGEN CONTENT IN THE FILM SHIFTS TOWARD LOW PRESSURE IN CASE OF APPLYING SUBSTRATE BIAS.
IT IS FOUND THAT THE OPTICAL ENERGY GAPS AND THE REFRACTIVE INDEX OF THE FILMS DEPEND ON STRONGLY THE HYDROGEN CONTENT IN THE FILMS. FURTHERMORE, IT IS ALSO FOUND THAT TREND OF THE CHANGES OF THE STRUCTURE AND OPTICAL GAPS OF THE FILMS BY PLASMA TREATMENT DEPEND ON THE HYDROGEN CONTENTS IN THE FILMS AS PREPARED.
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