| Project/Area Number |
10650330
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
電子デバイス・機器工学
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| Research Institution | Saitama University |
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Principal Investigator |
KATSUBE Teruaki SAITAMA UNIVERSITY, INSTITUTE OF ENGINEERING, PROFESSOR, 工学部, 教授 (70008879)
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| Co-Investigator(Kenkyū-buntansha) |
UCHIDA Hidekazu SAITAMA UNIVERSITY, INSTITUTE OF ENGINEERING, ASSISTANCE, 工学部, 助手 (60223559)
MAEKAWA Hitoshi SAITAMA UNIVERSITY, INSTITUTE OF ENGINEERING, PROFESSOR, 工学部, 教授 (30135660)
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| Project Period (FY) |
1998 – 1999
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| Project Status |
Completed (Fiscal Year 1999)
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| Budget Amount *help |
¥3,300,000 (Direct Cost: ¥3,300,000)
Fiscal Year 1999: ¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 1998: ¥2,600,000 (Direct Cost: ¥2,600,000)
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| Keywords | active detection method / surface photo voltage / gas sensor / two dimensional gas sensor / resistance change / gas flow detection / ガス流 / 能動ガスセンサ / 二次元センサ / WO_3 / SnO_2 / NO_Xガスセンサ |
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| Research Abstract |
A novel odor sensor was developed using a surface photo-voltage method and applied it for the detection of environment contamination gas. Laser beam focused on a semiconductor surface generates a potential on the semiconductor surface which was used as the driving force to measure the current flow along the gas sensitive thin film deposited on the semiconductor chip. The adsorption of gas molecules changes not only the surface potential but also the thin film resistance resulted in the current change. The laser beam was scanned by a galvano-mirror to make it possible a high speed measurement of two dimensional response.
First, Pt thin film was deposited as a gas sensitive film for the detection of NOィイD2xィエD2 gas and it was shown that the NO and NOィイD22ィエD2 gas were successfully detected by the monitoring of external current change. Next, the effect of a catalytic thin film was investigated by coating various catalytic films on the Pt film. It was found that both of WOィイD23ィエD2 and SnOィイD22ィエD2 coatings enhance the sensitivity and the response speed. The response speed became 4 times faster by WOィイD23ィエD2 film coating and the sensitivity was also improved by approximately two times.
The observation of two dimensional response was demonstrated by depositing WOィイD23ィエD2 and SnOィイD22ィエD2 at different positions on a single semiconductor chip. The response change of the different films were clearly visualized as a two dimensional map. It was also shown that two dimensional measurement made it possible to detect the direction and the speed of a gas flow by visual observation of the flow map.
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