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オゾンガスによるシリコンおよびシリコン基セラミックスの酸化機構解明

Research Project

Project/Area Number 10650701
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Material processing/treatments
Research InstitutionTohoku University

Principal Investigator

成島 尚之  東北大, 工学(系)研究科, 助教授 (20198394)

Project Period (FY) 1998
Project Status Completed (Fiscal Year 1998)
Budget Amount *help
¥3,100,000 (Direct Cost: ¥3,100,000)
Fiscal Year 1998: ¥3,100,000 (Direct Cost: ¥3,100,000)

URL: 

Published: 1998-04-01   Modified: 2016-04-21  

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