オゾンガスによるシリコンおよびシリコン基セラミックスの酸化機構解明

• Project/Area Number: 10650701
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Material processing/treatments
• Research Institution: Tohoku University
• Principal Investigator: 成島 尚之 東北大, 工学(系)研究科, 助教授 (20198394)
• Project Period (FY): 1998
• Project Status: Completed (Fiscal Year 1998)
• Budget Amount: ¥3,100,000 (Direct Cost: ¥3,100,000); Fiscal Year 1998: ¥3,100,000 (Direct Cost: ¥3,100,000)